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190 条记录 (耗时 0.015 秒)

    Apparatus for surface analysis
    62.
    发明公开
    Apparatus for surface analysis 失效
    表面分析装置

    公开(公告)号：EP0284683A3

    公开(公告)日：1990-03-07

    申请号：EP87307673.1

    申请日：1987-08-28

    申请人： FISONS plc

    发明人： Waugh, Allen Robert

    IPC分类号： H01J37/252

    CPC分类号： H01J37/226 ,  H01J37/15 ,  H01J37/252

    摘要： An apparatus adapted for the analysis of a surface of a sample (1) comprises: means (7) for stimulating a region of said surface to emit charged particles; means for moving a light reflecting means (16) in a substantially rectilinear fashion along an optical axis of a microscope (28) to a position where it reflects an image of said region to said microscope (28); and means for moving an extraction electrode (15) in a substantially rectilinear fashion in a direction substantially parallel to, or coincident with, said optical axis to a position where said charged particles pass through an aperture in said extraction electrode (15) to a charged particle analyser (10). The invention allows both the direction of extraction of charged particles and the direction along which said surface is viewed, to be coincident and perpendicular to said surface.

    SECONDARY ELECTRON DETECTOR FOR USE IN A GASEOUS ATMOSPHERE.
    63.
    发明公开
    SECONDARY ELECTRON DETECTOR FOR USE IN A GASEOUS ATMOSPHERE. 失效
    二次电子探测器用在气体的环境中。

    公开(公告)号：EP0314763A4

    公开(公告)日：1989-12-13

    申请号：EP88904896

    申请日：1988-05-17

    申请人： ELECTROSCAN CORP

    发明人： MANCUSO JAMES F ,  MAXWELL WILLIAM B ,  DANILATOS GERASIMOS D

    IPC分类号： H01J37/28 ,  H01J37/06 ,  H01J37/244 ,  H01J37/252

    CPC分类号： H01J37/244 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/24507

    摘要： The invention provides for a device and method for generating, amplifying, and detecting secondary electrons from a surface of a sample. The device contains a vacuum envelope (1) having a pressure limiting aperture (2), a charged particle beam source (3), means (4, 5) for focusing and directing the charged particle beam through the aperture (2) to a sample mounted on a sample platform (6) located in a gaseous environment outside of the vacuum envelope (1), an electrode (7) located outside of the vacuum envelope (1) and close to the sample platform (6). In operation, the electrode is biased by a voltage source (8) to accelerate secondary electrons emitted by the sample so that they collide with gas molecules to produce negative charge carriers which multiply by further collisions. The negative charge carriers are collected by the electrode (7) to produce a current which is amplified by a current amplifier (4) and output to a detector (10).

    Surface analyzer
    65.
    发明公开
    Surface analyzer 失效
    Oberflächenanalysegerät。

    公开(公告)号：EP0290046A2

    公开(公告)日：1988-11-09

    申请号：EP88107344.9

    申请日：1988-05-06

    申请人： NISSIN ELECTRIC COMPANY, LIMITED

    发明人： Aoki, Masahiko c/o Nissin Electric Co., Ltd.

    IPC分类号： G01N23/20 ,  H01J37/00 ,  G01N23/203 ,  H01J49/46 ,  H01J49/06 ,  H01J37/252 ,  H01J49/02 ,  G01N23/225

    CPC分类号： G01N23/203 ,  H01J49/06 ,  H01J49/46

    摘要： A surface analyzer for analyzing the atomic composition of the surface of sample. An ion source generates a proton beam. A magnet directs the proton beam through an accelerating device toward the sample for collision therewith. Protons that are scattered at an angle of 180° pass through the accelerating device in the reverse direction and are decelerated. The magnet directs the protons as a parallel beam to a position detecting device that indicates the position at which the proton beam strikes and energy loss of the protons can be determined.

    摘要翻译： 用于分析样品表面的原子组成的表面分析仪。 离子源产生质子束。 磁体通过加速装置将质子束引向样品以与其碰撞。 以180°的角度散射的质子沿反方向通过加速装置并减速。 磁体将质子作为平行光束引导到位置检测装置，其指示质子束撞击的位置，并且可以确定质子的能量损失。

    Surface analysis spectroscopy apparatus
    66.
    发明公开
    Surface analysis spectroscopy apparatus 失效
    用于表面分析分光装置。

    公开(公告)号：EP0202937A2

    公开(公告)日：1986-11-26

    申请号：EP86303888.1

    申请日：1986-05-22

    申请人： TEKSCAN LIMITED

    发明人： McDonnell, Liam "Roisin Rubh" ,  Cashell, Eamonn M. "Copper Beeches"

    IPC分类号： G01N23/225 ,  G01N23/227 ,  G01N23/22 ,  H01J49/48 ,  H01J49/06 ,  H01J37/252 ,  G01N25/72

    CPC分类号： G01N23/2206 ,  G01N21/1702 ,  G01N25/72 ,  H01J37/252 ,  H01J49/06 ,  H01J49/482

    摘要： In an apparatus for surface analysis microscopy, a number of analysis devices (5, 11) are mounted on an ultra-high vacuum chamber (1). The devices (5, 11) include a beam source for locally heating a selected region of a specimen and a temperature-detector for monitoring the heating of the selected region, as well as an electron gun (11) and an analyser (5) for detecting emission from a specimen region subjected to electron bombardment. An ion gun may also be provided. The apparatus enables thermal microscopy of a specimen to be carried out in conjunction with other surface analysis techniques including, inter alia, scanning electron microscopy and Auger electron microscopy, within a single apparatus and during a single experimental operation. A novel configuration of cylindrical mirror analyser facilitates mounting a multiplicity of analysis devices on the chamber in a compact manner for studying a specimen at a single position.

    Spektrometerobjektiv für die Korpuskularstrahl-Messtechnik
    68.
    发明公开
    Spektrometerobjektiv für die Korpuskularstrahl-Messtechnik 失效
    分光计客观为粒子束计量。

    公开(公告)号：EP0105440A2

    公开(公告)日：1984-04-18

    申请号：EP83109566.6

    申请日：1983-09-26

    申请人： SIEMENS AKTIENGESELLSCHAFT

    发明人： Lischke, Burkhard, Prof. Dr. Ing. ,  Plies, Erich, Dr. rer. nat.

    IPC分类号： H01J37/05 ,  H01J37/252 ,  H01J37/10

    CPC分类号： H01J37/244 ,  H01J37/05 ,  H01J37/10 ,  H01J37/266 ,  H01J49/488 ,  H01J2237/2443

    摘要： Eine Anordnung für die Korpuskularstrahl-Meßtechnik mit einem Objektiv (01, 02) zur Abbildung von Primärkorpuskeln (PE) auf eine Probe (PR) und mit einem Spektrometer zum Nachweis von Sekundärkorpuskeln (SE) soll eine wirksame Steigerung des Sondenstromes und/oder eine verbesserte Potentialauflösung ermöglichen. Ein Teil des Feldes des Objektivs (01, 02) ist zur Fokussierung der Sekundärkorpuskel (SE) auf die die Energieselektion bestimmende Elektrode (G2) vorgesehen.

    摘要翻译： 包括用于主小体（PE）的成像的物镜（01,02）上的检体（PR）的粒子束测量技术的布置，并与用于检测二次粒子的（SE）到探针电流的有效增加和/或改进的光谱仪 潜在的分辨率允许。 透镜（01,02）的场的一部分是用于聚焦二次粒子（SE）被提供给能量选择决定电极（G2）。