公开(公告)号：EP1867687A4

公开(公告)日：2009-06-03

申请号：EP06729340

申请日：2006-03-17

申请人： ULVAC INC ,  NAT INST OF ADVANCED IND SCIEN ,  MITSUI CHEMICALS INC

发明人： FUJII NOBUTOSHI ,  NAKAYAMA TAKAHIRO ,  KANAYAMA TOSHIHIKO ,  KOHMURA KAZUO ,  TANAKA HIROFUMI

IPC分类号： C09D7/12 ,  C09D183/00 ,  H01L21/316

CPC分类号： C09D183/04 ,  C08K3/02 ,  C09D7/61 ,  H01L21/02126 ,  H01L21/02142 ,  H01L21/02203 ,  H01L21/02282 ,  H01L21/02337 ,  H01L21/31695 ,  Y10T428/249953

摘要： A precursor composition for porous film comprising at least one member selected from the group consisting of compounds represented by the following general formulas: Si(OR 1 ) 4 and R a (Si)(OR 2 ) 4-a (in the formulas, R 1 represents a monovalent organic group; R represents a hydrogen atom, a fluorine atom or a monovalent organic group; R 2 represents a monovalent organic group; a is an integer ranging from 1 to 3, provided that R, R 1 and R 2 may be the same or different); a heat decomposable organic compound capable of being thermally decomposed at a temperature of not less than 250°C; and at least one element selected from the group consisting of elements each having a catalytic action, and organic solvent. A hydrophobic compound is subjected to a gas-phase polymerization reaction in the presence of a solution of this precursor composition to thus form a hydrophobic porous film having a low dielectric constant, a low refractive index and high mechanical strength. A semiconductor device prepared using the porous film.

公开(公告)号：EP2806454A4

公开(公告)日：2015-09-09

申请号：EP13738470

申请日：2013-01-16

申请人： MITSUI CHEMICALS INC

发明人： ONO SHOKO ,  KAYABA YASUHISA ,  TANAKA HIROFUMI ,  KOHMURA KAZUO ,  SUZUKI TSUNEJI ,  MIO SHIGERU

IPC分类号： H01L21/312 ,  C08G73/02 ,  C08G73/04 ,  C09J179/02 ,  C09K3/10 ,  H01L21/02 ,  H01L21/56 ,  H01L21/768 ,  H01L23/29 ,  H01L23/31 ,  H01L23/532

CPC分类号： C08G73/0206 ,  C08G73/0213 ,  C08G73/0226 ,  C08G2190/00 ,  C09J179/02 ,  C09K3/1006 ,  C09K2003/1087 ,  H01L21/02118 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02282 ,  H01L21/02304 ,  H01L21/02362 ,  H01L21/56 ,  H01L23/293 ,  H01L23/5329 ,  H01L2924/0002 ,  Y10T428/2982 ,  H01L2924/00

公开(公告)号：EP3159917A4

公开(公告)日：2018-03-07

申请号：EP15830221

申请日：2015-08-05

申请人： MITSUI CHEMICALS INC

发明人： KAYABA YASUHISA ,  TANAKA HIROFUMI ,  ONO SHOKO ,  INOUE KOJI ,  WACHI HIROKO ,  SUZUKI TSUNEJI

IPC分类号： H01L21/3105 ,  H01L21/312 ,  H01L21/768

CPC分类号： H01L21/02082 ,  C08L79/00 ,  C09D157/06 ,  H01L21/02104 ,  H01L21/02118 ,  H01L21/3105 ,  H01L23/532 ,  H01L2924/0002 ,  H01L2924/00

摘要： The invention provides a sealing composition including: polymer (A) containing a cationic functional group and having a weight average molecular weight of from 2,000 to 1,000,000; and a benzotriazole compound; in which the content of the polymer (A) is from 0.05 parts by mass to 0.20 parts by mass with respect to 100 parts by mass of the sealing composition; in which the content of the benzotriazole compound in the sealing composition is from 3 ppm by mass to 200 ppm by mass; and in which the sealing composition has a pH of from 3.0 to 6.5.

公开(公告)号：EP2978011A4

公开(公告)日：2016-10-19

申请号：EP14773360

申请日：2014-03-11

申请人： MITSUI CHEMICALS INC

发明人： KAYABA YASUHISA ,  ONO SHOKO ,  TANAKA HIROFUMI ,  SUZUKI TSUNEJI ,  MIO SHIGERU ,  KOHMURA KAZUO

IPC分类号： H01L21/312 ,  C08G73/02 ,  C08K5/09 ,  C08L79/02 ,  H01L21/768

CPC分类号： H01L23/293 ,  C08G73/0206 ,  C08K5/0091 ,  C08L79/02 ,  C09J179/04 ,  H01L21/0206 ,  H01L21/02118 ,  H01L21/02282 ,  H01L21/56 ,  H01L23/528 ,  H01L23/53209 ,  H01L23/5329 ,  H01L2924/0002 ,  H01L2924/00

摘要： Provided is a method for manufacturing a composite body, the method containing: a composition preparation process of preparing a composition that contains a polymer having a cationic functional group and having a weight average molecular weight of from 2,000 to 1,000,000, and that has a pH of from 2.0 to 11.0; a composite member preparation process of preparing a composite member that includes a member A and a member B, a surface of the member B having an isoelectric point that is lower than an isoelectric point of a surface of the member A by 2.0 or more and the isoelectric point of the member B being from 1.0 to 7.5, and that satisfies a relationship: the isoelectric point of a surface of the member B

公开(公告)号：EP2876675A4

公开(公告)日：2016-06-15

申请号：EP13819549

申请日：2013-07-12

申请人： MITSUI CHEMICALS INC

发明人： ONO SHOKO ,  KAYABA YASUHISA ,  TANAKA HIROFUMI ,  KOHMURA KAZUO ,  SUZUKI TSUNEJI

IPC分类号： H01L21/3105 ,  C08G73/02 ,  C09D179/02 ,  H01L21/311 ,  H01L21/312 ,  H01L21/768

CPC分类号： H01L23/293 ,  C08G73/0206 ,  C09D179/02 ,  C09K13/00 ,  H01L21/02063 ,  H01L21/02093 ,  H01L21/02118 ,  H01L21/02164 ,  H01L21/02203 ,  H01L21/02282 ,  H01L21/02334 ,  H01L21/02343 ,  H01L21/02362 ,  H01L21/3105 ,  H01L21/31058 ,  H01L21/31133 ,  H01L21/56 ,  H01L21/76831 ,  H01L23/3185 ,  H01L23/53228 ,  H01L2924/0002 ,  H01L2924/00

公开(公告)号：EP2615635A4

公开(公告)日：2014-12-31

申请号：EP11823646

申请日：2011-09-08

申请人： MITSUI CHEMICALS INC

发明人： ONO SHOKO ,  KOHMURA KAZUO ,  TANAKA HIROFUMI

IPC分类号： H01L21/312 ,  C09K3/10 ,  H01L21/02 ,  H01L21/304 ,  H01L21/308 ,  H01L21/3105 ,  H01L21/768 ,  H01L23/522

CPC分类号： H01L21/02334 ,  C09K3/1006 ,  C09K2200/0645 ,  H01L21/02063 ,  H01L21/02087 ,  H01L21/0209 ,  H01L21/02203 ,  H01L21/3105 ,  H01L21/76826 ,  H01L21/76831 ,  H01L23/5329 ,  H01L23/53295 ,  H01L2924/0002 ,  H01L2924/00

公开(公告)号：EP1855313A4

公开(公告)日：2011-09-28

申请号：EP06713744

申请日：2006-02-15

申请人： ULVAC INC ,  TOKYO ELECTRON LTD

发明人： FUJII NOBUTOSHI ,  KOHMURA KAZUO ,  MIYOSHI HIDENORI ,  TANAKA HIROFUMI ,  OIKE SHUNSUKE ,  MURAKAMI MASAMI ,  KUBOTA TAKESHI ,  KURANO YOSHITO

IPC分类号： H01L21/316 ,  C01B33/12 ,  H01L21/768 ,  H01L23/522

CPC分类号： H01L21/76826 ,  C01B33/12 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02214 ,  H01L21/02282 ,  H01L21/02337 ,  H01L21/31608 ,  H01L21/31695 ,  Y10T428/249994

公开(公告)号：EP2025709A4

公开(公告)日：2010-03-24

申请号：EP07743462

申请日：2007-05-16

申请人： ULVAC INC

发明人： FUJII NOBUTOSHI ,  NAKAYAMA TAKAHIRO ,  KOHMURA KAZUO ,  TANAKA HIROFUMI

IPC分类号： C08J9/36 ,  C08G77/18 ,  C09D5/25 ,  C09D7/12 ,  C09D183/04 ,  H01L21/312 ,  H01L21/316

CPC分类号： C09D183/04 ,  C08G77/04 ,  C08G77/56 ,  C08G77/58 ,  C09D183/14 ,  H01L21/02126 ,  H01L21/02203 ,  H01L21/02216 ,  H01L21/02282 ,  H01L21/02337 ,  H01L21/02348 ,  H01L21/3122 ,  H01L21/31695 ,  Y10T428/249921 ,  Y10T428/249953