公开(公告)号：EP2909763A4

公开(公告)日：2015-12-23

申请号：EP13885459

申请日：2013-12-24

Applicant: HALLIBURTON ENERGY SERVICES INC

Inventor： PERKINS DAVID L ,  FREESE ROBERT PAUL ,  JONES CHRISTOPHER MICHAEL ,  GARDNER RICHARD NEAL ,  PRICE JAMES M ,  NAYAK ADITYA B

IPC: G06F17/50 ,  G01J3/28 ,  G01N21/27 ,  G02B5/28 ,  G02B27/00 ,  H01L23/00

CPC classification number: G06F17/5081 ,  G01J3/28 ,  G01N21/211 ,  G01N21/8422 ,  G01N2021/8411 ,  G02B5/285 ,  G02B27/0012 ,  G06F17/5045 ,  G06F17/5068 ,  H01L2924/0002 ,  H01L2924/00

Abstract: Techniques include receiving a design of an integrated computational element (ICE) including (1) specification of a substrate and multiple layers, their respective target thicknesses and refractive indices, adjacent layer refractive indices being different from each other, and a notional ICE fabricated based on the ICE design being related to a characteristic of a sample, and (2) indication of target ICE performance; forming one or more of the layers of an ICE based on the ICE design; in response to determining that an ICE performance would not meet the target performance if the ICE having the formed layers were completed based on the received ICE design, updating the ICE design to a new total number of layers and new target layer thicknesses, such that performance of the ICE completed based on the updated ICE design meets the target performance; and forming some of subsequent layers based on the updated ICE design.

公开(公告)号：EP2948978A4

公开(公告)日：2015-12-16

申请号：EP14845029

申请日：2014-04-24

Applicant: HALLIBURTON ENERGY SERVICES INC

Inventor： PRICE JAMES M ,  NAYAK ADITYA B ,  PERKINS DAVID L

IPC: H01L21/67 ,  C23C14/48 ,  G01B11/06 ,  H01L21/285

CPC classification number: H01L21/265 ,  C23C14/0042 ,  C23C14/0641 ,  C23C14/16 ,  C23C14/18 ,  C23C14/221 ,  C23C14/48 ,  G01B11/0625 ,  G01B11/0683 ,  G02B5/285 ,  H01J37/3171 ,  H01L21/67213 ,  H01L21/67253 ,  H01L22/34

Abstract: Systems and methods of engineering the optical properties of an optical Integrated Computational Element device using ion implantation during fabrication are provided. A system as disclosed herein includes a chamber, a material source contained within the chamber, an ion source configured to provide a high-energy ion beam, a substrate holder to support a multilayer stack of materials that form the Integrated Computational Element device, a measurement system, and a computational unit. The material source provides a material layer to the multilayer stack, and at least a portion of the ion beam is deposited in the material layer according to an optical value provided by the measurement system.

公开(公告)号：EP3102716A4

公开(公告)日：2017-08-16

申请号：EP14891164

申请日：2014-05-08

Applicant: HALLIBURTON ENERGY SERVICES INC

Inventor： PRICE JAMES M ,  NAYAK ADITYA B ,  PERKINS DAVID L

IPC: C23C14/54 ,  C23C14/22 ,  C23C14/32 ,  G01B11/06 ,  G01N21/41 ,  G02B1/12 ,  G02B5/28

CPC classification number: C23C14/54 ,  C23C14/22 ,  C23C14/30 ,  C23C14/545 ,  C23C14/547 ,  G01B11/06 ,  G01N21/41 ,  G02B1/12 ,  G02B5/285

Abstract: Systems and methods of controlling a deposition rate during thin-film fabrication are provided. A system as provided may include a chamber, a material source contained within the chamber, an electrical component to activate the material source, a substrate holder to support the multilayer stack and at least one witness sample. The system may further include a measurement device and a computational unit. The material source provides a layer of material to the multilayer stack and to the witness sample at a deposition rate controlled at least partially by the electrical component and based on a correction value obtained in real-time by the computational unit. In some embodiments, the correction value is based on a measured value provided by the measurement device and a computed value provided by the computational unit according to a model.

Abstract translation: 提供了在薄膜制造期间控制沉积速率的系统和方法。 所提供的系统可以包括腔室，容纳在腔室内的材料源，激活材料源的电子部件，支撑多层叠堆的基板保持器以及至少一个见证样品。 该系统可以进一步包括测量装置和计算单元。 材料源以至少部分地由电气部件控制的沉积速率并且基于由计算单元实时获得的校正值向多层叠堆和证据样品提供材料层。 在一些实施例中，校正值基于由测量装置提供的测量值和由计算单元根据模型提供的计算值。

公开(公告)号：EP2917486A4

公开(公告)日：2016-07-06

申请号：EP13896847

申请日：2013-12-18

Applicant: HALLIBURTON ENERGY SERVICES INC

Inventor： PRICE JAMES M ,  PERKINS DAVID L ,  ATKINSON ROBERT

IPC: E21B49/10 ,  G01N21/21 ,  G01N21/25 ,  G01N21/65 ,  G01N21/84

CPC classification number: G01N21/8422 ,  C23C14/54 ,  C23C16/52 ,  E21B49/08 ,  G01N21/211 ,  G01N21/65 ,  G01N23/207 ,  G01N2021/213 ,  G01N2021/8416 ,  G01N2021/8438 ,  G01N2223/615 ,  G01V8/10

公开(公告)号：EP3030881A4

公开(公告)日：2017-08-23

申请号：EP13895463

申请日：2013-10-16

Applicant: HALLIBURTON ENERGY SERVICES INC

Inventor： PRICE JAMES M ,  PERKINS DAVID L

IPC: G01J4/02 ,  G01N21/21 ,  G02B1/02

CPC classification number: G01V8/20 ,  E21B49/081 ,  G01J4/02 ,  G01N21/21 ,  G01N2201/0683 ,  G01N2201/12 ,  G02B1/02 ,  G02B5/3025

公开(公告)号：EP2946197A4

公开(公告)日：2016-12-21

申请号：EP14824758

申请日：2014-02-14

Applicant: HALLIBURTON ENERGY SERVICES INC

Inventor： PRICE JAMES M ,  NAYAK ADITYA B ,  PERKINS DAVID L

IPC: G01N21/41 ,  B29D11/00 ,  E21B49/00 ,  G01B11/06 ,  G01J3/28 ,  G01N21/31 ,  G01N21/84 ,  G02B5/28 ,  G05B19/4099

CPC classification number: G05B19/4099 ,  B29D11/0073 ,  B32B3/266 ,  B32B2307/40 ,  B32B2307/418 ,  B32B2307/732 ,  B32B2551/00 ,  G01J3/28 ,  G01N21/31 ,  G01N21/8422 ,  G01N2021/8438 ,  G02B5/285 ,  G02B5/287 ,  G05B2219/49023

Abstract: Technologies are described for monitoring characteristics of layers of integrated computational elements (ICEs) during fabrication using an in-situ spectrometer operated in step-scan mode in combination with lock-in or time-gated detection. As part of the step-scan mode, a wavelength selecting element of the spectrometer is discretely scanned to provide spectrally different instances of probe-light, such that each of the spectrally different instances of the probe-light is provided for a finite time interval. Additionally, an instance of the probe-light interacted during the finite time interval with the ICE layers includes a modulation that is being detected by the lock-in or time-gated detection over the finite time interval.

Abstract translation: 描述了用于在使用以逐步扫描模式操作的原位光谱仪结合锁定或时间门控检测在制造期间监测集成计算元件（ICE）层的特性的技术。 作为步进扫描模式的一部分，离散地扫描光谱仪的波长选择元件以提供光谱不同的探测光的实例，使得探针光的每个光谱不同的实例被提供有限的时间间隔。 另外，在与ICE层的有限时间间隔期间相互作用的探测光的实例包括在有限时间间隔内通过锁定或时间门控检测来检测的调制。

公开(公告)号：EP2901135A4

公开(公告)日：2015-08-05

申请号：EP13884957

申请日：2013-12-24

Applicant: HALLIBURTON ENERGY SERVICES INC

Inventor： PRICE JAMES M ,  NAYAK ADITYA B ,  PERKINS DAVID L

IPC: G01N21/17 ,  C23C14/54 ,  C23C14/56 ,  G01N21/84 ,  G02B5/28 ,  G02B27/00

CPC classification number: G01V13/00 ,  C23C14/505 ,  C23C14/52 ,  C23C14/547 ,  C23C14/548 ,  G01B11/0625 ,  G01B11/0683 ,  G01N21/211 ,  G01N21/27 ,  G01N21/59 ,  G01N21/8422 ,  G01N2201/0683 ,  G01N2201/12 ,  G01V8/12 ,  G02B5/285

公开(公告)号：EP3146292A4

公开(公告)日：2018-01-17

申请号：EP14898763

申请日：2014-07-30

Applicant: HALLIBURTON ENERGY SERVICES INC

Inventor： PRICE JAMES M ,  PERKINS DAVID L ,  ATKINSON ROBERT ,  GAO LI

IPC: G01B17/02 ,  G01B11/06 ,  G01N21/21 ,  G01N21/84 ,  G01N29/04 ,  G01N29/24 ,  G01N29/46

CPC classification number: G01B17/02 ,  G01B11/06 ,  G01B17/025 ,  G01N21/211 ,  G01N21/84 ,  G01N29/043 ,  G01N29/2418 ,  G01N29/2462 ,  G01N29/46 ,  G01N2291/0237 ,  G01N2291/02854 ,  G01N2291/0423

Abstract: Systems and methods of in-situ measuring the physical properties of an integrated computational element (ICE) device using surface acoustic wave (SAW) spectroscopy during fabrication are provided. The system includes a measurement device having a pump source providing an excitation pulse generating a SAW on the outer surface of the ICE. The system provides a probe radiation to be interacted with the outer surface of the ICE device and to form an interacted radiation, and an optical transducer configured to receive the interacted radiation and form a signal. An analyzer receives the signal from the optical transducer and determines a property of a material layer on the outer surface of the ICE device, and a second measurement device using at least one of optical monitoring, ellipsometry, and optical spectroscopy, is configured to measure a second property in the ICE device.

公开(公告)号：EP3058433A4

公开(公告)日：2017-08-02

申请号：EP13899927

申请日：2013-12-18

Applicant: HALLIBURTON ENERGY SERVICES INC

Inventor： PERKINS DAVID L ,  GAO LI ,  PRICE JAMES M

IPC: G06E3/00 ,  G01J3/02 ,  G01J3/12 ,  G01J3/26 ,  G01J3/42 ,  G01N21/31 ,  G01N21/59 ,  G01N21/64 ,  G01N33/28 ,  H01L31/0352

CPC classification number: G01N33/2823 ,  G01J3/0205 ,  G01J3/12 ,  G01J3/26 ,  G01J3/42 ,  G01J2003/1213 ,  G01J2003/1282 ,  G01N21/31 ,  G01N21/64 ,  G06E3/00 ,  H01L31/0352

Abstract: An optical computing device including a detector having a non-planar semiconductor structure is provided. The detector may include one or more structures having structure characteristics that may be optimized to respond to and weight predetermined wavelengths of light radiated from a sample that are related to characteristics of the sample. The detector may include an array of the one or more structures, wherein each of the structure units may be individually addressable to program or tune the detector to respond to and weight a spectra of light and generate an output signal based on the weighted spectra of light that is proportional to the characteristics of the sample.

Abstract translation: 提供了一种包括具有非平面半导体结构的检测器的光学计算装置。 检测器可以包括具有结构特征的一个或多个结构，所述结构特征可以被优化以对与样本的特征相关的样本辐射的光的预定波长做出响应并对其加权。 检测器可以包括一个或多个结构的阵列，其中每个结构单元可以是可单独编址的，以编程或调谐检测器以响应光并对光谱进行加权并基于光的加权光谱生成输出信号 这与样本的特征成正比。

公开(公告)号：EP3055645A4

公开(公告)日：2016-10-05

申请号：EP13897690

申请日：2013-12-23

Applicant: HALLIBURTON ENERGY SERVICES INC

Inventor： NAYAK ADITYA B ,  PRICE JAMES M ,  PERKINS DAVID L

IPC: G01B11/06 ,  E21B49/00 ,  G01N21/27 ,  G01N21/41

CPC classification number: C23C14/547 ,  C23C14/14 ,  C23C14/30 ,  E21B49/08 ,  G01B11/0625 ,  G01B11/0683 ,  G01N21/25 ,  G01N21/41 ,  G01N21/8422 ,  G01N33/28 ,  G01N2021/4126 ,  G02B1/10 ,  G02B5/285