摘要:
A die and substrate assembly (10) is disclosed for a die (12) with electronic circuitry and a substrate (14). A sintered bonding layer (16, 16A) of sintered metal (e.g. silver) is disposed between the die (12) and the substrate (14). The sintered bonding layer (16, 16A) includes a plurality of zones (18, 18', 18", 20, 20', 20") having different sintered metal densities. The plurality of zones (18, 18', 18", 20, 20', 20") are distributed along one or more horizontal axes of the sintered bonding layer (16), along one or more vertical axes of the sintered bonding layer (16) or along both one or more horizontal and one or more vertical axes of the sintered bonding layer (16A).
摘要:
A micromechanical assembly for bonding semiconductor substrates includes a semiconductor substrate having a chip pattern having a plurality of semiconductor chips, each having a functional region and an edge region surrounding the functional region. There is a bonding frame made of a bonding alloy made from at least two alloy components in the edge region, spaced apart from the functional region. Within the part of the edge region surrounding the bonding frame between the bonding frame and the functional region, there is at least one stop frame made of at least one of the alloy components, which is configured such that when a melt of the bond alloy contacts the stop frame during bonding, the bonding alloy solidifies.
摘要:
A die and substrate assembly (10) is disclosed for a die (12) with electronic circuitry and a substrate (14). A sintered bonding layer (16, 16A) of sintered metal (e.g. silver) is disposed between the die (12) and the substrate (14). The sintered bonding layer (16, 16A) includes a plurality of zones (18, 18', 18", 20, 20', 20") having different sintered metal densities. The plurality of zones (18, 18', 18", 20, 20', 20") are distributed along one or more horizontal axes of the sintered bonding layer (16), along one or more vertical axes of the sintered bonding layer (16) or along both one or more horizontal and one or more vertical axes of the sintered bonding layer (16A).
摘要:
A micromechanical assembly for bonding semiconductor substrates includes a semiconductor substrate having a chip pattern having a plurality of semiconductor chips, each having a functional region and an edge region surrounding the functional region. There is a bonding frame made of a bonding alloy made from at least two alloy components in the edge region, spaced apart from the functional region. Within the part of the edge region surrounding the bonding frame between the bonding frame and the functional region, there is at least one stop frame made of at least one of the alloy components, which is configured such that when a melt of the bond alloy contacts the stop frame during bonding, the bonding alloy solidifies.