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    IMPROVED SAMPLE INSPECTION SYSTEM
    21.
    发明公开
    IMPROVED SAMPLE INSPECTION SYSTEM 有权
    VERBESSERTESPRÜFSYSTEMFÜRPROBEN

    公开(公告)号：EP1023582A4

    公开(公告)日：2000-11-29

    申请号：EP98947155

    申请日：1998-09-18

    Applicant: KLA TENCOR CORP

    Inventor： VAEZ-IRAVANI MEHDI ,  STOKOWSKI STANLEY ,  ZHAO GUOHENG

    IPC: G01N21/956 ,  G01J3/44 ,  G01N21/00 ,  G01N21/21 ,  G01N21/47 ,  G01N21/88 ,  G01N21/94 ,  G01N21/95 ,  H01L21/66 ,  G01B7/34 ,  G01B11/24 ,  G01N21/86

    CPC classification number: G01J3/44 ,  G01J3/0216 ,  G01J3/0229 ,  G01N21/21 ,  G01N21/47 ,  G01N21/474 ,  G01N21/8806 ,  G01N21/94 ,  G01N21/9501 ,  G01N2021/8825 ,  G01N2021/8845 ,  G01N2021/8848 ,  G01N2201/065

    Abstract: A curved mirrored surface (78) is used to collect radiation scattered by a sample surface (76a) and originating from a normal illumination beam (70) and an oblique illumination beam (90). The collected radiation is focused to a detector (80). Scattered radiation originating from the normal and oblique illumination beams may be distinguished by employing radiation at two different wavelengths, by intentionally introducing an offset between the spots illuminated by the two beams or by switching the normal and oblique illumination beams (70, 90) on and off alternately. Beam position error caused by change in sample height may be corrected by detecting specular reflection of an oblique illumination beam and changing the direction of illumination in response thereto. Butterfly-shaped spatial filters may be used in conjunction with curved mirror radiation collectors (78) to restrict detection to certain azimuthal angles.

    Abstract translation: 使用弯曲镜像表面（78）来收集由样本表面（76a）散射并且源自正常照明光束（70）和斜向照明光束（90）的辐射。 所收集的辐射被聚焦到检测器（80）。 通过采用两个不同波长的辐射，通过有意地在由两个光束照射的光点之间引入偏移或者通过将正常照明光束和倾斜照明光束（70,90）切换到其上，并且通过使用两个不同波长的辐射来区分源自正常照明光束和倾斜照明光束的散射辐射 交替关闭。 可以通过检测倾斜照明光束的镜面反射并响应于此改变照明方向来校正由样本高度变化引起的光束位置误差。 蝴蝶形空间滤波器可以与曲面镜辐射收集器（78）结合使用，以将检测限制在某些方位角。

    SPECTROMETER
    24.
    发明公开
    SPECTROMETER 失效
    光谱仪

    公开(公告)号：EP1019685A1

    公开(公告)日：2000-07-19

    申请号：EP97930542.2

    申请日：1997-07-17

    Applicant: VALTION TEKNILLINEN TUTKIMUSKESKUS

    Inventor： MALINEN, Jouko

    IPC: G01J3/10

    CPC classification number: G01J3/10 ,  G01J3/0205 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0216 ,  G01J3/0218 ,  G01J3/024 ,  G01J3/0259 ,  G01J3/0286 ,  G01J3/18 ,  G01J3/32 ,  G01J2003/104

    Abstract: The present invention concerns an LED spectrometer operating without moving parts, according to the sweep principle, and appropriate to serve as a structural component in many kinds of spectroscopic concentration analysers. The design of the invention affords the advantage that, even at its minimum, the optical power of the LED spectrometer of the invention is about fivefold compared with designs of prior art. Furthermore, improvement of the efficiency of the LED radiation source and of that of the optics has brought a multiple augmentation in power to the wavelength spectrum sent out by the radiation source. In the design of the invention, concentrators (6) of non-imaging type are used to collimate the wavelength spectrum emitted by the LEDs (3).

    SPEKTROSKOPISCHE SYSTEME ZUR ANALYSE VON KLEINEN UND KLEINSTEN SUBSTANZMENGEN
    25.
    发明授权
    SPEKTROSKOPISCHE SYSTEME ZUR ANALYSE VON KLEINEN UND KLEINSTEN SUBSTANZMENGEN 失效
    和光谱处理少量的分析最小起订量物质

    公开(公告)号：EP0655128B1

    公开(公告)日：1998-03-18

    申请号：EP93917790.3

    申请日：1993-08-13

    Applicant: Hewlett-Packard Company

    Inventor： Mächler, Meinrad

    IPC: G01J3/02

    CPC classification number: G01N21/0303 ,  G01J3/02 ,  G01J3/0216 ,  G01N2201/0813 ,  G01N2201/084

    Abstract: A spectroscopic system for the analysis of small and very small quantities of substances makes use for the purposes of energy transfer of cone-shaped aperture changers (14, 15) which are arranged in the object zone (8) between the light source (L) and the sample (9) and, during absorption measurements, also between the sample (9) and the inlet slot (3) of a spectrometer (1). If the form used is a double cone, the aperture changers (14, 15) facilitate an oblique coupling in a capillary tube accepting the sample (9) which acts as a step-waveguide for the coupled radiation.

    TERAHERTZ-WAVE GENERATING ELEMENT, TERAHERTZ-WAVE DETECTING ELEMENT, AND TERAHERTZ TIME-DOMAIN SPECTROSCOPY DEVICE
    29.
    发明公开
    TERAHERTZ-WAVE GENERATING ELEMENT, TERAHERTZ-WAVE DETECTING ELEMENT, AND TERAHERTZ TIME-DOMAIN SPECTROSCOPY DEVICE 审中-公开
    元于产生太赫兹波元用于检测太赫兹波和太赫兹时场光谱装置

    公开(公告)号：EP2542938A2

    公开(公告)日：2013-01-09

    申请号：EP11710034.7

    申请日：2011-02-23

    Applicant: Canon Kabushiki Kaisha

    Inventor： OUCHI, Toshihiko

    IPC: G02F1/035 ,  G02F1/39 ,  G01J3/42 ,  G01N21/35

    CPC classification number: G02F1/3544 ,  G01J3/0216 ,  G01J3/42 ,  G01N21/3586 ,  G01N21/4795 ,  G01N2201/06113 ,  G02F1/0356 ,  G02F1/377 ,  G02F1/395 ,  G02F2001/3546 ,  G02F2001/374 ,  G02F2203/13

    Abstract: A terahertz-wave generating element includes a waveguide including an electro-optic crystal; an optical coupling member that extracts a terahertz wave, which is generated from the electro-optic crystal as a result of light propagating through the waveguide, to a space; and at least two electrodes that cause a first-order electro-optic effect in the electro-optic crystal by applying an electric field to the waveguide so as to change a propagation state of the light propagating through the waveguide. A crystal axis of the electro-optic crystal of the waveguide is set such that the terahertz wave generated by a second-order nonlinear optical process and the light propagating through the waveguide are phase-matched.

    Abstract translation: 阿太赫兹波产生元件包括一个波导电光晶于包括; 到光耦合构件确实提取物是从电光晶体作为通过波导的空间传播的光的结果而产生的太赫波，所有; 和至少两个电极那样通过施加电场到波导，以改变光通过波导传播的传播状态引起电光晶体的一阶电光效应。 设置检查波导的电光晶体的晶轴做由一个二阶非线性光学过程，并通过波导传播的光产生的太赫波是相匹配的。

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