MEMBER CONTACTING CHEMICAL LIQUID FOR SEMICONDUCTOR PRODUCT MANUFACTURE WHEN CHEMICAL LIQUID IS CAUSED TO FLOW

    公开(公告)号:EP3549885A1

    公开(公告)日:2019-10-09

    申请号:EP17876432.0

    申请日:2017-11-30

    摘要: The purpose of the present invention is to provide: a member which contacts liquid, gas, or powder insulating material when the insulating material is caused to flow and which is less susceptible to dielectric breakdown; a distribution mechanism, tank, and device using a sheet for lining the member or the inside of a pipe or a tank containing the member; a storage tank wherein a portion of the surface of a liquid-contact portion thereof comprises the member; a storage method for storing organic solvent, ultrapure water, and hydrogen peroxide water, particularly organic solvent, ultrapure water, and hydrogen peroxide water used in semiconductor product manufacture, using the storage tanks; and a method for manufacturing a semiconductor product using the organic solvent stored in the storage tank. A resin composition containing a matrix resin and an electro-conductive material dispersed in the matrix resin is used for the member which contacts liquid, gas, or powder insulating material when the insulating material is caused to flow.