Electron gun
    13.
    发明公开
    Electron gun 失效
    电子枪。

    公开(公告)号:EP0026427A1

    公开(公告)日:1981-04-08

    申请号:EP80105690.4

    申请日:1980-09-22

    CPC classification number: H01J1/15 H01J3/02 H01J37/06

    Abstract: An electron gun (1) having a cathode (11) of a lanthanum hexaboride single crystal is disclosed in which the axis of the cathode (11) is set to such a crystal orientation that the electron beam has two intensive emission regions which are asymmetrical with each other in intensity. In the electron gun ,(1), even at a low heating temperature of the cathode (11), a single spot of an image by the electron beam of a more intensive emission region since the electron beam of a weaker intensity emission region is blocked by an aperture (2).

    Cathode with improved work function and method for making the same
    19.
    发明公开
    Cathode with improved work function and method for making the same 有权
    阴极具有改进的功函数,并产生相同的方法

    公开(公告)号:EP1063669A3

    公开(公告)日:2006-08-16

    申请号:EP00305015.0

    申请日:2000-06-13

    CPC classification number: H01J1/15 H01J9/042 H01J37/06 H01J2237/3175

    Abstract: A cathode (110) with an improved work function, for use in a lithographic system, such as the SCALPEL™ system, which includes a buffer (114) between a substrate (112) and an emissive layer (116), where the buffer alters, randomizes, miniaturizes, and/or isolates the grain structure at a surface of the substrate to reduce the grain size, randomize crystal orientation and reduce the rate of crystal growth. The buffer layer may be a solid solution or a multiphase alloy. A method of making the cathode by depositing a buffer between a surface of the substrate and an emissive layer, where the deposited buffer alters, randomizes, miniaturizes, and/or isolates the grain structure at a surface of the substrate to reduce the grain size, randomize crystal orientation and reduce the rate of crystal growth.

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