公开(公告)号：EP2477938A1

公开(公告)日：2012-07-25

申请号：EP10755157.4

申请日：2010-09-17

Applicant: Commissariat à l'Énergie Atomique et aux Énergies Alternatives ,  Centre National de la Recherche Scientifique (CNRS)

Inventor： DIENY, Bernard ,  JOISTEN, Hélène ,  SABON, Philippe

IPC: B81C1/00 ,  A61B5/05 ,  H02N11/00

CPC classification number: B81C1/0019 ,  A61B1/00156 ,  B81B2201/038 ,  B81B2201/06 ,  B81C2201/038

Abstract: The present invention relates to a microparticle (2) comprising: at least one oblong flexible tail (6), capable of propelling said microparticle (2) in a solution along a path by flapping movements transverse to the path, said tail being provided with at least one magnetic element for this purpose, such that said magnetic element causes the flapping movements of said tail (6) by means of an external alternating magnetic field that is non-collinear with the path; and a head (4) mechanically connected to the proximal end of the tail. The microparticle (2) comprises at least one layer of a material made of a single piece and including said tail (6) and said head (4), the size and/or shape of said head (4) being selected such that the flapping movements of the proximal end of said tail (6) are limited relative to the flapping movements of the distal end of the tail (6), and such that said head (4) does not perform a complete revolution about an axis parallel to the path when exposed to the external alternating magnetic field.

Abstract translation: 微粒包括长椭圆形柔性尾部，其能够使用横向于轨迹的搏动沿着轨迹将微粒推进到溶液中，尾部包括至少一个磁性元件，使得磁性元件在外部交替作用下引起尾巴跳动 与轨迹非共线的磁场和机械连接到尾端的近端的磁头。 该微粒包括至少一层材料，其由一个部件形成并且包括尾部和头部，头部的尺寸和/或形状被选择为使得尾部的近端的节拍相对于节拍被限制 并且使得头部在外部交变磁场的作用下不围绕平行于轨迹的轴线进行完整的旋转。

公开(公告)号：EP1350758B1

公开(公告)日：2007-12-12

申请号：EP03002122.4

申请日：2003-01-30

Applicant: MICROSOFT CORPORATION

Inventor： Sinclair, Michael J.

IPC: B81B3/00 ,  G02B26/08

CPC classification number: B81B3/0054 ,  B81B2201/032 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047

公开(公告)号：EP1234799B1

公开(公告)日：2006-06-07

申请号：EP02003900.4

申请日：2002-02-21

Applicant: CANON KABUSHIKI KAISHA

Inventor： Yasuda, Susumu ,  Mizutani, Hidemasa ,  Yagi, Takayuki ,  Shimada, Yasuhiro ,  Hirose, Futoshi ,  Kato, Takahisa

IPC: B81B3/00 ,  B81C1/00 ,  G02B26/10

CPC classification number: G02B26/105 ,  B81B3/0051 ,  B81B3/0067 ,  B81B2201/038 ,  B81B2201/042 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C2201/0133 ,  G02B26/0841 ,  Y10S359/90 ,  Y10S359/904

公开(公告)号：EP1330411A4

公开(公告)日：2006-02-01

申请号：EP01980048

申请日：2001-10-19

Applicant: SILVERBROOK RES PTY LTD

Inventor： MCAVOY G J ,  SILVERBROOK K

IPC: B81C1/00 ,  B32B9/00 ,  B41J2/045 ,  B81B3/00 ,  B81B7/02 ,  B81C20060101 ,  B81C99/00 ,  F03G7/06 ,  H01H1/00 ,  H02N10/00

CPC classification number: B81C99/006 ,  B41J2/14427 ,  B81B3/0024 ,  B81B3/0035 ,  B81B2201/038 ,  F03G7/06 ,  F05C2203/0813 ,  F05C2203/083 ,  F05C2251/04 ,  F05C2251/044 ,  F05C2251/046 ,  H01H1/0036 ,  H01H2061/006 ,  H01H2061/008

Abstract: The invention concerns design of thermoelastic actuators incorporating an expansive element formed from material selected in accordance with a procedure involving the derivation of an indicator of the material's potential effectiveness for each application. Indicator ε is derived from: εη=Eη2T/ςC where E is Young's modulus of the material, η is coefficient of thermal expansion, T is maximum operating temperature, ς is density and C is specific heat capacity. Elements may be selected from a group including: borides, carbides, nitrides or silicides of chromium, molybdenum, niobium, tantalum, titanium, tungsten, vanadium or zirconium.

公开(公告)号：EP1570991A2

公开(公告)日：2005-09-07

申请号：EP05004352.0

申请日：2005-02-28

Applicant: ENPLAS CORPORATION

Inventor： Yamada, Kyouhei ,  Watanabe, Yasuhiro

IPC: B41J2/14

CPC classification number: B01L3/0241 ,  B01L3/0268 ,  B01L2200/12 ,  B01L2300/0819 ,  B41J2/1433 ,  B41J2002/14475 ,  B81B2201/038 ,  G01N2035/1041

Abstract: There is provided a liquid droplet ejecting apparatus capable of being efficiently produced at low production costs. The liquid droplet ejecting apparatus 1 includes a substrate 2 which has a hole 4 extending in thickness directions to pass through the substrate 2, and a photoresist film 3 which is formed on one side 2a of the substrate 2 so as to close one end of the hole 4, the photoresist film 3 having a small hole 5 which faces the one end of the hole 4 to open the one end of the hole 4 to the atmosphere. Thus, the liquid droplet ejecting apparatus 1 is designed to eject a droplet of a liquid from the small hole 5 by applying a pressure of a pressure source 6 to the other end of the hole 4 after the liquid is injected into the hole 4.

Abstract translation: 提供了能够以低生产成本有效地生产的液滴喷射装置。 液滴喷射装置1包括：基板2，其具有在厚度方向上延伸通过基板2的孔4;以及光致抗蚀剂膜3，其形成在基板2的一侧2a上，以封闭基板2的一端 孔4，光致抗蚀剂膜3具有面向孔4的一端的小孔5，以将孔4的一端打开到大气。 因此，液滴喷射装置1被设计成在将液体注入到孔4中之后，通过将压力源6的压力施加到孔4的另一端，从小孔5喷射液滴。

公开(公告)号：EP1281665A3

公开(公告)日：2005-02-16

申请号：EP02255271.5

申请日：2002-07-29

Applicant: Hewlett-Packard Company

Inventor： Hartwell, Peter G. ,  Walmsley, Robert G.

IPC: B81B7/00

CPC classification number: B81B7/04 ,  B81B2201/038

Abstract: Micromachine systems (100) are provided. An embodiment of such a micromachine system includes a substrate (111, 504) that defines a trench (116, 512). A first microelectromechanical device (110, 502) and a second microelectromechanical device (110, 502) are arranged at least partially within the trench. Each of the microelectromechanical devices incorporates a first portion that is configured to move relative to the substrate. Methods also are provided.

公开(公告)号：EP1486682A2

公开(公告)日：2004-12-15

申请号：EP04013250.8

申请日：2004-06-04

Applicant: LG Electronics Inc.

Inventor： Yee, Young-Joo ,  Ji, Chang-Hyeon ,  Choi, Jung-Hoon Sangnok-maeul Woosung

IPC: F15C5/00

CPC classification number: F16K99/0001 ,  B81B7/04 ,  B81B2201/038 ,  F15C5/00 ,  F16K99/0009 ,  F16K99/0046 ,  F16K2099/0074 ,  F16K2099/008

Abstract: Disclosed are a micro-actuator (100), a fabrication method thereof, and a micro-actuating valve (1000). The micro-actuating valve comprises: a first valve housing (200) having a fluid entrance (201) at the middle portion thereof; a second valve housing (300) coupled to the first valve housing thus to form a space portion (302) therein and having a fluid exit (301) connected to the fluid entrance of the first valve housing; a plate (110) installed at the space portion and having a micro-channel (111) at one side thereof to be connected to the fluid exit; a plurality of micro-driving members (130) installed to be near the plate for discharging a fluid introduced from the fluid entrance of the first valve housing to the fluid exit of the second valve housing by selectively opening and closing the micro-channel (111) of the plate; a micro-mover suspension installed at the plate for supporting the micro-mover; a coil installed at the micro-mover; a magnet installed with a certain gap from the coil; and an electrode portion formed at the plate for supplying a power source to the coil.

Abstract translation: 公开了一种微致动器（100）及其制造方法以及微动阀（1000）。 微动阀包括：第一阀壳体（200），其中部处具有流体入口（201）; 第二阀壳体（300），其联接到第一阀壳体，从而在其中形成空间部分（302），并具有连接到第一阀壳体的流体入口的流体出口（301） 安装在所述空间部分处并且在其一侧具有与所述流体出口连接的微通道（111）的板（110）; 多个微型驱动构件（130），安装成靠近板，用于通过选择性地打开和关闭微通道（111）来将从第一阀壳体的流体入口引入的流体排放到第二阀壳体的流体出口 ）板; 安装在板上用于支撑微型移动器的微型悬架; 安装在微动机上的线圈; 安装有与线圈一定间隙的磁铁; 以及形成在所述板上用于向所述线圈供给电源的电极部。

公开(公告)号：EP3213358A1

公开(公告)日：2017-09-06

申请号：EP15854529.3

申请日：2015-08-11

Applicant: Intel Corporation

Inventor： FREEDMAN, Barak ,  BERKOVITCH, Nikolai ,  HIRSHBERG, Arnon

IPC: H01L43/02 ,  H01L43/10 ,  H01L43/12

CPC classification number: G02B26/085 ,  B81B7/02 ,  B81B2201/038 ,  B81B2201/042 ,  B81C1/00174 ,  B81C1/00523 ,  G02B26/105

Abstract: Embodiments of the present disclosure are directed toward techniques and configurations for a magnetic MEMS apparatus that in some instances may comprise a magnetic circuit and a MEMS device. The magnetic circuit may include two magnets that may be disposed on the substantially flat base and magnetized vertically to the base and in opposite directions to each other to produce a substantially horizontal magnetic field between the magnets. The MEMS device may comprise a mirror and a conductor to pass electric current to interact with the magnetic field created by the magnets. The MEMS device may be disposed substantially between the magnets of the magnetic circuit and above a plane formed by top surfaces of the magnets, to provide an unobstructed field of view for the mirror. The MEMS device may include a ferromagnetic layer to concentrate the magnetic field toward the conductor. Other embodiments may be described and/or claimed.

Abstract translation: 本公开的实施例针对用于在一些情况下可以包括磁电路和MEMS器件的磁性MEMS设备的技术和配置。 所述磁路可以包括两个磁体，所述两个磁体可以设置在所述基本上平坦的基座上并且垂直于所述基座磁化并且在彼此相反的方向上磁化以在所述磁体之间产生大致水平的磁场。 MEMS器件可以包括反射镜和导体以传递电流以与由磁体产生的磁场相互作用。 MEMS器件可以基本上设置在磁路的磁体之间并且位于由磁体的顶表面形成的平面之上，以为镜提供无障碍的视野。 MEMS器件可以包括铁磁层以将磁场集中到导体。 其他实施例可以被描述和/或要求保护。

公开(公告)号：EP2847789A4

公开(公告)日：2016-01-20

申请号：EP13788027

申请日：2013-05-01

Applicant: LUXVUE TECHNOLOGY CORP

Inventor： BIBL ANDREAS ,  HIGGINSON JOHN A ,  HU HSIN-HUA

IPC: H01L21/677 ,  B65G49/07 ,  H01L21/50 ,  H01L21/60 ,  H01L21/67 ,  H01L21/683 ,  H01L23/00 ,  H01L25/075

CPC classification number: B41J2/385 ,  B25J15/0052 ,  B25J15/0085 ,  B41J2/39 ,  B81B2201/038 ,  B81C99/002 ,  H01L21/67144 ,  H01L21/6835 ,  H01L24/75 ,  H01L24/83 ,  H01L24/97 ,  H01L25/0753 ,  H01L33/0079 ,  H01L2221/68322 ,  H01L2221/68354 ,  H01L2221/68363 ,  H01L2221/68381 ,  H01L2224/29036 ,  H01L2224/29101 ,  H01L2224/2919 ,  H01L2224/7565 ,  H01L2224/7598 ,  H01L2224/83815 ,  H01L2224/83855 ,  H01L2224/97 ,  H01L2924/12041 ,  H01L2924/00 ,  H01L2224/83 ,  H01L2924/00014

Abstract: A compliant micro device transfer head and head array are disclosed. In an embodiment a micro device transfer head includes a spring portion that is deflectable into a space between a base substrate and the spring portion.

Abstract translation: 公开了一种兼容的微器件传送头和头阵列。 在一个实施例中，微器件转移头包括可偏转到基底基板和弹簧部分之间的空间中的弹簧部分。

公开(公告)号：EP2926005A1

公开(公告)日：2015-10-07

申请号：EP12794303.3

申请日：2012-11-27

Applicant: CNR - Consiglio Nazionale Delle Ricerche ,  Istituto Italiano Di Tecnologia

Inventor： WIERSMA, Diederik Sybolt ,  PARMEGGIANI, Camilla ,  GOMEZ-LAVOCAT, Jean-Christophe ,  VYNCK, Kevin

IPC: F03G7/00 ,  B81B3/00

CPC classification number: B81B3/0029 ,  B81B2201/038 ,  F03G6/00 ,  F03G7/005 ,  G02B26/004 ,  G02F1/133362 ,  Y02E10/46 ,  Y10S901/01

Abstract: Liquid crystal elastomer actuator (1) apt to move in a fluid, wherein the actuator includes a body (10) having a dimension comprised between 100 nm and 800 μιη so as to be considered a body having a low Reynolds number. The body (10) comprises: at least a first (2;2a;2b; 20) and a second (3;2c;2d; 30) spatially separated volumes, the first and second volume of the body both comprising a liquid crystal elastomer. The first volume is doped with a first photoactive doping substance apt to absorb electromagnetic radiation at a first wavelength, and the second volume is doped with a second photoactive doping substance apt to absorb electromagnetic radiation at a second wavelength. The first and second volumes are apt to change shape as a consequence of the light absorption at first or second wavelength, so that in the body a first (2j;20j) and a second joint (3j;30j) are defined. Moreover, a first absorbance of the first volume at a given wavelength is different than a second absorbance of the second volume at said given wavelength, the first and second absorbance are measured in the same time interval.

Abstract translation: 液晶弹性体致动器（1）易于在流体中移动，其中所述致动器包括具有在100nm和800μm之间的尺寸的主体（10），从而被认为是具有低雷诺数的主体。 所述主体（10）包括：至少第一（2; 2a; 2b; 20）和第二（3; 2c; 2d; 30）空间分离体积，所述主体的所述第一和第二体积均包括液晶弹性体 。 第一体积掺杂有适于吸收第一波长的电磁辐射的第一光敏掺杂物质，第二体积掺杂适于吸收第二波长的电磁辐射的第二光敏掺杂物质。 由于第一或第二波长的光吸收，第一和第二体积易于改变形状，因此在体内限定第一（2j; 20j）和第二关节（3j; 30j）。 此外，第一体积在给定波长下的第一吸光度不同于第二体积在所述给定波长下的第二吸光度，第一和第二吸光度在相同时间间隔内测量。