CARBON FILM LAMINATE, METHOD OF MANUFACTURING SAID LAMINATE, AND LUBRICANT USING SAID LAMINATE
    10.
    发明公开
    CARBON FILM LAMINATE, METHOD OF MANUFACTURING SAID LAMINATE, AND LUBRICANT USING SAID LAMINATE 审中-公开
    CARBONFILMLAMINAT,VERFAHREN ZUR HERSTELLUNG DIESES LAMINATS UND SCHMIERMITTEL MIT DIESEM LAMINAT

    公开(公告)号:EP2708617A1

    公开(公告)日:2014-03-19

    申请号:EP12781837.5

    申请日:2012-05-10

    Abstract: An object of the invention is to provide a carbon film laminate having a sliding surface with low friction, low abrasion, and low counterpart aggressiveness using high adhesiveness to a base material, hardness, surface flatness, low counterpart aggressiveness, transparency, and high thermal conductivity which are provided to the carbon film without using liquid and semiliquid lubricants such as lubricating oil. Provided is a carbon film laminate including a base material, a carbon film adhesion reinforcing layer which is provided on the base material and which is formed from silicon oxide (SiOx, x= 1 to 2) containing fluorine atoms (F) in a concentration of 1×10 19 atoms/cm 3 or more, and a carbon film that is formed on the carbon film adhesion reinforcing layer. The carbon film contains fluorine atoms in the film in a concentration of 1×10 19 to 1×10 21 atoms/cm 3 , and has an approximate spectrum curve obtained by superimposing, on a peak fitting curve A at a Bragg angle (2θ±0.5°) of 43.9° in an X-ray diffraction spectrum by CuKα 1 rays, a peak fitting curve B at 41.7° and a baseline.

    Abstract translation: 本发明的目的是提供一种具有低摩擦滑动面,低磨损性和低对比度侵蚀性的碳膜层叠体,其使用对基材的高粘附性,硬度,表面平整度,低对应物侵蚀性,透明性和高导热性 其不使用液体和半液体润滑剂如润滑油而提供给碳膜。 本发明提供一种碳膜层压体,其包括基材,碳膜附着增强层,其设置在基材上,并且由含有氟原子(F)的氧化硅(SiO x,x = 1〜2)形成,浓度为 1×10 19原子/ cm 3以上,以及形成在碳膜附着增强层上的碳膜。 该碳膜的浓度为1×10 19〜1×10 21原子/ cm 3的膜中含有氟原子,并且具有通过在布拉格角(2θ)上的峰值拟合曲线A上叠加而获得的近似光谱曲线 ±0.5°)为43.9°,通过CuK±1射线在X射线衍射光谱中,峰拟合曲线B为41.7°,基线为。

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