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1.发明公开
公开(公告)号：EP1278056A4
公开(公告)日：2005-07-27
申请号：EP01970309
申请日：2001-09-28
发明人： NAKAYAMA YOSHIKAZU , AKITA SEIJI , HARADA AKIO , OKAWA TAKASHI , TAKANO YUICHI , YASUTAKE MASATOSHI , SHIRAKAWABE YOSHIHARU
摘要： A nanotube probe for a scanning microscope, the quality of the material of which is improved by fixing and cutting a the nanotube probe and by implanting ions of another element. The nanotube probe produced by a focused ion beam and used for collecting physical information on the surface of a specimen by means of the tip point (14a) of the nanotube probe (12) fixed to a cantilever (4) is characterized in that an organic gas (G) is decomposed by an ion beam (I) in a focused ion beam apparatus (2), and the nanotube (12) is fixed to the cantilever (4) with the deposit (18) of a produced decomposition component. The material of the nanotube probe is improved by removing unnecessary deposit (24) adhering to the tip (14) of the nanotube by using a focused ion beam, cutting the unnecessary portion of the nanotube so as to control the length of the nanotube probe, or implanting ions into the tip (14) of the nanotube.
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2.发明公开ELECTRONIC DEVICE SURFACE SIGNAL CONTROL PROBE AND METHOD OF MANUFACTURING THE PROBE 有权电子设备的表面信号命令probe及其制备方法
公开(公告)号：EP1054249A4
公开(公告)日：2003-07-23
申请号：EP99973122
申请日：1999-11-12
发明人： NAKAYAMA YOSHIKAZU , AKITA SEIJI , HARADA AKIO
IPC分类号： G01Q70/12 , B23Q17/09 , C01B31/02 , G01B5/28 , G01B7/34 , G01B21/30 , G01N1/04 , G01N13/00 , G01N19/02 , G01N21/75 , G01Q10/00 , G01Q60/16 , G01Q60/38 , G01Q60/54 , G01Q70/16 , G11B5/127 , G21G5/00 , G21K7/00
CPC分类号： G01Q60/16 , G01Q60/38 , G01Q60/54 , G01Q70/12 , Y10S977/869 , Y10S977/873 , Y10S977/876
摘要： A surface signal control probe high in resolution, rigidity, and bending elasticity which can be used for a scanning probe microscope and a highly accurate surface signal control probe for inputting and outputting signals which can be used for a high density magnetic information processing device, comprising a nanotube (24) small in tip curvature radius and high in rigidity and bending elasticity, a holder (2a) holding the nanotube (24), and a fixing means fixing the base part (24b) of the nanotube to the surface of the holder with the tip part (24a) of the nanotube (24) projecting from the holder, wherein the tip part (24a) of the nanotube is used as a probe and the fixing means is formed of a coating film (29) covering the base part (24b) of the nanotube (24) and a fused part where the base part (24b) is fused to the surface of the holder.
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公开(公告)号：EP1193216A4
公开(公告)日：2006-06-07
申请号：EP01912179
申请日：2001-03-08
发明人： NAKAYAMA YOSHIKAZU , AKITA SEIJI , HARADA AKIO , OKAWA TAKASHI
IPC分类号： B25J7/00 , B81B3/00 , B81B7/00 , B82B3/00 , G01Q30/20 , G01Q70/00 , G01Q70/12 , G01Q70/14 , G01Q80/00 , B82B1/00
CPC分类号： B25J7/00 , B81B2201/032 , B81B2201/12 , B81B2203/0118 , B81C99/002 , B82B3/00 , B82Y30/00 , B82Y40/00 , G01Q80/00 , Y10S977/732 , Y10S977/734 , Y10S977/742 , Y10S977/778 , Y10S977/78 , Y10S977/837 , Y10S977/842 , Y10S977/858 , Y10S977/863 , Y10S977/875 , Y10S977/876 , Y10S977/89 , Y10S977/901 , Y10S977/962
摘要： To provide nanotweezers and a nanomanipulator which allow great miniaturization of the component and are capable of gripping various types of nano-substances such as insulators, semiconductors and conductors and of gripping nano-substances of various shapes. Electrostatic nanotweezers 2 are characterized in that the nanotweezers 2 are comprised of a plurality of nanotubes whose base end portions are fastened to a holder 6 so that the nanotubes protrude from the holder 6, coating films which insulate and cover the surfaces of the nanotubes, and lead wires 10, 10 which are connected to two of the nanotubes 8, 9; and the tip ends of the two nanotubes are freely opened and closed by means of an electrostatic attractive force generated by applying a voltage across these lead wires. Furthermore, by way of forming a piezo-electric film 32 on the surface of the nanotube 9, and the tip ends of the nanotubes are freely opened and closed by expanding and contracting the piezo-electric film, thus allowing any desired nano-substances to be handled regardless of whether the nano-substances are insulators, semiconductors or conductors. Furthermore, if by way of designing three nanotubes so as to be freely opened and closed by an electrostatic system, nano-substances of various shapes such as spherical, rod-form, etc.
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5.发明公开CONDUCTIVE PROBE FOR SCANNING MICROSCOPE AND MACHINING METHOD USING THE SAME 审中-公开LEITFÄHIGESONDEFÜREIN ABTASTMIKROSKOP UND BEARBEITUNGSVERFAHREN DAMIT
公开(公告)号：EP1336835A4
公开(公告)日：2005-03-16
申请号：EP01972624
申请日：2001-09-28
发明人： NAKAYAMA YOSHIKAZU , AKITA SEIJI , HARADA AKIO , OKAWA TAKASHI , TAKANO YUICHI , YASUTAKE M , SHIRAKAWABE Y
IPC分类号： B82B1/00 , B82B3/00 , G01Q60/16 , G01Q60/38 , G01Q60/40 , G01Q70/00 , G01Q70/12 , G01N13/12 , G12B21/02 , G12B21/04
摘要： A conductive probe for a scanning microscope capable of applying a voltage between a conductive nanotube serving as a probe and a specimen or a current to them. A conductive probe (20) for a scanning microscope for collecting physical properties of the surface of a specimen by means of the tip (14a) of a conductive nanotube probe (12) fixed to a cantilever (4) is characterized in that the conductive probe (20) is composed of a conductive coating (17) provided on the surface of the cantilever (4), a conductive nanotube (12) the root part (16) of which is provided in contact with the surface of the necessary portion of the cantilever (4), and a conductive deposit (18) covering from the root part (16) to a part of the conductive coating (17) and fixing the conductive nanotube (12), and the conductive nanotube (12) is electrically connected to the conductive coating (17) through the conductive deposit (18).
摘要翻译： 一种用于扫描型显微镜的导电探针，其通过固定到悬臂的导电性纳米管探针的尖端捕获试样表面的物质信息，其中导电探针由形成在表面上的导电膜构成 所述悬臂是其基端部固定成导电的非导管，其中预定悬臂的表面是接触的，以及导电沉积物，其通过从非管形管的基端部分覆盖到导电的一部分 电影。 导电非导体和导电膜通过导电沉积物彼此电连接。
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6.发明公开CANTILEVER FOR VERTICAL SCANNING MICROSCOPE AND PROBE FOR VERTICAL SCAN MICROSCOPE USING IT 审中-公开悬臂式垂直扫描显微镜和探针垂直扫描显微镜SO
公开(公告)号：EP1278055A4
公开(公告)日：2005-03-02
申请号：EP01970308
申请日：2001-09-28
发明人： NAKAYAMA YOSHIKAZU , AKITA SEIJI , HARADA AKIO , OKAWA TAKASHI , TAKANO YUICHI , YASUTAKE MASATOSHI , SHIRAKAWABE YOSHIHARU
IPC分类号： G01Q60/16 , G01Q60/32 , G01Q60/38 , G01Q70/10 , G01Q70/12 , G01N13/16 , G12B21/02 , G12B21/08
摘要： A probe for vertical scanning microscope in which the forward end of a nanotube, serving as a probe, abuts against the sample surface substantially perpendicularly thereto and detects the surface information of the sample with high sensitivity. The inventive probe for vertical scanning microscope is characterized in that a cantilever 2 is provided with a fixing region for bonding the base end part 14 of a nanotube 12 in a probe 20 for scanning microscope which obtains the physical information of the sample surface 24 at the forward end of a nanotube bonded to the cantilever 2, height direction of the fixing region is substantially perpendicular to the mean sample surface 26 when the cantilever 2 is set in the measuring state with respect to the mean sample surface 26 and the base end part 14 of the nanotube 12 is bonded in the height direction of the fixing region.
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