PHOTOSENSITIVE COMPOSITION, PATTERN-FORMING METHOD USING THE PHOTOSENSITIVE COMPOSITION, AND COMPOUND USED IN THE PHOTOSENSITIVE COMPOSITION
    1.
    发明公开
    PHOTOSENSITIVE COMPOSITION, PATTERN-FORMING METHOD USING THE PHOTOSENSITIVE COMPOSITION, AND COMPOUND USED IN THE PHOTOSENSITIVE COMPOSITION 有权
    光敏组分,结构形成方法使用光敏成分和光敏成分使用的连接

    公开(公告)号:EP2192134A1

    公开(公告)日:2010-06-02

    申请号:EP08832644.2

    申请日:2008-09-18

    发明人: WADA, Kenji

    摘要: A photosensitive composition ensuring good performance in terms of pattern profile and line edge roughness in normal exposure (dry exposure), immersion exposure and double exposure, a pattern forming method using the photosensitive composition, and a compound for use in the photosensitive composition are provided.
    A photosensitive composition comprising: (A) a resin containing a repeating unit corresponding to a compound represented by the following formula (I); the resin being capable of producing an acid group upon irradiation with an actinic ray or radiation: Z - A - X - B - R
    wherein Z represents a group capable of becoming an acid group resulting from leaving of a cation upon irradiation with an actinic ray or radiation; A represents an alkylene group; X represents a single bond or a heteroatom-containing divalent linking group; B represents a single bond, an oxygen atom or -N(Rx)-; Rx represents a hydrogen atom or a monovalent organic group; R represents a monovalent organic group substituted by Y; when B represents -N(Rx)-, R and Rx may combine with each other to form a ring; and Y represents a polymerizable group.

    摘要翻译: 确保在图案轮廓和在正常曝光线边缘粗糙度(干式曝光),液浸曝光和双重曝光方面的良好性能的光敏组合物,提供了使用所述感光组合物用于在光敏组合物中使用的化合物的图案形成方法,和。 一种光敏组合物,包括:(a)含有重复单元对应于由下式(I)表示的化合物的树脂; 该树脂能够在酸基团通过照射在光化射线或辐射产生的:Z - A - X - B - R的worinždarstellt能够成为在从通过照射在光化射线的阳离子的离去所得的酸基的基团 或辐射; 在亚烷基甲darstellt; X表示单键或含杂原子的二价连接基团; B表示单键,氧原子或-N(Rx)的 - ; RX darstellt氢原子或一价有机基团; řdarstellt被Y取代的一价有机基团; 当B darstellt -N器(Rx) - ,R和Rx可以海誓山盟结合以形成环; 和Y darstellt可聚合基团。

    POLYMER PRODUCING METHOD, AND A FLOW-TYPE REACTION SYSTEM FOR PRODUCING POLYMER

    公开(公告)号:EP3858870A1

    公开(公告)日:2021-08-04

    申请号:EP19867628.0

    申请日:2019-09-09

    IPC分类号: C08F2/01 C08F2/00 C08F4/44

    摘要: Provided is a method for manufacturing a polymer by a flow-type reaction, including introducing a liquid A containing an anionic polymerizable monomer and a non-polar solvent, a liquid B containing an anionic polymerization initiator and a non-polar solvent, a liquid C containing a polar solvent, and a polymerization terminator into different flow paths; allowing the liquids to flow in the respective flow paths; allowing the liquid A and the liquid B to join together at a joining portion; allowing a conjoined liquid M AB of the liquid A and the liquid B to join with the liquid C at downstream of the joining portion; subjecting the anionic polymerizable monomer to anionic polymerization while a conjoined liquid M ABC of the conjoined liquid M AB and the liquid C is flowing to downstream in a reaction flow path; and allowing a polymerization reaction solution flowing in the reaction flow path to join with the polymerization terminator so that the polymerization reaction is terminated and a polymer is obtained, in which a polarity of a solvent of the liquid M ABC is made higher than a polarity of a solvent of the liquid M AB . Also provided is a flow-type reaction system suited for performing the manufacturing method.

    METHOD FOR PRODUCING POLYMER AND FLOW-TYPE REACTION SYSTEM FOR PRODUCING POLYMER

    公开(公告)号:EP3778656A1

    公开(公告)日:2021-02-17

    申请号:EP19778012.5

    申请日:2019-03-22

    IPC分类号: C08F2/01 C08F4/44

    摘要: A method for producing a polymer through a flow reaction, the method comprising introducing a liquid A, which is an anionically polymerizable monomer, a liquid B, which is an initiator for anionic polymerization, and a polymerization terminator respectively into separate channels to cause the ingredients to flow through the respective channels, causing the liquid A and the liquid B to meet each other, polymerizing said monomer by anionic polymerization while the confluence liquid is flowing downstream in a reaction channel, and causing the polymerization reaction mixture which is flowing in the reaction channel to meet the polymerization terminator to thereby terminate the polymerization reaction and obtain a polymer having a number-average molecular weight of 5,000-200,000, the reaction channel being equipped inside with a static mixer and a polymer having a number-average molecular weight of 2,000 or higher being introduced into the inlet of the mixer; and a flow-type reaction system suitable for implementation of this production method.

    METHOD FOR PRODUCING POLYMER, AND FLOW REACTION SYSTEM FOR PRODUCING POLYMER

    公开(公告)号:EP3689915A1

    公开(公告)日:2020-08-05

    申请号:EP18860472.2

    申请日:2018-09-26

    IPC分类号: C08F2/01 C08F4/48

    摘要: Provided is a method for producing a polymer in which an anionic polymerization reaction is conducted through a flow reaction, wherein the method for producing a polymer includes: introducing a solution A that contains an anionic polymerizable monomer, a solution B that contains an anionic polymerization initiator, and a polymerization terminator into different respective flow paths and causing the solutions and polymerization terminator to flow through the flow paths; merging the solution A and the solution B using a multilayered tubular mixer; anionically polymerizing the anionic polymerizable monomer while the merged solution flows downstream in a reaction flow path; and merging the polymerization reaction solution flowing through the reaction flow path and the polymerization terminator to terminate the polymerization reaction. Also provided is a flow reaction system suitable for implementing the production method.

    METHOD FOR PRODUCING GROUP III-V SEMICONDUCTOR NANOPARTICLE, METHOD FOR PRODUCING GROUP III-V SEMICONDUCTOR QUANTUM DOT, AND FLOW REACTION SYSTEM

    公开(公告)号:EP3604215A1

    公开(公告)日:2020-02-05

    申请号:EP18774430.5

    申请日:2018-03-13

    摘要: The present invention relates to a method for producing group III-V semiconductor nanoparticles, a flow reaction system suitable for performing said method, and a method for producing group III-V semiconductor quantum dots which employs the method for producing group III-V semiconductor nanoparticles. The method for producing group III-V semiconductor nanoparticles employs a flow reaction and comprises: introducing a solution of a compound containing a group III element and a solution of a compound containing a group V element to a first flow path and a second flow path, respectively; and combining the solutions, thereby generating nanoparticles. A combining part is constituted by a multi-layer tubular mixer wherein one of the solutions is passed through a flow path in the smallest tube of the mixer, the other solution is passed through a flow path adjacent to the flow path in the smallest tube, and the ratio of the linear velocities of the two solutions in their respective flow paths is a specific value.