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    Electrical discharge heating device and method of heating using such
    15.
    发明公开
    Electrical discharge heating device and method of heating using such 失效
    放电加热装置及其加热方法

    公开(公告)号：EP0004751A3

    公开(公告)日：1979-10-31

    申请号：EP79300520

    申请日：1979-03-29

    申请人： Laporte Industries Limited

    发明人： Robinson, Michael

    IPC分类号： H05B07/00 ,  H05H01/26 ,  H01J37/32

    CPC分类号： H05H1/38 ,  H01J37/023 ,  H05B7/00

    摘要： In an expanded electrical discharge heater (1) a moveable discharge source is provided with a drive linkage comprising two separately but simultaneously operable linkages, each of which may be a crank (4) motivated arm (5), each linkage being capable of applying a reciprocating movement to the discharge source at an angle to that applied by the other linkage. By control of the frequency ratio and phase shift between the reciprocating movements complex path patterns of the discharge source may be achieved thereby enabling wear to be more evenly distributed about the discharge source and the heater interior. A high proportion of the cross-section of the heating chamber (14) may be traversed (15) giving the possibility of an increase in the effective capacity of the heating chamber and of a lengthened residence time in the heating chamber.

    摘要翻译： 在扩展放电加热器（1）中，可移动排放源设置有包括两个分开但可同时操作的连接件的驱动连杆，每个连杆可以是曲柄（4）动力臂（5），每个连杆能够施加 以与由另一个连杆施加的角度成一定角度的往复运动。 通过控制往复运动之间的频率比和相移，可以实现放电源的复杂路径图案，从而使磨损更均匀地分布在放电源和加热器内部周围。 加热室（14）的横截面的高比例可以横穿（15），从而提供加热室的有效容量增加的可能性和在加热室中延长的停留时间。

    CHARGED PARTICLE BEAM SYSTEM
    16.
    发明公开
    CHARGED PARTICLE BEAM SYSTEM 审中-公开
    带电粒子束系统

    公开(公告)号：EP3166126A1

    公开(公告)日：2017-05-10

    申请号：EP16196946.4

    申请日：2016-11-02

    申请人： JEOL LTD.

    发明人： KAWAI, Shuji

    IPC分类号： H01J37/20 ,  H01J37/244

    CPC分类号： H01J37/023 ,  G01N23/20091 ,  H01J37/10 ,  H01J37/20 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28 ,  H01J2237/024 ,  H01J2237/2445

    摘要： There is provided a charged particle beam system in which a detector can be placed in an appropriate analysis position. The charged particle beam system (100) includes: a charged particle source (11) for producing charged particles; a sample holder (20) for holding a sample (S); a detector (40) for detecting, in the analysis position, a signal produced from the sample (S) by impingement of the charged particles on the sample (S); a drive mechanism (42) for moving the detector (40) into the analysis position; and a controller (52) for controlling the drive mechanism (42). The controller (52) performs the steps of: obtaining information about the type of the sample holder (20); determining the analysis position on the basis of the obtained information about the type of the sample holder (20); and controlling the drive mechanism (42) to move the detector (40) into the determined analysis position.

    摘要翻译： 提供了一种带电粒子束系统，其中检测器可以放置在适当的分析位置。 带电粒子束系统（100）包括：用于产生带电粒子的带电粒子源（11） 用于保持样本（S）的样本保持器（20）; 检测器（40），用于在分析位置通过冲击样品（S）上的带电粒子而从样品（S）产生信号; 驱动机构（42），用于将检测器（40）移动到分析位置; 和用于控制驱动机构（42）的控制器（52）。 控制器（52）执行以下步骤：获得关于样本保持器（20）的类型的信息; 根据所获得的关于样品架（20）的类型的信息确定分析位置; 和控制驱动机构（42）以将检测器（40）移动到确定的分析位置。

    WORKPIECE TRANSPORT AND POSITIONING APPARATUS
    17.
    发明公开
    WORKPIECE TRANSPORT AND POSITIONING APPARATUS 审中-公开
    工件运输和定位设备

    公开(公告)号：EP3069367A1

    公开(公告)日：2016-09-21

    申请号：EP14859522.6

    申请日：2014-11-11

    申请人： Howard Hughes Medical Institute

    发明人： PRICE, John, H. ,  BOCK, Dravida

    IPC分类号： H01J37/20

    CPC分类号： H01J37/20 ,  G01N1/32 ,  G01N35/00732 ,  H01J37/023 ,  H01J37/185 ,  H01J37/261 ,  H01J2237/2007 ,  H01J2237/201 ,  H01J2237/20278 ,  H01J2237/20285 ,  H01J2237/20292 ,  H01J2237/204 ,  H01J2237/26 ,  H01J2237/2602

    摘要： An automated workpiece processing apparatus including a processing section including a processing module configured for processing a workpiece at a process location, a transport module including a first shuttle stage, a second shuttle stage independent of the first stage, and an end effector connected to at least one of the first and second stages, the end effector being configured to hold and transport the workpiece into and out of the processing module, and having a range of motion, defined by a combination of the first and second stage, extending from a workpiece holding station outside the processing module to the processing location inside the processing module so the end effector defines a processing stage of the processing module, and an automated loading and transport section including a load port module through which workpieces are loaded into the automated loading and transport section, and being communicably connected to the transport module.

    摘要翻译： 一种自动化工件处理设备，包括：处理部分，其包括处理模块，该处理模块被配置用于在处理位置处处理工件;运送模块，其包括第一梭步骤，独立于第一步骤的第二梭步骤，以及末端执行器， 第一和第二阶段中的一个，末端执行器构造成保持和运输工件进出处理模块，并且具有由第一和第二阶段的组合限定的运动范围，该运动范围从工件保持件 将处理模块外部的工作站移动到处理模块内部的处理位置，使得末端执行器限定处理模块的处理阶段，以及包括装载端口模块的自动装载和运输部分，工件通过所述装载端口模块被装载到自动装载和运输部分中 并且可通信地连接到运输模块。

    High-voltage insulation device for charged-particle optical apparatus
    19.
    发明公开
    High-voltage insulation device for charged-particle optical apparatus 有权
    Hochspannungsisolationsvorrichtungfüreine optische Vorrichtung mit geladenen Partikeln

    公开(公告)号：EP2757571A1

    公开(公告)日：2014-07-23

    申请号：EP14150119.7

    申请日：2014-01-03

    申请人： IMS Nanofabrication AG

    发明人： Platzgummer, Elmar ,  Chylik, Andreas ,  Kratzert, Gerald ,  Oberleitner, Roman

    IPC分类号： H01J37/02 ,  H01J37/04 ,  H01J37/15 ,  H01J37/317

    CPC分类号： H01B17/14 ,  B82Y10/00 ,  B82Y40/00 ,  H01J37/023 ,  H01J37/04 ,  H01J37/147 ,  H01J37/15 ,  H01J37/3177 ,  H01J2237/036 ,  H01J2237/038 ,  H01J2237/1502

    摘要： A high-voltage insulation device (300) for use in a charged-particle optical apparatus comprises a plurality of rigid pillars (320) made of electrically insulating material. These pillars (320) are arranged around a central passage (310) which traverses the insulating device along its longitudinal axis (L), and the two ends of each pillar are configured to be respectively fixed to two separate electrostatic housings (221, 231) of the charged-particle optical apparatus by means of two respective end plates (311, 312), with the pillars (320) being oriented at an angle so as to be inclined with regard to said longitudinal axis (L). Advantageously, the pillars are mechanically adjustable with regard to their effective length, and each pillar (320) is arranged outside the central passage with its two ends at either of the first and second end plates (311,312), preferably in a zig-zag arrangement.

    摘要翻译： 用于带电粒子光学装置的高压绝缘装置（300）包括由电绝缘材料制成的多个刚性支柱（320）。 这些支柱（320）围绕中心通道（310）布置，该中心通道沿其纵向轴线（L）穿过绝缘装置，并且每个支柱的两端被分别固定在两个独立的静电外壳（221,231）上， 通过两个相应的端板（311,312）连接带电粒子光学装置，其中支柱（320）以一定的角度定向成相对于所述纵向轴线（L）倾斜。 有利地，支柱可相对于其有效长度机械地调节，并且每个支柱（320）布置在中央通道的外侧，其两端位于第一和第二端板（311,312）中的任一个处，优选地以锯齿形布置 。