公开(公告)号：EP2939353A1

公开(公告)日：2015-11-04

申请号：EP13821751.8

申请日：2013-12-20

Applicant: Synergy Microwave Corporation

Inventor： PODDAR, Ajay Kumar ,  ROHDE, Ulrich L. ,  DARYOUSH, Afshin S.

IPC: H04B10/00 ,  H01S3/10 ,  H03L7/00 ,  H04L7/00

CPC classification number: H04B10/508 ,  H01S3/10 ,  H01S3/11 ,  H01S3/1109 ,  H01S3/302 ,  H03B17/00 ,  H03L7/00 ,  H04B10/00 ,  H04B10/2575 ,  H04B2210/006 ,  H04L7/0037 ,  H04L7/0041 ,  H04L7/0075 ,  H04L7/033 ,  H04L7/0337

Abstract: Aspects of the disclosure relate generally to a circuit for sustaining an radio frequency (RF) modulated optical signal. The circuit may comprise a self injection locking component having a fiber optic delay line over which a portion of the optical signal propagates. The circuit may also comprise a self phase locked loop component having at least two fiber optic cables having different lengths and over which another portion of the optical signal propagates and a phase detector coupled to the at least two fiber optic cables and configured to determine a phase difference between the signals propagating over one of the respective fiber optic cables. The circuit may further comprise a voltage controlled oscillator configured to generate a stable oscillating signal in response to signals generated by each of the self injection locking and self phase locked loop components, the stable oscillating signal being configured to sustain the optical signal.

公开(公告)号：EP2649736A1

公开(公告)日：2013-10-16

申请号：EP10816438.5

申请日：2010-12-08

Applicant: Oclaro Technology Limited

Inventor： BUSICO, Giacinto ,  WILLIAMSON, David ,  CARTER, Andrew, Cannon ,  WARD, Andrew, John ,  LANGLEY, Lloyd, Nicholas

IPC: H04B10/155

CPC classification number: H01S3/10 ,  G02F1/0123 ,  H04B10/506 ,  H04B10/801

Abstract: An adjustable array includes a plurality of optical devices. Each adjustable array device has an optical light output therefrom and is configured whereby the corresponding optical lights of the plurality of optical devices have a predefined nonequivalent relationship relative to one another with respect to an output parameter. In response to a drive signal, the plurality of optical devices are further configured to adjust the corresponding optical lights with respect to the output parameter while substantially maintaining the predefined nonequivalent relationship.

公开(公告)号：EP2504894A1

公开(公告)日：2012-10-03

申请号：EP10781675.3

申请日：2010-11-19

Applicant: High Q Laser GmbH

Inventor： MEIER, Joachim ,  WEGNER, Ulrike ,  LEDERER, Maximilian Josef ,  KOPF, Daniel

IPC: H01S3/11 ,  G02B17/00 ,  H01S3/07 ,  H01S3/081 ,  H01S3/0941

CPC classification number: H01S3/10 ,  G02B17/00 ,  G02B17/004 ,  G02B17/0657 ,  H01S3/07 ,  H01S3/081 ,  H01S3/0813 ,  H01S3/09415 ,  H01S3/1115

Abstract: The invention relates to a mirror arrangement for guiding a laser beam in a laser system having at least one first end mirror (1) and one second end mirror (2), wherein said end mirrors (1, 2) define a resonator having an optical resonator axis (OA), wherein the laser beam is guided into the resonator as an input laser beam (ES) and is guided out of the resonator again after multiple reflection at the first and second end mirrors (1, 2) as an output laser beam (AS). The sequence of reflections at the first and the second end mirror (1, 2) thereby determines a direction of rotation between the first and second end mirror, defined as an axis of rotation relative to the resonator axis, whereby a first beam path is defined and the laser beam circulates in a direction of rotation between the first and second end mirrors in the resonator defined as an axis of rotation relative to the resonator axis (OA). The resonator is designed such that the direction of rotation is reversed at a reversing point and the laser beam in the resonator passes through at least partially in a direction of rotation opposite to the first beam path, whereby a second beam path is defined.

公开(公告)号：EP2492735A1

公开(公告)日：2012-08-29

申请号：EP12156593.1

申请日：2008-11-19

Applicant: Fianium Limited

Inventor： Clowes, John ,  Grudinin, Anatoly ,  Godfrey, Ian

IPC: G02B21/00 ,  G02B6/02 ,  H01S3/11 ,  H01S3/23

CPC classification number: H01S3/11 ,  G01N21/6458 ,  G01N2021/6419 ,  G01N2021/6441 ,  G01N2201/0697 ,  G02B21/16 ,  G02F1/353 ,  G02F1/365 ,  G02F2001/3528 ,  H01S3/10 ,  H01S3/10046 ,  H01S3/1024 ,  H01S3/108 ,  H01S3/2308

Abstract: An optical pulse source 30 comprising a DPSS pump laser 31, a photonic crystal fibre (PCF) 35 and acousto-optic modulator (AOM) gating means 33. The pump pulses are coupled through lenses 32 to the AOM 33, synchronised to the pump laser 31 and operable to gate the pump pulses to a reduced repetition rate Rr = Rf/N, where Rf is the pump laser fundamental frequency. The pulses from the AOM 33 are injected via optics 34 into the PCF 35. Propagation through the PCF 35 causes the pulses to broaden spectrally to produce supercontinuum pulses. An optical pulse source comprising the optical pulse source 30 and an acousto-optical tunable filter (AOTF) operable to convert supercontinuum pulses into wavelength variable output pulses is also provided. A method of scaling the energy of the optical supercontinuum pulses is also provided.

Abstract translation: 包括DPSS泵浦激光器31，光子晶体光纤（PCF）35与声光调制器（AOM）选通光脉冲源30装置33的泵脉冲通过透镜32耦合到AOM 33，同步到泵浦激光器 31，并且可操作以栅泵脉冲至减小的重复率Rr = RF / N，其中f是泵浦激光基波频率。 从AOM 33的脉冲通过光学34注入到通过PCF 35的PCF 35.传播导致脉冲拓宽光谱以产生超连续脉冲。 因此提供了一种光学脉冲源包括可操作以超连续脉冲转化为波长可变输出脉冲的光脉冲源30和上声光可调滤波器（AOTF）。 因此，提供缩放光学超连续脉冲的能量的方法。

公开(公告)号：EP2259392A2

公开(公告)日：2010-12-08

申请号：EP10178735.6

申请日：2004-12-16

Applicant: YEDA RESEARCH AND DEVELOPMENT CO., LTD.

Inventor： Ishaaya, Amiel, A. ,  Davidson, Nir ,  Friesem, Asher A. ,  Shimshi, Liran

IPC: H01S3/07 ,  H01S3/10 ,  H01S5/40 ,  H01S3/08 ,  H01S3/23 ,  G02B27/10 ,  G02B27/14 ,  G02B27/28

CPC classification number: H01S3/07 ,  H01S3/0805 ,  H01S3/08054 ,  H01S3/08059 ,  H01S3/08063 ,  H01S3/08068 ,  H01S3/0811 ,  H01S3/0816 ,  H01S3/082 ,  H01S3/10 ,  H01S3/10092 ,  H01S3/1106 ,  H01S3/1307 ,  H01S3/2383 ,  H01S5/4012 ,  H01S5/4025 ,  H01S5/4062

Abstract: Presented is a laser resonator cavity comprising at least one gain medium (16A,16B) and end reflectors (12A,12B,14) which define together longitudinal modes of light in the cavity, the resonator cavity further comprising: (1) a beam coupler assembly (320) configured to split tight impinging thereon into a predetermined number of spatially separated light channels (C1, C2), and to cause phase locking and coherent combining of the light channels, having common longitudinal and transverse modes, in a double pass through the beam coupler assembly, to thereby produce an output combined light channel, the beam coupler assembly being configured for polarization coupling of the light channels and comprising two polarizers (322A,322B) accommodated in a spaced-apart relationship along an axis of the cavity; and an optical element (323) configured as a half wave retardation plate or 45° polarization rotator accommodated between the two polarizers; and an aperture arrangement (318A,318B) configured to select in at least one of the light channels a predetermined transverse mode content that is desired at the cavity output (14).

Abstract translation: 提出了一种激光谐振腔，包括至少一个增益介质（16A，16B）和端部反射器（12A，12B，14），端部反射器（12A，12B，14）将空腔中的纵向光模式定义在一起，谐振腔还包括：（1） 组件（320），其构造成将其紧密地撞击到预定数量的空间分离的光通道（C1，C2）中，并且使得具有共同的纵向和横向模式的光通道的相位锁定和相干组合在双通道 所述光束耦合器组件由此产生输出组合光通道，所述光束耦合器组件被配置为用于所述光通道的偏振耦合并且包括沿着所述腔的轴线以间隔的关系容纳的两个偏振器（322A，322B） 以及配置为容纳在所述两个偏振器之间的半波相位差板或45°偏振旋转体的光学元件（323） 以及孔布置（318A，318B），其被配置为在所述光通道中的至少一个中选择在所述腔输出（14）处期望的预定横向模式内容。

公开(公告)号：EP1742309B1

公开(公告)日：2009-10-21

申请号：EP05014705.7

申请日：2005-07-06

Applicant: Max-Planck-Gesellschaft zur Förderung der Wissenschaften e.V. ,  Friedrich-Alexander-Universität Erlangen-Nürnberg

Inventor： Wang, Lijun ,  Döhler, Gottfried ,  Malzer, Stefan ,  Lu, Zehuang ,  Preu, Sascha ,  Zhang, Jie

IPC: H01S3/10 ,  G01N21/35

CPC classification number: G01N21/3581 ,  H01S3/10

公开(公告)号：EP1240694B1

公开(公告)日：2006-11-22

申请号：EP00991696.6

申请日：2000-12-15

Applicant: Cymer, Inc.

Inventor： PARTLO, William, N. ,  ERSHOV, Alexander, I. ,  SMITH, Scott, T.

IPC: H01S3/08

CPC classification number: G03F7/70025 ,  G03F7/70575 ,  H01S3/0401 ,  H01S3/10 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/134 ,  H01S3/225

Abstract: A grating (16) based line narrowing unit with bi-directional beam expansion for the narrowing lasers. In a preferred embodiment a beam from the chamber of the laser is expanded in the horizontal direction with a three-prism beam expander (8, 10, 12) and is expanded in the vertical direction with a single prism (60). A narrow band of wavelengths in the expanded beam is reflected from a grating in a Littrow configuration back via the two beam expanders into the laser chamber for amplification.

公开(公告)号：EP1218986A4

公开(公告)日：2003-08-27

申请号：EP00963314

申请日：2000-08-31

Applicant: CYMER INC

Inventor： ALGOTS JOHN M ,  MARCHI CHRISTOPHER A ,  ERIE FREDRICK G ,  BUCK JESSE D ,  ERSHOV ALEXANDER I ,  DAS PALASH P ,  FOMENKOV IGOR V

IPC: H01S3/225 ,  G02B5/18 ,  G03F7/20 ,  H01S3/03 ,  H01S3/08 ,  H01S3/081 ,  H01S3/086 ,  H01S3/10 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/13 ,  H01S3/134 ,  H01S3/136 ,  H01S3/139 ,  H01S3/22

CPC classification number: G03F7/70025 ,  G02B5/1828 ,  G03F7/70483 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/08009 ,  H01S3/08059 ,  H01S3/08081 ,  H01S3/0812 ,  H01S3/086 ,  H01S3/10 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/13 ,  H01S3/134 ,  H01S3/1392 ,  H01S3/225 ,  H01S3/2256

Abstract: A smart laser having automatic computer control (24A) of pulse energy, wavelength, and bandwidth using feedback signals from a wavemeter (22). Pulse energy is controlled by controlling discharge voltage. Wavelength is controlled by very fine and rapid positioning of an Rmax mirror in a line narrowing module. Bandwidth is controller by adjusting the curvature of a grating in the line narrowing module. Preferred embodiments include automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the Rmax tilt. Other preferred embodiments include automatic adjustment of the horizontal position of the laser chamber (3) within the resonance cavity. In preferred embodiments, feedback signals from a wavelength monitor are used to position the Rmax mirror. In other embodiments a separate laser beam reflected off the Rmax mirror on to a photodiode array is used to position the mirror.

Abstract translation: 智能激光器具有脉冲能量，波长和带宽的自动计算机控制，使用来自波形计的反馈信号。 通过控制放电电压来控制脉冲能量。 通过在线窄模块中的RMAX镜子的非常精细和快速的定位来控制波长。 带宽是通过调整线窄化模块中的光栅的曲率来控制的。 优选实施例包括通过自动调节光束扩展器棱镜所在的棱镜板和自动调整RMAX倾斜来自动反馈控制水平和垂直光束轮廓。 其它优选实施例包括在谐振腔内自动调整激光室的水平位置。 在优选实施例中，使用来自波长监视器的反馈信号来定位RMAX镜。 在其它优选实施例中，使用从RMAX镜反射到光电二极管阵列的单独的激光束来定位反射镜。

公开(公告)号：EP1218986A1

公开(公告)日：2002-07-03

申请号：EP00963314.0

申请日：2000-08-31

Applicant: Cymer, Inc.

Inventor： ALGOTS, John, M. ,  MARCHI, Christopher, A. ,  ERIE, Fredrick, G. ,  BUCK, Jesse, D. ,  ERSHOV, Alexander, I. ,  DAS, Palash, P. ,  FOMENKOV, Igor, V.

IPC: H01S3/22

CPC classification number: G03F7/70025 ,  G02B5/1828 ,  G03F7/70483 ,  G03F7/70575 ,  H01S3/02 ,  H01S3/03 ,  H01S3/08009 ,  H01S3/08059 ,  H01S3/08081 ,  H01S3/0812 ,  H01S3/086 ,  H01S3/10 ,  H01S3/105 ,  H01S3/1055 ,  H01S3/13 ,  H01S3/134 ,  H01S3/1392 ,  H01S3/225 ,  H01S3/2256

Abstract: A smart laser having automatic computer control (24A) of pulse energy, wavelength, and bandwidth using feedback signals from a wavemeter (22). Pulse energy is controlled by controlling discharge voltage. Wavelength is controlled by very fine and rapid positioning of an Rmax mirror in a line narrowing module. Bandwidth is controller by adjusting the curvature of a grating in the line narrowing module. Preferred embodiments include automatic adjustment of a prism plate on which beam expander prisms are located and automatic adjustment of the Rmax tilt. Other preferred embodiments include automatic adjustment of the horizontal position of the laser chamber (3) within the resonance cavity. In preferred embodiments, feedback signals from a wavelength monitor are used to position the Rmax mirror. In other embodiments a separate laser beam reflected off the Rmax mirror on to a photodiode array is used to position the mirror.

公开(公告)号：EP1084528A2

公开(公告)日：2001-03-21

申请号：EP99932660.6

申请日：1999-05-07

Applicant: Leica Microsystems Heidelberg GmbH

Inventor： ENGELHARDT, Johann ,  ZAPF, Thomas ,  HUG, Bill

IPC: H01S3/10 ,  G02B21/00

CPC classification number: H01S3/10 ,  G02B21/0032 ,  G02B21/0036 ,  G02B21/0084

Abstract: The invention relates to a method for operating a laser light source, more particularly, for scanning in a confocal laser scan microscope, whereby the laser light source (3) is supplied with power by means of a power unit. In order to enhance service life of the laser light source (3) and reduce operating costs, the laser light source (3) is operated with the required power almost exclusively during effective beam utilization time, preferably during data capture. By using a pulsating laser light source, effective beam utilization time, especially data capture, is synchronized (14) substantially with the emission cycle of the laser light source.