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    PIEZOELECTRIC ACTUATOR, INKJET HEAD, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR
    4.
    发明公开
    PIEZOELECTRIC ACTUATOR, INKJET HEAD, AND METHOD FOR MANUFACTURING PIEZOELECTRIC ACTUATOR 审中-公开
    PIEZOELEKTRISCHER AKTUATOR，TINTENSTRAHLKOPF UND HERSTELLUNGSVERFAHRENFÜREINEN PIEZOELEKTRISCHEN AKTUATOR

    公开(公告)号：EP2833423A4

    公开(公告)日：2017-09-27

    申请号：EP13770253

    申请日：2013-03-29

    Applicant: KYOCERA CORP

    Inventor： IWASHITA SHUZO

    IPC: H01L41/09 ,  B41J2/045 ,  B41J2/055 ,  B41J2/16 ,  H01L41/187 ,  H01L41/22

    CPC classification number: B41J2/14201 ,  B41J2/14233 ,  B41J2002/14491 ,  C04B35/493 ,  C04B2235/32 ,  C04B2235/3213 ,  C04B2235/3215 ,  C04B2235/3279 ,  C04B2235/3284 ,  C04B2235/3294 ,  C04B2235/96 ,  H01L41/0973 ,  H01L41/18 ,  H01L41/1871 ,  H01L41/1875 ,  H01L41/1876 ,  H01L41/25 ,  H01L41/253 ,  H01L41/313 ,  Y10T29/42

    Abstract: A head 5 has a base 21 and a piezoelectric element 23 which is superimposed on and fastened to the base 21 in a thickness direction. The piezoelectric element 23 has a plate-shaped piezoelectric body 41, and a common electrode 39 and a individual electrode 43 arranged so as to sandwich the piezoelectric body 41 in the thickness direction. The base 21 has a higher thermal expansion coefficient than the piezoelectric body 41 (the piezoelectric element 23), the piezoelectric body 41 has a tetragonal principal crystal phase, in which the degree of orientation of the c-axis toward one side in the thickness direction (positive side in z direction) in the region sandwiched by the common electrode 39 and the individual electrode 43 is 44% or more and 56% or less in terms of the Lotgering factor and in which the residual stress in the surface direction is 0MPa or more and 35 MPa or less in the direction of compression.

    Abstract translation: 头部5具有基部21和压电元件23，该压电元件23沿厚度方向叠置并固定在基部21上。 压电元件23具有板状的压电体41，以及在厚度方向上夹着压电体41而配置的共用电极39和独立电极43。 基部21具有比压电体41（压电元件23）更高的热膨胀系数，压电体41具有四方主晶相，其中c轴朝向厚度方向上的一侧的取向度 （z方向的正方向侧）的面积方向上的残余应力为0MPa，或者在由共用电极39和个别电极43夹着的区域中，Lotgering因子为44％以上且56％以下， 在压缩方向上大于或等于35MPa。

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