公开(公告)号：EP1615297A4

公开(公告)日：2007-11-28

申请号：EP04725789

申请日：2004-04-05

Applicant: JSR CORP

Inventor： SATO KATSUMI ,  INOUE KAZUO

IPC: H01R11/01 ,  G01R1/073 ,  H01L21/66 ,  H01L23/498 ,  H01R13/24

CPC classification number: H01R13/2414 ,  G01R1/0735 ,  H01L23/49827 ,  H01L23/49838 ,  H01L2924/0002 ,  H01L2924/00

Abstract: An anisotropic conductive connector that enables a predetermined electrical inspection on a circuit device whose clock frequency is, for example, more than 1 GHz, and a circuit-device electrical-inspection device having the anisotropic conductive connector are provided. The anisotropic conductive connector is equipped with an elastic anisotropic-conductive film. The film includes a plurality of connecting conductive parts disposed in accordance with the pattern corresponding to an electrode to be connected to the pattern and extending toward the direction of the thickness, and insulating parts for insulating the connecting conductive parts from each other. The anisotropic conductive connector is characterized in that within the elastic, anisotropic-conductive film, a conductive part for high-frequency shielding extends toward the direction of thickness. The circuit-device electrical-inspection device is characterized by comprising such an anisotropic conductive connector.

公开(公告)号：EP1548884A4

公开(公告)日：2007-05-09

申请号：EP03791285

申请日：2003-08-26

Applicant: JSR CORP

Inventor： INOUE KAZUO ,  SATO KATSUMI

IPC: H01L23/498 ,  H01L23/60 ,  H01R11/01 ,  G01R1/06 ,  H01L21/66

CPC classification number: H01L23/49827 ,  H01L23/60 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01L2924/00

Abstract: An anisotropic conductive sheet not contaminating an object to be connected, not adhering to the object even if the sheet pressed by the object is left for a long time in a high-temperature environment, and preventing the sheet from being charged or suppressing the charging, and eliminating adverse influence of static electricity, its manufacturing method, and its application are disclosed. The anisotropic conductive sheet (10) comprises an anisotropic conductive sheet body (11) made of an elastic polymer material, having conductive portions (12) extending in the direction of thickness and insulating portions (13) insulating the conductive portions (12) from one another and a DLC film (15) provided on one or both sides of the anisotropic conductive sheet body (11) and so integrally formed as to cover at least the insulating portions.

公开(公告)号：EP1732120A4

公开(公告)日：2012-02-29

申请号：EP05727781

申请日：2005-03-30

Applicant: JSR CORP

Inventor： IGARASHI HISAO ,  SATO KATSUMI ,  INOUE KAZUO

IPC: H01L21/66 ,  G01R1/06 ,  G01R1/073 ,  G01R31/28

CPC classification number: G01R1/07364 ,  G01R1/07314 ,  G01R1/07371 ,  G01R1/07378

公开(公告)号：EP1744167A4

公开(公告)日：2012-02-29

申请号：EP05737142

申请日：2005-04-26

Applicant: JSR CORP

Inventor： SATO KATSUMI ,  INOUE KAZUO ,  FUJIYAMA HITOSHI ,  YOSHIOKA MUTSUHIKO ,  IGARASHI HISAO

IPC: A63H31/08 ,  G01R1/06 ,  A63H17/045 ,  A63H29/22 ,  A63H30/00 ,  A63H30/04 ,  A63H31/00 ,  B60K17/16 ,  F16H1/14 ,  F16H1/20 ,  F16H1/28 ,  F16H48/08 ,  G01R1/067 ,  G01R1/073 ,  G01R3/00 ,  G01R31/26 ,  H01L21/06 ,  H01L21/66 ,  H01L51/50 ,  H05B33/14

CPC classification number: A63H29/22 ,  A63H30/04 ,  A63H31/00 ,  F16H48/08 ,  G01R1/06711 ,  G01R1/0735 ,  G01R3/00 ,  H01L51/5012 ,  H05B33/14 ,  Y10T29/49155

公开(公告)号：EP1608040A4

公开(公告)日：2007-11-14

申请号：EP04722670

申请日：2004-03-23

Applicant: JSR CORP

Inventor： IGARASHI HISAO ,  SATO KATSUMI ,  INOUE KAZUO

IPC: G01R1/073 ,  H01L23/498 ,  H01R13/24 ,  H01R11/01 ,  G01R1/06 ,  H01B1/22 ,  H01B5/00 ,  H01B5/16 ,  H01L21/66

CPC classification number: G01R1/0735 ,  H01L23/49827 ,  H01L2924/0002 ,  H01R13/2414 ,  H01L2924/00

Abstract: An anisotropic conductive connector is disclosed which can maintain good conductive properties for a long time in a case where the connector is repeatedly used many times in electrical inspections of integrated circuits formed on a wafer. The anisotropic conductive connector has a high durability and a long life. Applications of such an anisotropic conductive connector are also disclosed. The anisotropic conductive connector comprising an elastic anisotropic conductive film that is provided with a plurality of conductive parts for connection which contain conductive particles and extend in the thickness direction is characterized in that each conductive particle contained in the conductive parts for connection is formed by covering the surface of a magnetic core particle with a coating layer composed of a highly conductive metal, and in that the coating layer has a high hardness.

公开(公告)号：EP1624309A4

公开(公告)日：2006-05-31

申请号：EP04732418

申请日：2004-05-12

Applicant: JSR CORP

Inventor： INOUE KAZUO ,  SATO KATSUMI

IPC: G01R1/073 ,  G01R3/00

CPC classification number: G01R1/0735 ,  G01R3/00

Abstract: A sheet-like probe in which positional deviation between an electrode structure and an electrode under test due to temperature variation can be prevented surely in burn-in test even when a large area wafer having a diameter of 8 inch or larger or a circuit device where the electrode under test has an extremely small pitch is inspected, and thereby good electrical connection can be sustained stably. Its production process and application are also provided. In the sheet-like probe, a plurality of electrode structures, having surface electrode parts exposed to the surface and rear surface electrode parts exposed to the rear surface while being arranged according to a pattern corresponding to the electrodes being connected, comprise a contact film held by an insulating film of soft resin and a frame plate supporting that contact film.

Abstract translation: 本文公开了一种片状探针，即使当检查对象是8英寸以上的大面积的晶片时，能够防止在老化试验中的温度变化来检查电极结构和电极之间的位置偏移的片状探针 直径或电路器件，其检查的电极的间距极小，因此能够稳定地保持良好的电连接状态及其制造方法和应用。 本发明的片状探针包括通过保持根据与要连接的各个电极相对应的图案布置的多个电极结构而获得的接触膜，并且具有暴露于前表面和背面的前表面电极部分 通过由柔性树脂构成的绝缘膜暴露于背面的表面电极部分和支撑接触膜的框架板。

公开(公告)号：EP1640729A4

公开(公告)日：2010-06-16

申请号：EP04745480

申请日：2004-06-01

Applicant: JSR CORP

Inventor： IGARASHI HISAO ,  SATO KATSUMI ,  INOUE KAZUO

IPC: G01R1/073 ,  H01L21/66 ,  H01R4/04 ,  H01R11/01

CPC classification number: G01R1/0735 ,  G01R1/07378 ,  H01R4/04 ,  H01R12/52

公开(公告)号：EP1503216A4

公开(公告)日：2008-03-26

申请号：EP03758872

申请日：2003-10-24

Applicant: JSR CORP

Inventor： SATO KATSUMI ,  INOUE KAZUO

IPC: G01R31/02 ,  G01R1/06 ,  G01R1/067 ,  G01R1/073 ,  G01R31/28 ,  H01B5/16 ,  H01L21/66 ,  H01L23/498 ,  H01R11/01 ,  H01R33/76 ,  H05K1/11 ,  H05K3/40 ,  H05K3/42

CPC classification number: G01R1/07314 ,  G01R1/06711 ,  G01R1/06733 ,  H01L23/49811 ,  H01L23/49827 ,  H01L2924/0002 ,  H01L2924/09701 ,  H01R11/01 ,  H01R12/523 ,  H05K1/116 ,  H05K3/4007 ,  H05K3/423 ,  H05K2201/0367 ,  H05K2201/0394 ,  H05K2201/09436 ,  H05K2201/09481 ,  H05K2203/0733 ,  H01L2924/00

Abstract: A sheet-form connector capable of forming an electrode structure having a small-diameter surface electrode unit, positively attaining a stable electric connection condition for a circuit device having electrodes formed at a small pitch, and providing a high durability without the electrode structure coming off an insulating sheet; and a production method and an application therefore. The sheet-form connector comprises an insulating sheet and a plurality of electrode structures provided to the insulating sheet to extend through the sheet in its thickness direction, wherein each of the electrode structures comprises a surface electrode part exposed to and protruding from the surface of the insulating sheet, a rear electrode part exposed to the rear surface of the insulating sheet, a shorting part extending continuously from the base end of the surface electrode part through the insulating sheet in its thickness direction until connected to the rear electrode part, and a holding part extending continuously from the base end of the surface electrode part along the surface of the insulating sheet toward the outer side.

公开(公告)号：EP1553623A4

公开(公告)日：2006-05-24

申请号：EP03784570

申请日：2003-08-07

Applicant: JSR CORP

Inventor： SETAKA RYOJI ,  NAOI MASAYA ,  SATO KATSUMI

IPC: H01L21/66 ,  G01R1/067 ,  G01R1/073 ,  G01R3/00 ,  G01R15/18 ,  G01R31/28 ,  H01L23/498 ,  H01R13/24

CPC classification number: G01R1/06711 ,  G01R1/06755 ,  G01R1/07314 ,  G01R3/00 ,  G01R31/2889 ,  H01L2924/0002 ,  H01R12/714 ,  H01R13/2414 ,  H01L2924/00

Abstract: An anisotropic conductivity connector wherein the favorable conductivity can be maintained for a long term even if the connector is used repetitively many times or even if the connector is used repetitively in a high-temperature environment. The anisotropic conductivity connector comprises elastic anisotropic conductive films having connection conductive sections extending in the direction of thickness. Each elastic anisotropic conductive film has an initial characteristic such that, letting the electric resistance of the connection conductive sections measured when a load Yx1g is exerted on the elastic anisotropic conductive film in the thickness direction where Y is a total number of connection conductive films be R1g, and letting the electric resistance of the connection conductive sections measured when a load Yx6g is exerted on the elastic anisotropic conductive film in the thickness direction be R6g, the number of connection conductive sections having the electric resistance R1g of below 1ohm is 90% or more of the total number of connection conductive sections, the number of connection conductive sections having the electric resistance R6g of below 0.1ohm is 95% or more of the total number of connection conductive sections, and the number of connection conductive sections having the electric resistance R6g of 0.5 ohm or more is 1% or less of the total number of connection conductive sections.