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    CONVEYANCE DEVICE
    31.
    发明公开
    CONVEYANCE DEVICE 审中-公开
    输送装置

    公开(公告)号：EP3078461A1

    公开(公告)日：2016-10-12

    申请号：EP14868275.0

    申请日：2014-11-27

    申请人： Harmotec Co., Ltd.

    发明人： IWASAKA, Hitoshi ,  TOKUNAGA, Hideyuki ,  KASAI, Yuji ,  KOSHIISHI, Katsuhiro

    IPC分类号： B25J15/06 ,  B65G49/07 ,  H01L21/677

    CPC分类号： H01L21/6838 ,  B65G47/911 ,  B65G2249/04 ,  H01L21/677

    摘要： Conveyance equipment 10 for conveying a plate-like member includes plural items of liquid discharging equipment that hold the member by discharging liquid to generate a negative pressure between the liquid discharging equipment and the member. Each of the plural items of liquid discharging equipment includes a columnar main body, a flat end face formed at the main body, which faces the member, a concave part formed at the end face, and one or more liquid passages that discharge liquid into the concave part at a peripheral edge of the concave part. The one or more liquid passages are arranged so that a direction in which a liquid flows out of the concave part along the end face and a direction from a center of gravity of the member toward a position of the member, opposite the liquid discharging equipment, form an angle smaller than or equal to 90 degrees.

    摘要翻译： 用于输送板状部件的输送设备10包括多个液体排出设备，其通过排出液体来保持该部件以在液体排出设备和该部件之间产生负压。 多个液体排出设备中的每一个包括柱状主体，形成在主体处的平坦端面，该平坦端面面向该构件，形成在该端面处的凹入部分以及将液体排出到该入口中的一个或多个液体通道 凹部的周缘具有凹部。 所述一个或多个液体通道布置成使得液体从所述凹部沿所述端面流出的方向和从所述构件的重心到所述构件的与所述液体排放设备相对的位置的方向， 形成小于或等于90度的角度。

    SUBSTRATE TRANSFER DEVICE AND METHOD OF MOVING SUBSTRATES
    32.
    发明公开
    SUBSTRATE TRANSFER DEVICE AND METHOD OF MOVING SUBSTRATES 有权
    VERFAHREN ZUM BEWEGEN VON底座SUBSTRATÜBERTRAGUNGSVORRICHTUNG

    公开(公告)号：EP2892834A1

    公开(公告)日：2015-07-15

    申请号：EP12766015.7

    申请日：2012-09-10

    申请人： Applied Materials, Inc.

    发明人： LINDENBERG, Ralph

    IPC分类号： B65G49/06 ,  C23C14/50 ,  C23C14/56 ,  H01L21/67 ,  H01L21/677

    CPC分类号： H01L21/67748 ,  B65G13/00 ,  B65G47/52 ,  B65G49/063 ,  B65G49/067 ,  B65G2201/02 ,  C23C14/50 ,  C23C14/568 ,  H01L21/67173 ,  H01L21/677 ,  H01L21/67751 ,  H01L21/6776

    摘要： A transfer device is provided for substrate transfer along a transport direction and for change between a first transport path and a second transport path extending along the transport direction. The first transport path is displaced with respect to the second transport path in a switch direction perpendicular to the transport direction. The transfer device includes a first substrate support assembly defining a first track to support a substrate or substrate carrier in a chamber. The transfer device further includes a second substrate support assembly defining a second track to support a substrate or substrate carrier in the chamber. The first substrate support assembly and the second substrate support assembly are moveable relative to each other at least in the switch direction.

    摘要翻译： 提供了一种传送装置，用于沿输送方向的基板传送，并且用于在沿输送方向延伸的第一输送路径和第二输送路径之间的变化。 第一输送路径在垂直于输送方向的开关方向上相对于第二输送路径移位。 转移装置包括限定用于支撑腔室中的基底或基底载体的第一轨道的第一基底支撑组件。 转移装置还包括限定第二轨道以支撑腔室中的衬底或衬底载体的第二衬底支撑组件。 第一基板支撑组件和第二基板支撑组件至少在开关方向上可相对于彼此移动。

    END-EFFECTOR DEVICE AND SUBSTRATE TRANSPORT ROBOT PROVIDED WITH SAID END-EFFECTOR DEVICE
    33.
    发明公开
    END-EFFECTOR DEVICE AND SUBSTRATE TRANSPORT ROBOT PROVIDED WITH SAID END-EFFECTOR DEVICE 审中-公开
    食品添加剂食品添加剂

    公开(公告)号：EP2743975A4

    公开(公告)日：2015-06-03

    申请号：EP12822878

    申请日：2012-08-09

    申请人： KAWASAKI HEAVY IND LTD

    发明人： HASHIMOTO YASUHIKO ,  ONO SHIGEKI ,  FUKUSHIMA TAKAYUKI

    IPC分类号： H01L21/677

    CPC分类号： H01L21/677 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/67781 ,  H01L21/68707

    摘要： The present invention relates to an end effector device 1 attached to a tip end portion of a robot arm, and the end effector device 1 includes a plurality of support units 3 provided on a blade 10. Each of the support units 3 includes: a plurality of nail pieces 30 configured to support peripheral portions of a plurality of semiconductor wafers 9 such that the semiconductor wafers 9 are parallel to one another and spaced apart from one another; and a pitch changing mechanism 4 configured to change upper-lower intervals of the nail pieces 30. The pitch changing mechanism 4 includes: a coil spring 40 configured to support the plurality of nail pieces 30 such that the plurality of nail pieces 30 are spaced apart from one another in an upper-lower direction and elastically deform in the upper-lower direction; and an operating mechanism 5 configured to cause the coil spring 40 to elastically deform in the upper-lower direction. The operating mechanism 5 includes a piston pin 50 fitted in the coil spring 40 to move up and down.

    摘要翻译： 本发明涉及一种安装在机器人手臂的末端部分的端部执行器装置1，并且端部执行器装置1包括设置在叶片10上的多个支撑单元3.每个支撑单元3包括：多个 被配置为支撑多个半导体晶片9的周边部分的指甲片30，使得半导体晶片9彼此平行并且彼此间隔开; 以及变更机构4，其构造为改变钉片30的上下间隔。间距改变机构4包括：螺旋弹簧40，被配置为支撑多个钉片30，使得多个钉片30间隔开 在上下方向上彼此弹性变形， 以及构造成使螺旋弹簧40在上下方向弹性变形的操作机构5。 操作机构5包括安装在螺旋弹簧40中以上下移动的活塞销50。

    Substrate transfer apparatus, substrate transfer method, and surface mounter
    34.
    发明公开
    Substrate transfer apparatus, substrate transfer method, and surface mounter 有权
    基板输送装置，衬底转移工艺和生产线

    公开(公告)号：EP2575419A3

    公开(公告)日：2014-12-03

    申请号：EP12006130.4

    申请日：2012-08-29

    申请人： Yamaha Hatsudoki Kabushiki Kaisha

    发明人： Uekawa, Daisuke ,  Yamada, Kazuaki

    IPC分类号： H05K13/00 ,  H05K13/08 ,  B65G43/08

    CPC分类号： H01L21/677 ,  H05K13/0061 ,  H05K13/02 ,  H05K13/08 ,  Y10T29/53174

    摘要： A substrate stopped at a first position is transferred toward a second position and is stopped at the second position in an accurate and stable manner. An intermediate position arrival time AT is measured while the substrate is being transferred from a substrate stop position toward a mounting work position, and a transfer status of the substrate (whether or not an unexpected factor has occurred) is assessed based on the intermediate position arrival time AT. Before the substrate reaches the second position, a deceleration pattern is controlled by altering a deceleration start timing T14 and the deceleration b in accordance with the intermediate position arrival time AT, thereby accurately stopping and positioning the substrate at the mounting work position. In this manner, under feed-forward control, the substrate can be stably transferred to the mounting work position.

    AUTOMATED MATERIAL HANDLING SYSTEM FOR SEMICONDUCTOR MANUFACTURING BASED ON A COMBINATION OF VERTICAL CAROUSELS AND OVERHEAD HOISTS
    38.
    发明公开
    AUTOMATED MATERIAL HANDLING SYSTEM FOR SEMICONDUCTOR MANUFACTURING BASED ON A COMBINATION OF VERTICAL CAROUSELS AND OVERHEAD HOISTS 审中-公开
    基于组合垂直KAROUSSELLS及架空提升机自动化材料处理系统的半导体制造

    公开(公告)号：EP1535143A1

    公开(公告)日：2005-06-01

    申请号：EP03761012.8

    申请日：2003-03-20

    申请人： BROOKS AUTOMATION, INC.

    发明人： DOHERTY, Brian, J. ,  MARIANO, Thomas, R. ,  SULLIVAN, Robert, P.

    IPC分类号： G06F7/00

    CPC分类号： H01L21/67733 ,  B65G1/0457 ,  H01L21/677 ,  H01L21/67706 ,  H01L21/67736 ,  H01L21/67769

    摘要： An automated material handling system comprising: a fixed shelf (732) configured to hold a cassette pod (710,810); and an overhead hoist transport subsystem (704,804) including an overhead transport vehicle (705,805) mounted with an overhead hoist (831), the overhead hoist (831) including a translating stage (833) capable of laterally moving and a hoist gripper (731,835) coupled to the translating stage (833) and capable of moving laterally with a lateral movement of the translating stage (833) and moving vertically by the hoist gripper (731,835) itself, the hoist gripper (731,835) being configured to grip the cassette pod(710,810), the overhead transport vehicle(705,805) being configured to move in a suspended manner along a suspended track(708,808) defining a predetermined route running adjacent to the fixed shelf(732) under a state in which the cassette pod(710,810) is being gripped by the hoist gripper (731,835), and being mounted with the overhead hoist (831) at a lower position than the suspended track(708,808).

    System and method to reduce the effect of reactive forces on a stage using a balance mass
    40.
    发明公开
    System and method to reduce the effect of reactive forces on a stage using a balance mass 审中-公开
    装置和方法，以减少在载体平台上的反作用力，使用平衡质量

    公开(公告)号：EP1447838A2

    公开(公告)日：2004-08-18

    申请号：EP04002962.1

    申请日：2004-02-10

    申请人： ASML Holding N.V.

    发明人： Carter, Frederick Michael ,  Stenabaugh, Donald

    IPC分类号： H01L21/00 ,  H02N15/00 ,  G03F9/00

    CPC分类号： G03F7/70766 ,  G03F7/70758 ,  H01L21/677 ,  H02K41/03 ,  H02N15/00

    摘要： A system and method are used to levitate and translate a stage within a chamber using a motor assembly coupled to a balance mass assembly. The balance mass assembly is positioned adjacent the chamber. The motor assembly includes a stator and a coil. One of the stator and the coil are coupled to the stage on a first side of a wall of the chamber. The other of the stator and the coil are coupled to the balance mass assembly on a second side of the wall of the chamber. A magnetic assembly coupled to the stage allows the stage to levitate within the chamber. Once levitated, the stage is translated based on the interaction of the magnets and an energized coil.

    摘要翻译： 一种系统和方法被用于悬浮并使用耦合到平衡质量组件的电机组件的腔室内平移的阶段。 平衡块组件靠近室。 马达组件包括定子和线圈。 一个定子和线圈的耦合到舞台上的腔室的壁的第一侧。 其他定子和线圈都耦合到所述平衡物组件上腔室的所述壁的第二侧。 耦合到台的磁性组件允许该阶段在腔室内悬浮。 一旦悬浮，舞台是基于通电线圈的磁体的相互作用和翻译。