PROBE CARDS INCLUDING NANOTUBE PROBES AND METHODS OF FABRICATING
    53.
    发明公开
    PROBE CARDS INCLUDING NANOTUBE PROBES AND METHODS OF FABRICATING 有权
    用于制造纳米管探头

    公开(公告)号:EP2329502A1

    公开(公告)日:2011-06-08

    申请号:EP09817037.6

    申请日:2009-09-29

    IPC分类号: G21K7/00

    摘要: Methods of fabricating a plurality of carbon nanotube-bundle probes on a substrate are disclosed. In some embodiments, the method includes the following: providing a substrate having a top surface and a bottom surface; forming an array of electrically conductive pads on the top surface, the array of electrically conductive pads being formed to mirror an array of pads on an integrated circuit that is to be tested; applying a catalyst for promoting growth of carbon nanotubes on each of the array of electrically conductive pads; heating the substrate in a carbon-rich environment thereby growing nanotubes extending upwardly from each of the array of electrically conductive pads and above the top surface of the substrate thereby forming a plurality of carbon nanotube-bundle probes extending upwardly above the top surface of the substrate; and capping each of the plurality of carbon nanotube-bundle probes with an electrically conductive material.

    PHASE RETRIEVAL IN PHASE CONTRAST IMAGING
    55.
    发明授权
    PHASE RETRIEVAL IN PHASE CONTRAST IMAGING 失效
    相位确定在相PICTURE程序

    公开(公告)号:EP0954951B1

    公开(公告)日:2009-02-04

    申请号:EP97948656.0

    申请日:1997-12-24

    申请人: XRT Limited

    摘要: A method of obtaining an image of the phase change introduced by an object in penetrating radiation incident on the object includes irradiating the object with penetrating radiation having high lateral spatial coherence, and receiving at least a portion of the radiation at a detector after the radiation has emerged from the object and thereby obtaining and storing at least two intensity records for the received radiation each including intensity values at predetermined intervals. These values are utilised to derive a grid of values defining an image of the phase change introduced by the object in the penetrating radiation. The intensity records are obtained at a uniform finite distance after the radiation has emerged from the object, and are for respective different energy distributions of the detected radiation. Apparatus is also disclosed.

    MULTI-REFLECTING TIME-OF-FLIGHT MASS SPECTROMETER WITH ORTHOGONAL ACCELERATION
    56.
    发明公开
    MULTI-REFLECTING TIME-OF-FLIGHT MASS SPECTROMETER WITH ORTHOGONAL ACCELERATION 有权
    多反射时间质谱仪正交加速

    公开(公告)号:EP1949410A1

    公开(公告)日:2008-07-30

    申请号:EP06816588.5

    申请日:2006-10-11

    申请人: LECO CORPORATION

    IPC分类号: H01J49/00 B01D59/44 G21K7/00

    CPC分类号: H01J49/401 H01J49/406

    摘要: The disclosed apparatus includes a multi-reflecting time-of-flight mass spectrometer (MR-TOF MS) (11) comprising a pair of grid- free ion mirrors (12), a drift space (13), an orthogonal ion accelerator (14), an optional deflector (15), an ion detector (16), a set of periodic lenses (17), and an edge deflector (18). To improve the duty cycle of the ion injection at a low repetition rate dictated by a long flight in the MR-TOF MS, multiple measures may be taken. The incoming ion beam and the accelerator may be oriented substantially transverse to the ion path in the MR-TOF, while the initial velocity of the ion beam is compensated by tilting the accelerator and steering the beam for the same angle. To further improve the duty cycle of any multi-reflecting or multi-turn mass spectrometer, the beam may be time-compressed by modulating the axial ion velocity with an ion guide. The residence time of the ions in the accelerator may be improved by trapping the beam within an electrostatic trap. Apparatuses with a prolonged residence time in the accelerator provide improvements in both sensitivity and resolution.

    MULTIPLE GAS INJECTION SYSTEM FOR CHARGED PARTICLE BEAM INSTRUMENTS
    58.
    发明公开
    MULTIPLE GAS INJECTION SYSTEM FOR CHARGED PARTICLE BEAM INSTRUMENTS 审中-公开
    多气体注入系统带电粒子光束INSTRUMENTS

    公开(公告)号:EP1774538A2

    公开(公告)日:2007-04-18

    申请号:EP05810798.8

    申请日:2005-07-21

    申请人: Omniprobe, Inc.

    发明人: Moore, Thomas, M.

    IPC分类号: G21K7/00

    摘要: We disclose a gas injection system having at least one crucible, each crucible holding at least one deposition constituent; at least one transfer tube, the number of transfer tubes corresponding to the number of crucibles, each transfer tube being connected to a corresponding crucible. There is at least one metering valve, the number of metering valves corresponding to the number of transfer tubes, each metering valve being connected to a corresponding transfer tube so that the metering valve can measure and adjust vapor flow in the corresponding transfer tube. A sensor is provided capable of sensing reactions between deposition constituents and a focused ion beam A computer is connected to receive the output of the sensor; the computer is also connected to each metering valve to control the operation of the valve, and the computer is programmed to send control signals to each metering valve to control the operation of the valve; the control signals being computed responsive to feedback from the output of the sensor.

    VERFAHREN UND VORRICHTUNG ZUR OPTISCHEN ABTASTUNG EINER PROBE

    公开(公告)号:EP1747421A1

    公开(公告)日:2007-01-31

    申请号:EP05734876.5

    申请日:2005-04-08

    发明人: TÜMPNER, Jürgen

    摘要: The invention relates to a method and a device for optically scanning a sample (1). The basic structure of said device comprises at least one adjustment unit (2, 3) and at least one scanning device (4, 5). The sample (1) is displaced in relation to the scanning device (4, 5) by means of the adjustment unit (2, 3) impinged upon by a control system (6), or vice versa. According to the invention, adjustment values for the mechanical compensation of play are incorporated, filed in the control system (6) and taken into consideration during adjustment.

    摘要翻译: 本发明涉及用于光学扫描样品的方法和装置。 该装置的基本结构包括至少一个调整单元和至少一个扫描装置。 样品相对于扫描装置通过由控制系统撞击的调节单元移位,反之亦然。 根据本发明,在调整过程中并入了控制系统的机械补偿调整值,并考虑到调整值。