公开(公告)号：EP1543373B1

公开(公告)日：2006-06-28

申请号：EP03785604.4

申请日：2003-09-22

申请人： Carl Zeiss SMS GmbH

发明人： BISCHOFF, Jörg ,  BRUNNER, Robert ,  BURKHARDT, Matthias ,  ERDMANN, Lars ,  STEINER, Reinhard

IPC分类号： G02B27/48

CPC分类号： G02B27/106 ,  G02B21/06 ,  G02B27/123 ,  G02B27/126 ,  G02B27/144 ,  G02B27/145

摘要： The invention relates to an lighting device comprising a beam multiplication device (1) which divides a coherent beam (18) into a plurality of partial beams (20, 21) and combines said partial beams to form a bundle of rays (26) once they have followed paths having different optical lengths, the partial beams (27, 28, 29, 30) diverging in said bundle of rays. Said lighting device also comprises a micro-optical system (3) which is arranged downstream from the beam multiplication device (1) and comprises a plurality of optical elements (19) arranged in a grid-type manner. Said bundle of rays (26) hits the micro-optical system (3), and the partial beams (27, 28, 29, 30) of the bundle of rays (26) thus hit each optical element (19) at different angles, in such a way that a plurality of illumination partial beams (M1, M2, M3, M4) irradiate from each optical element (19) in different diffusion directions and can be used to illuminate an object field (31).

公开(公告)号：EP1373961B1

公开(公告)日：2006-01-04

申请号：EP02787138.3

申请日：2002-07-19

申请人： Carl Zeiss SMS GmbH

发明人： ENGEL, Thomas

IPC分类号： G02B21/02 ,  G02B21/36

CPC分类号： G02B21/02 ,  G02B21/362

摘要： A microscope lens arrangement consisting of a microscope lens (1) which can be placed in a working position in such a way that a sample (7) arranged in the field of view of said microscope lens (1) can be detected . A video camera (12; 22; 25; 32) which is coupled to the microscope lens (1) is provided. Said video camera can detect at least one part of the field of view without the aid of the lens when the microscope lens (1) is in a working position.

公开(公告)号：EP1407308B1

公开(公告)日：2005-12-07

申请号：EP02754671.2

申请日：2002-06-13

申请人： Carl Zeiss SMS GmbH

发明人： ENGEL, Thomas

IPC分类号： G02B21/02 ,  G02B21/06 ,  G02B21/36 ,  G02B21/24 ,  G02B9/04

CPC分类号： G02B21/361 ,  G01B9/04 ,  G02B21/02 ,  G02B21/06 ,  G02B21/248

摘要： The invention relates to a microscope lens (1) comprising a housing (2) that can be connected to a lens holder of a microscope and that has a light admission opening (6) and comprising an optics system (8) that is located in the housing (2). Said lens is provided with an image recording element (19). According to the invention, incident light is guided via the light admission opening (6) onto the image recording element (9) by means of the optics system (8) and is not coupled into the optical path of the microscope, located below the microscope lens.

公开(公告)号：EP1521111A1

公开(公告)日：2005-04-06

申请号：EP04021938.8

申请日：2004-09-15

申请人： Carl Zeiss SMS GmbH

发明人： Menck, Alexander, Dr. ,  Engel, Thomas, Dr.

IPC分类号： G02B27/48 ,  G02B27/09 ,  G02B5/09 ,  G02B21/08 ,  G03F7/20 ,  H01S3/00 ,  B23K26/00 ,  G02B27/10

CPC分类号： G03F7/70075 ,  G02B5/09 ,  G02B21/08 ,  G02B27/144 ,  G02B27/48 ,  G03F7/70583

摘要： Es wird eine Beleuchtungsvorrichtung mit einem einen Stufenspiegel (2, 3, 20) aufweisenden Kohärenzminderer (1), der mittels des Stufenspiegels (2, 3, 20) einem zugeführten Strahlenbündel (11) unterschiedliche Phasenverschiebungen in Abhängigkeit von der Position im Strahlquerschnitt einprägt und als Beleuchtungsstrahlenbündel abgibt, und mit einer dem Kohärenzminderer (1) nachgeordneten Beleuchtungsoptik (4), die das Beleuehtungsstrahlenbündel zur Beleuchtung eines Objektfeldes (O) abbildet, bereitgestellt, wobei die einzelnen reflektiven Flächen (5, 6, 7, 8, 9; 21, 22, 23, 24, 25, 26, 27) des Stufenspiegels (2, 3, 20) gekrümmt ausgebildet sind.

摘要翻译： 照明系统（1）使用由具有平坦波前（W）的部分光束（11,12）组成的来自激光器的相干光束（10）。 光束从反射镜（2）表面上不同高度（5-9）的凹形台阶反射出来。 反射镜将反射波前（W1，W2）延迟不同量。 光束从第二镜（3）反射，并且每个光束在光瞳平面（P）中聚焦。 光束通过散射光学系统（4）并落在物体（O）上。

公开(公告)号：EP1521110A1

公开(公告)日：2005-04-06

申请号：EP04021814.1

申请日：2004-09-14

申请人： Carl Zeiss SMS GmbH

发明人： Hollemann, Susanne, Dr. ,  Engel, Thomas, Dr.

IPC分类号： G02B27/48 ,  G02B27/09 ,  G02B5/30 ,  G03F7/20 ,  H01S3/00

CPC分类号： G03F7/70583 ,  G02B5/3083 ,  G02B27/48

摘要： Es wird beschrieben ein Kohärenzminderer, der mindestens ein doppelbrechendes Element (2) aufweist, welches ein zugeführtes, kohärentes Strahlbündel (10) in mehrere in senkrecht zueinander liegenden Polarisationsrichtungen polarisierte Teilstrahlbündel so aufteilt, daß die Teilstrahlbündel zueinander in Strahlrichtung und/oder quer zur Strahlrichtung versetzt sind und/oder in unterschiedliche Richtungen propagieren, wobei, daß das doppelbrechende Element (2) einen Stapel (6, 7) aus doppelbrechenden Platten (6a-e, 7a-e) aufweist, wobei die Platten (6, 7) optisch unterschiedlich lang sind und jeweils nur von einem der Teilstrahlbündel durchsetzt sind.

摘要翻译： 激光束相干降低系统（1）具有彼此成直角的玻璃板（6,7）的两个阶梯阵列。 它们提供不同的光学距离（6a-7e）以产生不同的光传输延迟。 单个平面波前（W）被分解成由不同时间间隔延迟的许多波前（W1-W5）。 聚焦光学系统（3）具有在它们之间具有焦点的两个透镜（12,13）。 来自第二透镜的平行光束通过微透镜阵列（4,9），微透镜阵列（4,9）产生成角度的光束（M1-M5），它们穿过用于聚焦在物场（14）上的第三透镜（5）。

公开(公告)号：EP2568326A1

公开(公告)日：2013-03-13

申请号：EP12183576.3

申请日：2012-09-07

申请人： Carl Zeiss SMS GmbH ,  Carl Zeiss SMT GmbH

发明人： Arnz, Michael ,  Seidel, Dirk ,  Perlitz, Sascha

IPC分类号： G02B21/24

CPC分类号： G02B21/244 ,  G02B21/245

摘要： There is provided an imaging device comprising
an autofocus device (1) and an imaging lens system (9) with a first focal plane (20), an object stage (11) for holding an object (3), a first movement module (30) for the relative movement of object stage (11) and imaging lens system (9), wherein the autofocus device (1) comprises an image-recording module (9) with a second focal plane the position of which relative to the first focal plane is known,
a second movement module (30) for the relative movement of object stage (11) and image-recording module (9),
a focus module for producing a two-dimensional, intensity-modulated focussing image (19) in a focus module plane which intersects the second focal plane (20) and
a control module (24) which controls the image-recording module (9), which then records a first two-dimensional image of the object (3) together with the focussing image (19) during a predetermined first exposure time, and wherein the control module (24), using the first two-dimensional image recorded by means of the image-recording module (9) and taking into account the relative position of the first and second focal plane (20), evaluates the required change in distance between the object stage (11) and the imaging lens system (9) and controls the first movement module (30) such that the evaluated change in distance is carried out for focussing the imaging device,
wherein,
the control module controls the second movement module such that, during the first exposure time for recording the first two-dimensional image, the object stage is moved relative to the image-recording module in a plane parallel to the second focal plane, and
the imaging device, after carrying out the evaluated change in distance, records a second two-dimensional image of the object (3) by means of the imaging lens system (9), wherein the object stage (11) and/or the object (3) is not moved relative to the imaging lens system (9) in a plane parallel to the first focal plane during a second exposure time for recording the second two-dimensional image.

摘要翻译： 提供了一种成像装置，其包括自动对焦装置（1）和具有第一焦平面（20）的成像透镜系统（9），用于保持物体（3）的物体台（11），第一移动模块（30） ），用于对象台（11）和成像透镜系统（9）的相对运动，其中自动对焦装置（1）包括具有第二焦平面的图像记录模块（9），该第二焦平面相对于第一焦平面 已知的是用于物体台（11）和图像记录模块（9）的相对移动的第二运动模块（30），用于产生聚焦的二维强度调制聚焦图像（19）的聚焦模块 与所述第二焦平面（20）相交的模块平面和控制所述图像记录模块（9）的控制模块（24），所述控制模块随后将所述对象（3）的第一二维图像与所述聚焦图像 19）在预定的第一曝光时间期间，并且其中所述控制模块（24）使用所述第一二维 通过图像记录模块（9）记录并考虑到第一和第二焦平面（20）的相对位置的记录图像，评估物体台（11）和成像透镜系统之间所需的距离变化 （9）并且控制所述第一移动模块（30），使得执行所述评估的距离变化以聚焦所述成像装置，其中，所述控制模块控制所述第二移动模块，使得在所述第一曝光时间期间， 二维图像，物体台在与第二焦平面平行的平面中相对于图像记录模块移动，并且成像装置在执行评估的距离变化之后，记录第二二维图像 物体（3）通过成像透镜系统（9），其中物体台（11）和/或物体（3）在平行于第一焦点的平面中相对于成像透镜系统（9）不移动 一次在飞机上 d曝光时间用于记录第二个二维图像。

公开(公告)号：EP2313913B1

公开(公告)日：2013-01-09

申请号：EP09777811.2

申请日：2009-08-11

申请人： Carl Zeiss SMS GmbH

发明人： AUTH, Nicole ,  SPIES, Petra ,  BECKER, Rainer ,  HOFMANN, Thorsten ,  EDINGER, Klaus

IPC分类号： H01L21/311 ,  H01L21/3213 ,  H01L21/3065

CPC分类号： H01L21/3065 ,  H01J37/3056 ,  H01L21/31116 ,  H01L21/32136

公开(公告)号：EP2257853B1

公开(公告)日：2012-07-25

申请号：EP09715092.4

申请日：2009-02-24

申请人： Carl Zeiss SMS GmbH

发明人： BUDACH, Michael ,  BRET, Tristan ,  EDINGER, Klaus ,  HOFMANN, Thorsten

IPC分类号： G03F1/00 ,  C23C16/04 ,  H01J37/305 ,  C23C16/48

CPC分类号： G03F1/74 ,  C23C16/047 ,  H01J37/304 ,  H01J37/3056 ,  H01J2237/24495 ,  H01J2237/30466 ,  H01J2237/30483 ,  H01J2237/31732 ,  H01J2237/31744

摘要： The present invention relates to a method for processing an object with miniaturized structures, having the steps of : feeding a reaction gas onto a surface of the object; processing the object by directing an energetic beam onto a processing site in a region, which is to be processed, on the surface of the object, in order to deposit material on the object or to remove material from the object, detecting interaction products of the beam with the object, and deciding whether the processing of the object must be continued or can be terminated with the aid of information which is obtained from the detected interaction products of the beam with the object, the region to be processed being subdivided into a number of surface segments, and the interaction products detected upon the beam striking regions of the same surface segment being integrated to form a total signal in order to determine whether processing of the object must be continued or can be terminated.

公开(公告)号：EP1587128B1

公开(公告)日：2011-06-08

申请号：EP04008972.4

申请日：2004-04-15

申请人： Carl Zeiss SMS GmbH

发明人： Edinger, Klaus ,  Sellmair, Josef ,  Hofmann, Thorsten

IPC分类号： H01J37/02 ,  H01J37/28

CPC分类号： H01J37/026 ,  H01J37/09 ,  H01J37/28 ,  H01J2237/0041 ,  H01J2237/026

公开(公告)号：EP2313914A1

公开(公告)日：2011-04-27

申请号：EP09777868.2

申请日：2009-08-13

申请人： Carl Zeiss SMS GmbH

发明人： AUTH, Nicole ,  SPIES, Petra ,  BECKER, Rainer ,  HOFMANN, Thorsten ,  EDINGER, Klaus

IPC分类号： H01L21/311 ,  H01L21/3065 ,  H01L21/3213

CPC分类号： H01L21/3065 ,  H01L21/31116 ,  H01L21/32136

摘要： The invention relates to a method for electron beam induced etching of a material (100, 200). Said method consists of the following steps: at least one etching gas is provided on one area of the material (100, 200) on which an electron beam strikes said material (100, 200) and at least one passivation gas that is used to slow down or prevent spontaneous etching by the at least one etching gas is provided.