公开(公告)号：EP3234694A1

公开(公告)日：2017-10-25

申请号：EP15797657.2

申请日：2015-11-19

Applicant: ASML Holding N.V.

Inventor： SHMAREV, Yevgeniy, Konstantinovich ,  SMIRNOV, Stanislav

IPC: G03F7/20

CPC classification number: G03F7/70133 ,  G01N21/4738 ,  G01N2201/061 ,  G01N2201/06113 ,  G01N2201/068 ,  G02B5/04 ,  G02B27/106 ,  G03F7/70091 ,  G03F7/70191 ,  G03F7/70208

Abstract: An inspection apparatus may determine precise OV measurements of a target on a substrate using an optical pupil symmetrizer to reduce the inspection apparatus's sensitivity to asymmetry and non-uniformity of the illumination beam in the pupil plane. The inspection apparatus includes an illumination system that forms a symmetrical illumination pupil by (1) splitting an illumination beam into sub-beams, (2) directing the sub-beams along different optical branches, (3) inverting or rotating at least one of the sub-beams in two dimensions, and recombining the sub-beams along the illumination path to symmetrize the intensity distribution. The illumination system is further configured such that the first and second sub-beams have an optical path difference that is greater than a temporal coherence length of the at least one beam and less than a depth of focus in the pupil plane of the objective optical system.

Abstract translation: 检查设备可以使用光学瞳孔对称器来确定衬底上的目标的精确OV测量结果，以减小检查设备对光瞳平面中的照明光束的不对称性和不均匀性的敏感度。 检查设备包括照明系统，该照明系统通过（1）将照明光束分成子光束，（2）将子光束引导到不同的光学分支，（3）将光束中的至少一个 二维子光束，并沿照明路径重新组合子光束以对称强度分布。 照明系统进一步被配置成使得第一和第二子光束具有大于至少一个光源的时间相干长度并且小于物镜光学的光瞳平面中的焦深的光程差 系统。

公开(公告)号：EP3224601A1

公开(公告)日：2017-10-04

申请号：EP15808048.1

申请日：2015-11-20

Applicant: Corning Incorporated

Inventor： CITRINITI, Joseph, Henry ,  WALSH, Conor, James

IPC: G01N21/952 ,  B28B3/26 ,  B29C47/00 ,  B29C47/92 ,  G01N21/956

CPC classification number: B28B17/0072 ,  B28B3/269 ,  B28B11/14 ,  B28B11/243 ,  B28B2003/203 ,  B29C47/0028 ,  B29C47/124 ,  B29C47/92 ,  B29C2947/92114 ,  B29C2947/92295 ,  B29C2947/92428 ,  B29C2947/92514 ,  B29C2947/92609 ,  B29C2947/92704 ,  B29C2947/92904 ,  B29L2031/608 ,  G01N21/952 ,  G01N21/95692 ,  G01N2201/06113

Abstract: In-line inspection and control system to in-situ monitor an extrudate during extrusion. A light beam illuminates a line on the outside circumference of the extrudate skin recording the curvature. A master profile of the illuminated defect-free skin is recorded and compared to successive monitoring of the illuminated skin. Differences from the comparison indicate skin and/or shape defects. A real-time feedback to automatically adjust process control hardware reduces or eliminates the skin and shape defects based on the monitoring and comparison.

Abstract translation: 在线检测和控制系统可在挤出过程中原位监测挤出物。 光束照射挤出物表层外表面上记录曲率的线。 记录被照亮的无缺陷皮肤的主轮廓，并将其与连续监测被照亮的皮肤进行比较。 与比较的差异表明皮肤和/或形状缺陷。 实时反馈自动调整过程控制硬件可以减少或消除基于监视和比较的皮肤和形状缺陷。

公开(公告)号：EP3217886A1

公开(公告)日：2017-09-20

申请号：EP15858589.3

申请日：2015-10-29

Applicant: Ricoh Company, Ltd.

Inventor： ISHII, Toshihiro ,  TAKAHASHI, Yoichiro

IPC: A61B10/00 ,  G01N21/17

CPC classification number: G01N21/4795 ,  A61B5/0075 ,  A61B5/0261 ,  A61B5/14553 ,  G01N2201/06113

Abstract: An optical sensor is provided. The optical sensor has an emitting system including at least one light emitting device which emits light onto an object; and a detecting system detecting the light which has been emitted by the emitting system and which has propagated through the object. The light emitting device is capable of emitting a plurality of light beams with different wavelengths onto substantially the same position of the object.

Abstract translation: 提供光学传感器。 该光学传感器具有发射系统，该发射系统包括至少一个将光发射到物体上的发光装置; 以及检测系统，用于检测由发射系统发射并且已经传播通过物体的光。 发光装置能够将具有不同波长的多个光束发射到物体的基本上相同的位置。

公开(公告)号：EP3077789B1

公开(公告)日：2017-09-20

申请号：EP13811583.7

申请日：2013-12-02

Applicant: Outotec (Finland) Oy

Inventor： OLLIKAINEN, Arto ,  SALOHEIMO, Kari ,  VON ALFTHAN, Christian

IPC: G01N1/20 ,  G01N1/28 ,  G01N1/40 ,  G01N21/71 ,  G01N1/10 ,  G01N21/85

CPC classification number: G01N21/718 ,  G01N1/20 ,  G01N1/2035 ,  G01N21/85 ,  G01N2021/8557 ,  G01N2201/06113

公开(公告)号：EP3017298B1

公开(公告)日：2017-09-20

申请号：EP14731245.8

申请日：2014-06-17

Applicant: Wacker Chemie AG

Inventor： GOEBEL, Thorsten ,  HAECKL, Walter ,  MUENZER, Wolfgang ,  PAETZOLD, Uwe ,  SOFINA, Natalia

IPC: G01N30/86 ,  B01J8/24 ,  B01D53/12 ,  C01B33/107 ,  F23C10/00

CPC classification number: G01N21/65 ,  B01D53/685 ,  B01D2251/304 ,  B01D2251/60 ,  B01D2253/112 ,  B01D2257/204 ,  B01D2257/2045 ,  B01D2258/02 ,  C01B33/10742 ,  C01B33/10763 ,  G01N21/3504 ,  G01N30/14 ,  G01N30/86 ,  G01N2201/06113 ,  G01N2201/08

公开(公告)号：EP3213050A1

公开(公告)日：2017-09-06

申请号：EP15854731.5

申请日：2015-10-30

Applicant: Muldoon, Cecilia

Inventor： Muldoon, Cecilia

IPC: G01N21/31 ,  G01N21/51 ,  G01N33/14

CPC classification number: G01N21/90 ,  G01N15/1429 ,  G01N21/3577 ,  G01N21/51 ,  G01N21/65 ,  G01N21/8851 ,  G01N33/146 ,  G01N2015/1488 ,  G01N2201/06113

Abstract: A system includes a computing device including a memory configured to store instructions. The computing device also includes a processor to execute the instructions to perform operations including initiating transmission of incident light from one or more light sources to a sealed bottle containing liquid. The operations also include receiving scattered light from the liquid contained in the sealed bottle. The operations also include processing one or more signals representative of the scattered light to detect interactions of the incident light with a particular molecule.

Abstract translation: 一种系统包括计算设备，该计算设备包括被配置为存储指令的存储器 计算设备还包括执行指令以执行操作的处理器，所述操作包括开始将来自一个或多个光源的入射光传输到容纳液体的密封瓶。 操作还包括接收来自容纳在密封瓶中的液体的散射光。 操作还包括处理代表散射光的一个或多个信号以检测入射光与特定分子的相互作用。

公开(公告)号：EP3207417A1

公开(公告)日：2017-08-23

申请号：EP15781105.0

申请日：2015-10-15

Applicant: Institut National de la Santé et de la Recherche Médicale ,  Centre National de la Recherche Scientifique ,  Ecole Normale Supérieure

Inventor： LEGER, Jean-François ,  BOURDIEU, Laurent ,  DIEUDONNE, Stéphane

IPC: G02B21/00 ,  G02F1/11 ,  G02F1/33

CPC classification number: G02F1/113 ,  G01N21/6458 ,  G01N21/6486 ,  G01N2201/06113 ,  G01N2201/0675 ,  G02B21/0036 ,  G02B21/0076 ,  G02B21/06 ,  G02B2207/114 ,  G02F1/33 ,  G02F2201/16 ,  G02F2203/12

Abstract: Method for determining the characteristics of a system for generating at least one pattern of light, the method comprising: a) providing a desired pattern of light, b) expressing the amplitude and the phase of the output pulse of the system as a function of the input laser pulse and in function of the characteristics of the system to obtain a calculated output pulse, the input laser pulse having a duration below or equal to 1 nanosecond, c) determining at least one characteristic of the system by minimizing a distance between the calculated output pulse and the desired output laser pulse.

Abstract translation: 用于确定用于产生至少一种光图案的系统的特性的方法，所述方法包括：a）提供期望的光图案，b）将所述系统的输出脉冲的振幅和相位表示为 输入激光脉冲并根据所述系统的特性来获得计算的输出脉冲，所述输入激光脉冲具有低于或等于1纳秒的持续时间，c）通过最小化所计算的输出脉冲与所述输入脉冲之间的距离来确定所述系统的至少一个特性 输出脉冲和所需的输出激光脉冲。

公开(公告)号：EP3191816A1

公开(公告)日：2017-07-19

申请号：EP15777613.9

申请日：2015-09-10

Applicant: PROASSORT GmbH

Inventor： BÜCHTER, Edwin ,  BARKHAUSEN, Winfried ,  PILLKAHN, Hans-Bernd

IPC: G01N21/71 ,  B07C5/342

CPC classification number: G01N21/718 ,  B07C5/342 ,  B07C5/3427 ,  B07C2501/0054 ,  G01J3/443 ,  G01N21/84 ,  G01N2021/845 ,  G01N2201/06113

Abstract: The invention relates to a process and an apparatus for sorting reusable pieces of raw material (5), which are continuously moved in a conveying direction (2) by a transporting device (1), wherein an analysis of the chemical composition of the pieces of raw material (5) is performed with the aid of laser-induced plasma spectroscopy (LIBS) and, dependent on the composition determined, an automated sorting of the pieces of raw material (5) is carried out, wherein in a first step the pieces of raw material (5) are subjected to multiple first laser pulses (6), in order to remove surface coatings and/or contaminants from the pieces of raw material (5), and in a second step one or more second laser pulses (7) are directed onto the locations of the pieces of raw material (5) from which the surface coatings and/or contaminants have been removed, wherein exposed material of the pieces of raw material (5) is transformed into a plasma by the second laser pulses (7), wherein the same laser (3) is used for the first and second laser pulses (6, 7) and the area of the pieces of raw material (5) over which the first laser pulses (6) are moved and which are freed of surface coatings and/or contaminants is greater than the area of the pieces of raw material (5) that is exposed to the second laser pulses (7), wherein the focal diameter and the focal point of the laser beam are kept constant between the first and second laser pulses (6, 7). In this way, an unfalsified analysis of the composition of the pieces of raw material (5) can be achieved by using only one laser and, dependent on the analysis, a sorting can be performed.

Abstract translation: 本发明涉及一种用于对可重复使用的原材料片（5）进行分类的方法和装置，所述原材料片（5）通过输送装置（1）在输送方向（2）上连续地移动，其中分析 借助于激光诱导等离子体光谱学（LIBS）进行原料（5），并且根据确定的组成进行原料（5）的自动分选，其中在第一步中，将碎片 （5）的原料（5）经受多次第一激光脉冲（6），以便从原材料片（5）中去除表面涂层和/或污染物，并且在第二步中，将一个或多个第二激光脉冲 ）被引导到已经去除了表面涂层和/或污染物的原材料片（5）的位置，其中通过第二激光脉冲将原材料片（5）的暴露材料转变为等离子体 （7），其中相同的激光器（3）是 用于第一和第二激光脉冲（6,7），并且第一激光脉冲（6）在其上移动并且没有表面涂层和/或污染物的部分的原料（5）的面积大于 暴露于第二激光脉冲（7）的原材料片（5）的面积，其中激光束的焦径和焦点在第一和第二激光脉冲（6,7）之间保持恒定， 。 以这种方式，可以通过仅使用一个激光器来实现对原材料块（5）的组成的不确定分析，并且根据分析可以执行分选。

公开(公告)号：EP3063523A4

公开(公告)日：2017-06-28

申请号：EP14857971

申请日：2014-10-31

Applicant: 3SCAN INC

Inventor： GOODMAN MATTHEW ,  DANIEL CODY

IPC: G01N1/06

CPC classification number: G02B21/362 ,  B26D5/007 ,  G01N1/06 ,  G01N1/286 ,  G01N21/55 ,  G01N2001/2873 ,  G01N2201/02 ,  G01N2201/06113 ,  G02B21/002 ,  G02B21/32

公开(公告)号：EP3064928A4

公开(公告)日：2017-06-14

申请号：EP14856943

申请日：2014-10-31

Applicant: KONICA MINOLTA INC

Inventor： NAGAE KOSUKE ,  HIRAYAMA HIROSHI

IPC: G01N21/03 ,  B01L3/00 ,  G01N21/13 ,  G01N21/552 ,  G01N21/64 ,  G01N33/553

CPC classification number: G01N33/54373 ,  B01L3/5027 ,  B01L2200/16 ,  B01L2300/0636 ,  B01L2300/0654 ,  B01L2300/1816 ,  G01N1/14 ,  G01N21/0332 ,  G01N21/13 ,  G01N21/553 ,  G01N21/6428 ,  G01N21/648 ,  G01N33/553 ,  G01N2021/6439 ,  G01N2201/0231 ,  G01N2201/06113 ,  G01N2201/064

Abstract: This detection device has a holder and a heating unit. The holder holds a detection chip that has the following: a prism that has an incidence surface and a film-formation surface; a metal film formed on said film-formation surface; trapping bodies laid out on the surface of said metal film; and a substrate that is laid out on the surface of the metal film, and together with the metal film, forms a liquid collection section in which a liquid is collected. The heating unit heats at least one of the substrate, the prism, and the metal film either while in contact therewith or without contacting same. Also, the heating unit is positioned so as to avoid the path that excitation light takes from an excitation-light emission unit to the abovementioned incidence surface.

Abstract translation: 该检测装置具有支架和加热单元。 保持器保持检测芯片，该检测芯片具有：具有入射面和成膜面的棱镜; 在所述膜形成表面上形成的金属膜; 在所述金属膜的表面上布置的捕获体; 以及布置在金属膜表面上的基板，并且与金属膜一起形成收集液体的液体收集部分。 加热单元在与基板，棱镜和金属膜接触的同时加热基板，棱镜和金属膜中的至少一个，或者不接触基板，棱镜和金属膜。 而且，加热单元被定位成避开激发光从激发光发射单元到达上述入射表面的路径。