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    OPTICAL FILTER ARRAY
    22.
    发明公开
    OPTICAL FILTER ARRAY 审中-公开
    光学滤波器阵列

    公开(公告)号：EP3206060A1

    公开(公告)日：2017-08-16

    申请号：EP17155696.2

    申请日：2017-02-10

    Applicant: Viavi Solutions Inc.

    Inventor： OCKENFUSS, Georg J

    IPC: G02B5/20 ,  G01J3/26 ,  G01J3/28 ,  G01J3/36 ,  G02B5/28 ,  H01L31/0216

    CPC classification number: H01L27/14621 ,  G01J3/26 ,  G01J3/2803 ,  G01J3/36 ,  G01J2003/2826 ,  G02B5/201 ,  G02B5/26 ,  G02B5/285 ,  H01L31/02165

    Abstract: A device may include a filter array disposed on a substrate. The filter array may include a first mirror disposed on the substrate. The filter array may include a plurality of spacers disposed on the first mirror. A first spacer, of the plurality of spacers, may be associated with a first thickness. A second spacer, of the plurality of spacers, may be associated with a second thickness that is different from the first thickness. A first channel corresponding to the first spacer and a second channel corresponding to the second spacer may be associated with a separation width of less than approximately 10 micrometers (µm). The filter array may include a second mirror disposed on the plurality of spacers.

    Abstract translation: 器件可以包括设置在衬底上的滤波器阵列。 滤光器阵列可以包括设置在基板上的第一反射镜。 滤光器阵列可以包括设置在第一反射镜上的多个间隔物。 多个间隔物中的第一间隔物可以与第一厚度相关联。 多个间隔物中的第二间隔物可以与不同于第一厚度的第二厚度相关联。 对应于第一间隔物的第一通道和对应于第二间隔物的第二通道可以与小于约10微米（μm）的间隔宽度相关联。 滤光器阵列可以包括设置在多个间隔物上的第二反射镜。

    COMPACT, POWER-EFFICIENT STACKED BROADBAND OPTICAL EMITTERS
    23.
    发明公开
    COMPACT, POWER-EFFICIENT STACKED BROADBAND OPTICAL EMITTERS 审中-公开
    紧凑，高效堆叠宽带光学发射器

    公开(公告)号：EP3198689A1

    公开(公告)日：2017-08-02

    申请号：EP15845489.2

    申请日：2015-09-23

    Applicant: Heptagon Micro Optics Pte. Ltd.

    Inventor： RIEL, Peter ,  ROENTGEN, Peter

    IPC: H01S3/091 ,  H01S3/16 ,  H01S5/10 ,  H01S5/30

    CPC classification number: G01J3/10 ,  G01J3/06 ,  G01J3/108 ,  G01J3/26 ,  H01S3/094096 ,  H01S5/0071 ,  H01S5/0287 ,  H01S5/041 ,  H01S5/1096 ,  H01S5/183 ,  H01S5/32375 ,  H01S5/34306 ,  H01S5/34313 ,  H01S5/34326 ,  H01S5/3438 ,  H01S5/4043 ,  H01S5/4087

    Abstract: The present disclosure describes broadband optical emission sources that include a stack of semiconductor layers, wherein each of the semiconductor layers is operable to emit light of a different respective wavelength; a light source operable to provide optical pumping for stimulated photon emission from the stack; wherein the semiconductor layers are disposed sequentially in the stack such that a first one of the semiconductor layers is closest to the light source and a last one of the semiconductor layers is furthest from the light source, and wherein each particular one of the semiconductor layers is at least partially transparent to the light generated by the other semiconductor layers that are closer to the light source than the particular semiconductor layer. The disclosure also describes various spectrometers that include a broadband optical emission device, and optionally include a tuneable wavelength filter operable to allow a selected wavelength or narrow range of wavelengths to pass through.

    Abstract translation: 本公开描述了包括半导体层堆叠的宽带光发射源，其中每个半导体层可操作以发射不同相应波长的光; 光源，其可操作以提供用于从所述堆叠体激发的光子发射的光学泵浦; 其中所述半导体层顺序地布置在所述堆叠中，使得所述半导体层中的第一半导体层最靠近所述光源，并且所述半导体层中的最后一个半导体层距离所述光源最远，并且其中所述半导体层中的每个特定半导体层是 对于由比特定半导体层更靠近光源的其他半导体层产生的光至少部分透明。 本公开还描述了包括宽带光发射装置的各种光谱仪，并且可选地包括可操作以允许所选波长或窄波长范围通过的可调波长滤波器。

    OPTICAL MULTI-CHANNEL MEASUREMENT UNIT, OPTICAL MULTI-CHANNEL DETECTOR UNIT AND A MEASUREMENT METHOD RELATED THERETO
    24.
    发明公开
    OPTICAL MULTI-CHANNEL MEASUREMENT UNIT, OPTICAL MULTI-CHANNEL DETECTOR UNIT AND A MEASUREMENT METHOD RELATED THERETO 审中-公开
    MEHRKANALIGE OPTISCHE MESSEINHEIT，MEHRKANALIGE OPTISCHE DETEKTOREINHEIT UND DAMIT ASSOZIIERTES MESSVERFAHREN

    公开(公告)号：EP3161207A4

    公开(公告)日：2017-07-12

    申请号：EP15811997

    申请日：2015-06-24

    Applicant: VALMET AUTOMATION OY

    Inventor： MÄNTYLÄ MARKKU ,  SUOPAJÄRVI PEKKA ,  TENHUNEN JUSSI ,  PAASO JANNE

    IPC: D21F7/00 ,  G01J3/02 ,  G01J3/12 ,  G01J3/26 ,  G01J3/28 ,  G01N21/31 ,  G01N21/3559 ,  G01N21/86 ,  G01N21/89 ,  G01N33/34

    CPC classification number: G01N21/3559 ,  D21F7/003 ,  G01J3/108 ,  G01J3/26 ,  G01J3/2803 ,  G01J2003/1213 ,  G01N21/8903 ,  G01N33/346 ,  G01N2021/8663

    Abstract: Optical multi-channel measurement unit for a process measurement includes first ends for receiving optical radiation from the optical radiation source, and second ends for outputting the optical radiation for illuminating the at least one object. Optical detectors receive optical radiation from at least one measurement channel via at least one optical filter and convert an intensity of the optical radiation to an electrical signal. A movement mechanism causes, for filtering the wavelengths of the optical radiation propagating between detectors and the optical measurement channels through the optical filters, at least one of the following: movement inside at least one optical filter and movement between the filters and the detectors.

    Abstract translation: 用于过程测量的光学多通道测量单元包括用于接收来自光辐射源的光辐射的第一端和用于输出用于照射至少一个物体的光辐射的第二端。 光学检测器经由至少一个光学滤波器从至少一个测量通道接收光辐射，并将光辐射的强度转换为电信号。 为了过滤在检测器和光学测量通道之间传播通过光学过滤器的光辐射的波长，移动机制导致以下至少一个：在至少一个光学滤波器内移动以及在滤波器和检测器之间移动。

    ESTIMATION OF SPECTRAL FEATURE OF PULSED LIGHT BEAM
    25.
    发明公开
    ESTIMATION OF SPECTRAL FEATURE OF PULSED LIGHT BEAM 审中-公开
    KALKULATION DER SPEKTRALEIGENSCHAFTEN EINES GEPULSTEN LICHTSTRAHLS

    公开(公告)号：EP3152624A1

    公开(公告)日：2017-04-12

    申请号：EP15802551.0

    申请日：2015-06-03

    Applicant: Cymer, LLC ,  ASML Netherlands BV

    Inventor： DUFFEY, Thomas Patrick ,  GODFRIED, Herman Philip

    IPC: G03F7/20

    CPC classification number: G01J3/28 ,  G01J3/027 ,  G01J3/14 ,  G01J3/26 ,  G01J9/00 ,  G01J11/00 ,  G01J2003/2853 ,  G03F7/70041 ,  G03F7/70058 ,  G03F7/70575

    Abstract: A method is described for estimating a spectral feature of a pulsed light beam produced by an optical source and directed toward a wafer of a lithography apparatus. The method includes receiving a set of N optical spectra of pulses of the light beam; saving the received N optical spectra to a saved set; transforming the optical spectra in the saved set to form a set of transformed optical spectra; averaging the transformed optical spectra to form an averaged spectrum; and estimating a spectral feature of the pulsed light beam based on the averaged spectrum.

    Abstract translation: 描述了一种用于估计由光源产生并指向光刻设备的晶片的脉冲光束的光谱特征的方法。 该方法包括接收光束的脉冲的一组N个光谱; 将接收到的N光谱保存到保存的集合; 转换保存集中的光谱，形成一组变换光谱; 对变换的光谱进行平均以形成平均光谱; 以及基于所述平均光谱估计所述脉冲光束的光谱特征。

    SPECTROMETRY DEVICE, IMAGE FORMING APPARATUS, AND SPECTROMETRY METHOD
    28.
    发明公开
    SPECTROMETRY DEVICE, IMAGE FORMING APPARATUS, AND SPECTROMETRY METHOD 审中-公开
    光谱装置，图像形成装置和光谱测定法

    公开(公告)号：EP3064915A1

    公开(公告)日：2016-09-07

    申请号：EP16158009.7

    申请日：2016-03-01

    Applicant: Seiko Epson Corporation

    Inventor： Kuri, Ryohei

    IPC: G01J3/26 ,  G01J3/50 ,  H04N1/60

    CPC classification number: G01J3/2823 ,  G01J3/0229 ,  G01J3/06 ,  G01J3/26 ,  G01J3/50 ,  G01J2003/061 ,  H04N1/6033 ,  H04N1/6044

    Abstract: A printer includes a spectroscope and a carriage moving unit. The spectroscope includes a wavelength-selective interference filter on which light from a measurement target is incident, and the carriage moving unit moves the spectroscope in an X direction with respect to the measurement target. If the measurement target is a color patch, the spectroscope performs spectrometry by changing a wavelength of light passing through the wavelength-selective interference filter in a first period during which the spectroscope is moved in the X direction, and passes light of an initial wavelength through the wavelength-selective interference filter at a start of measurement and at an end of measurement in the first period. A first output value that is a measured value from the spectrometry at the start of measurement is compared with a second output value that is a measured value from the spectrometry at the end of measurement.

    Abstract translation: 打印机包括分光镜和滑架移动单元。 分光器包括波长选择干涉滤波器，来自测量目标的光入射到所述波长选择干涉滤波器上，并且托架移动单元相对于测量目标在X方向上移动分光器。 如果测量对象是色标，则分光器通过在分光器在X方向上移动的第一时段中改变通过波长选择干涉滤光器的光的波长来执行分光测定，并且使初始波长的光通过 在测量开始时和在第一周期中测量结束时的波长选择干涉滤光器。 将作为测量开始时的光谱测量的测量值的第一输出值与测量结束时的光谱测量的测量值的第二输出值进行比较。

    LIGHT-DETECTING DEVICE
    29.
    发明公开
    LIGHT-DETECTING DEVICE 审中-公开
    光检测装置

    公开(公告)号：EP3064914A1

    公开(公告)日：2016-09-07

    申请号：EP14859201.7

    申请日：2014-10-31

    Applicant: Hamamatsu Photonics K.K.

    Inventor： SHIBAYAMA Katsumi ,  KASAHARA Takashi ,  HIROSE Masaki ,  KAWAI Toshimitsu

    IPC: G01J3/26

    CPC classification number: G01J3/26 ,  G01J3/0286 ,  G01J3/45 ,  G01J5/04 ,  G01J5/20 ,  G02B26/001

    Abstract: A spectral sensor 1A includes a Fabry-Perot interference filter 10 which is provided with an opening 50a to pass light transmitted according to a distance between a first mirror 31 and a second mirror 41 along a facing direction D; a light detector 3 which has a light reception unit 3 a to receive the light having passed through the opening 50a; a wiring substrate 2 on which the light detector 3 is mounted; and a plurality of spacers 4 which support the filter 10 on the wiring substrate 2, such that a second space S2 continuous with a first space S1 in the opening 50a and including the first space S1 when viewed from the facing direction D is formed between the filter 10 and the wiring substrate 2. The light detector 3 is disposed in the second space S2. The light reception unit 3a is disposed in a region corresponding to the first space S1 in the second space S2, when viewed from the facing direction D.

    Abstract translation: 光谱传感器1A包括法布里 - 珀罗干涉滤光片10，该法布里珀罗干涉滤光片10设置有开口50a，以沿着面对方向D传递根据第一反射镜31和第二反射镜41之间的距离透射的光; 光检测器3，其具有用于接收穿过开口50a的光的光接收单元3a; 配置光检测器3的配线基板2; 以及在配线基板2上支撑过滤器10的多个间隔件4，从而在开口50a中与第一空间S1连续并且当从对向方向D观察时包括第一空间S1的第二空间S2形成在 滤波器10和布线基板2.光检测器3设置在第二空间S2中。 当从对向方向D观看时，光接收单元3a设置在第二空间S2中与第一空间S1对应的区域中。

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