公开(公告)号：EP1350758B1

公开(公告)日：2007-12-12

申请号：EP03002122.4

申请日：2003-01-30

Applicant: MICROSOFT CORPORATION

Inventor： Sinclair, Michael J.

IPC: B81B3/00 ,  G02B26/08

CPC classification number: B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047

公开(公告)号：EP1840080A2

公开(公告)日：2007-10-03

申请号：EP06291330.6

申请日：2006-08-18

Applicant: Korea Institute of Science and Technology

Inventor： Park, Suk-ho, 115/1204, Dong-a Echoville Apt. ,  Kim, Jin-seok, c/o 108/1202, Samsung Raemian Apt. ,  Hong, Ju-hee, ,  Shin, Hee-sup, c/o 101/1308 Hyoseong Chongsol Apt. ,  Yang, Sung-wwok ,  Lee, Dong-won, c/o 101/1403, Lotte Apt. ,  Lee, Suk-chan ,  Kim, Hui-su, KIST Apt.

IPC: B81B3/00

CPC classification number: B81B3/0024 ,  B81B2201/032 ,  B81B2203/051 ,  Y10S310/80

Abstract: A polymer linear actuator for a micro electro mechanical system (MEMS) and a micro manipulator for a measurement device of cranial nerve signal using the same are provided. The polymer linear actuator has first and second bodies positioned spaced apart to a distance from each other, and one or more pairs of V-type moving units connecting the first and second bodies together, wherein the moving units in pair are opposed to each other to convert a rotation motion of the respective moving units into a linear motion, thereby causing the first and second bodies to move linearly.

Abstract translation: 提供了用于微机电系统（MEMS）和微操纵器使用相同的脑神经信号的测量装置中的聚合物线性致动器。 聚合物的线性致动器具有移动连接第一主体和第二主体单元一起，在worin对移动单元定位在第一和第二主体彼此间隔开的距离，并且一对或多对V型的反对海誓山盟到 转换respectivement移动单元成直线运动，从而使第一和第二本体以线性移动的旋转运动。

公开(公告)号：EP1306350A3

公开(公告)日：2005-12-21

申请号：EP02023905.9

申请日：2002-10-24

Applicant: Rockwell Automation Technologies, Inc.

Inventor： Herbert, Patrick C. ,  Annis, Jeffrey R. ,  Yao, Jun J. ,  Morris, Winfred L. ,  Larsson, Henric ,  Harris, Richard D. ,  Kretschmann, Robert J.

IPC: B81B3/00

CPC classification number: H03H9/462 ,  B81B3/0072 ,  B81B2201/032 ,  B81B2203/0109 ,  B81B2203/051

Abstract: In a MEMS device employing a beam supported by transverse arms, potential bowing of the transverse arms caused by fabrication processes, temperature or local self-heating from resistive losses is accommodated by flexible terminations of the transverse arms. Alternatively, this bowing is controlled so as to provide selective biasing to the beam or mechanical advantage in the sensing of beam motion.

公开(公告)号：EP1040492A1

公开(公告)日：2000-10-04

申请号：EP98959979.0

申请日：1998-12-14

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE

Inventor： FOUILLET, Yves

IPC: H01H1/00

CPC classification number: H01H1/0036 ,  B81B3/0024 ,  B81B2201/016 ,  B81B2201/032 ,  H01G5/16 ,  H01H2001/0042 ,  H01H2037/008 ,  Y10T29/42 ,  Y10T29/49105 ,  Y10T29/49117 ,  Y10T29/49124 ,  Y10T29/49128 ,  Y10T29/49155

Abstract: The invention concerns a microsystem, in particular for producing microswitches or microvalves, constituted on a substrate (50) and used for producing a shift between a first operating state and a second operating state by means of a heat actuated device with bi-metal switch effect. The heat-actuated device comprises a deformable element (51) connected, by opposite ends, to the substrate (50) so as to present naturally a deflection without stress relative to the substrate surface which faces it, said natural deflection determining the first operating state, the second operating state being produced by the heat-actuated device which induces, by the effect of temperature variation, a deformation of the deformable element (51) tending to reduce its deflection and submitting it to a compressive stress by buckling effect in a direction opposite to its natural deflection.

公开(公告)号：EP1029218A1

公开(公告)日：2000-08-23

申请号：EP98957608.7

申请日：1998-11-05

Applicant: MCNC

Inventor： DHULER, Vijayakumar, R. ,  WOOD, Robert, L.

IPC: G01B7/004 ,  G01B7/34 ,  G01N27/00 ,  B25J7/00

CPC classification number: F03G7/06 ,  B81B3/0024 ,  B81B2201/032 ,  B81B2201/054 ,  B81B2203/0109 ,  B81B2203/051 ,  G02B6/3803 ,  G02B6/4226 ,  H01H1/0036 ,  H01H9/14 ,  H01H61/00 ,  H01H2001/0042 ,  H01H2001/0068 ,  H01H2061/006

Abstract: A microelectromechanical (MEMS) positioning apparatus is provided that can precisely microposition an object in each of the X, Y and Z directions. The MEMS positioning apparatus includes a reference surface, a support disposed in a fixed position to the reference surface, and a stage defining a XY plane that is suspended adjacent to the support and over at least a portion of the reference surface. The MEMS positioning apparatus also includes at least one and, more typically, several actuators for precisely positioning the stage and, in turn, objects carried by the stage. For example, the MEMS positioning apparatus can include first and second MEMS actuators for moving the stage in the XY plane upon actuation. In addition, the MEMS positioning apparatus can include a Z actuator, such as a thermal bimorph structure, for moving the stage in the Z direction.

公开(公告)号：EP3301498A1

公开(公告)日：2018-04-04

申请号：EP17190941.9

申请日：2017-09-13

Applicant: Mitsumi Electric Co., Ltd.

Inventor： MARUYAMA, Yuki ,  YAMADA, Tsukasa

IPC: G02B26/08 ,  B81B3/00

CPC classification number: G02B26/0858 ,  B81B3/0072 ,  B81B2201/032 ,  B81B2201/042 ,  B81B2203/058 ,  G02B26/10

Abstract: An optical scanning device is provided. The optical scanning device includes a mirror having an optical reflection surface, a movable frame supporting the mirror, a pair of drive beams supporting the movable frame from both sides, a drive source, disposed on the drive beams, that causes the movable frame to be swung around a predetermined axis, a fixed frame supporting the drive beams. Each of the drive source includes a lower electrode formed on the drive beams, a piezoelectric thin film formed on the lower electrode, an upper electrode formed on the piezoelectric thin film, and a stress counter film, formed on the upper electrode or formed between the piezoelectric thin film and the upper electrode, that generates a compressive stress on the drive beams.

Abstract translation: 提供了一种光学扫描装置。 该光学扫描装置包括：具有光学反射表面的镜子;支撑镜子的可移动框架;从两侧支撑可移动框架的一对驱动梁;驱动源，设置在驱动梁上，使得可移动框架成为 围绕预定轴线摆动，支撑驱动梁的固定框架。 每个驱动源包括形成在驱动梁上的下电极，形成在下电极上的压电薄膜，形成在压电薄膜上的上电极和形成在上电极上或形成在 压电薄膜和上电极，其在驱动梁上产生压缩应力。

公开(公告)号：EP3291060A1

公开(公告)日：2018-03-07

申请号：EP17187929.9

申请日：2017-08-25

Applicant: Immersion Corporation

Inventor： KHOSHKAVA, Vahid ,  CRUZ-HERNANDEZ, Juan Manuel ,  LEVESQUE, Vincent

IPC: G06F3/01 ,  B81B7/00 ,  C22F1/00 ,  F03G7/06 ,  F16K31/00 ,  F16K31/02 ,  B06B1/06

CPC classification number: F03G7/065 ,  B06B1/0688 ,  B81B3/0024 ,  B81B2201/031 ,  B81B2201/032 ,  C22F1/006 ,  G06F3/016

Abstract: A haptic actuator device includes a surface with a mechanical property responsive to localized temperature changes. The surface can include a layer or sheet comprising a shape-memory material. The haptic actuator device can further include an actuator configured to selectively deform a plurality of regions in the sheet; and a temperature controller adapted to control the temperatures of the plurality of regions. A method of localized actuation includes selectively controlling the temperatures of the plurality of regions to be above a shape-memory transition temperature of the shape-memory material; selectively deforming at least one of the regions; while maintaining the deformation of the at least one region, lowering the temperature of the at least one region to below the shape-memory transition temperature; subsequently withdrawing the applied stress; and thereafter heating the at least one region to above the shape-memory transition temperature, causing the region to return to its pre-deformation shape.

Abstract translation: 触觉致动器装置包括具有响应于局部温度变化的机械特性的表面。 表面可以包括包含形状记忆材料的层或片。 触觉致动器装置可进一步包括致动器，致动器构造成选择性地使片材中的多个区域变形; 以及适于控制多个区域的温度的温度控制器。 局部致动的方法包括选择性地将多个区域的温度控制在形状记忆材料的形状记忆转变温度以上; 选择性地使至少一个区域变形; 同时保持所述至少一个区域的变形，将所述至少一个区域的温度降低到低于形状记忆转变温度; 随后撤回施加的应力; 然后将该至少一个区域加热到高于形状记忆转变温度，使该区域恢复到其预变形形状。

公开(公告)号：EP2504273B1

公开(公告)日：2016-01-27

申请号：EP10785498.6

申请日：2010-11-22

Applicant: BAE Systems PLC

Inventor： HUCKER, Martyn John ,  STURLAND, Ian Michael ,  ELEY, Rebecka

IPC: B81B3/00 ,  H01L41/09 ,  H01L41/313

CPC classification number: H01L41/313 ,  B81B3/0021 ,  B81B2201/032 ,  B81B2203/0118 ,  B81B2203/051 ,  H01L41/096

Abstract: A MEMS device (e.g. a piezoelectric actuator), and method of fabrication thereof, having a moveable portion comprising a layer of material (6) (e.g. a substrate layer formed from a substrate wafer) having relatively low rigidity in a direction in the plane of a surface of the layer of material (6), and relatively high rigidity in a direction through the plane; wherein the relatively low rigidity is provided by ridges and grooves (60) in a further surface of the layer of material (6), the further surface of the material (6) being substantially perpendicular to the direction in the plane. The MEMS device may comprise a layer of piezoelectric material (2) bonded to the surface of the layer of material (6). Actuation of the MEMS device (e.g. actuation in the plane of the surface of the layer of material (6)) may be performed by applying an electrical field across the piezoelectric material.

公开(公告)号：EP2571156A4

公开(公告)日：2014-10-15

申请号：EP11780513

申请日：2011-04-27

Applicant: KONICA MINOLTA HOLDINGS INC

Inventor： HIGASHINO KUSUNOKI ,  MATSUDA SHINYA

IPC: A61B5/00 ,  B41J2/045 ,  B41J2/055 ,  B81B3/00 ,  H01L41/047 ,  H01L41/09

CPC classification number: H01L41/0973 ,  B41J2/14233 ,  B41J2/161 ,  B41J2/1623 ,  B41J2/1628 ,  B41J2/1631 ,  B41J2/1645 ,  B41J2/1646 ,  B81B3/0072 ,  B81B2201/032 ,  B81B2203/0127 ,  H01L41/0475

公开(公告)号：EP2336081B1

公开(公告)日：2014-09-24

申请号：EP10177217.6

申请日：2006-02-23

Applicant: Pixtronix, Inc.

Inventor： Hagood, NESBITT W. ,  Steyn, JASPER LODEWYK

IPC: G02B26/02 ,  G09G3/34

CPC classification number: G09G3/3433 ,  B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2203/051 ,  G02B26/02 ,  G02B26/0841 ,  G09G2300/0809 ,  G09G2310/0262