PROCESS FOR PRODUCTION OF FLUORINE-CONTAINING NORBORNENE DERIVATIVES
    5.
    发明公开
    PROCESS FOR PRODUCTION OF FLUORINE-CONTAINING NORBORNENE DERIVATIVES 有权
    VERFAHREN ZUR HERSTELLUNG VON FLUORHALTIGEN NORBORNENDERIVATEN

    公开(公告)号:EP1415974A4

    公开(公告)日:2005-07-27

    申请号:EP02746012

    申请日:2002-07-12

    申请人: DAIKIN IND LTD

    摘要: Novel norbornene derivatives bearing fluorinated ketone or fluorinated alcohol moieties attached directly to norbornene skeleton, which are useful as material of chemically amplified photoresists for F 2 laser lithography having excellent transparency and improved dry etching resistance; fluorine −containing polymers produced by using the derivatives as comonomer; and chemically amplified photoresist compositions each comprising a fluorine−containing polymer described above, a photoacid generator, and a solvent.

    摘要翻译: 具有含氟酮结构的含氟降冰片烯衍生物的制造包括使降冰片烯衍生物与氟烷基化剂反应。 具有式(II)的含氟酮结构的含氟降冰片烯衍生物的制造包括将式(I)的降冰片烯衍生物和引入Rf 1>的氟烷基化剂与(I)中的X反应。 [图像] [图像] X: - (R 1>)n2-X 1>; X 1> -COOR 2>或-C(= O)X 2>; R 2> 1-5C烷基; X 2>卤素原子; R 1>二价有机基团; n2:0或1; Y:H,F,Cl,1-10C烷基或任选含有醚键的氟代烷基; n:0-5; m:1-5; m + n1:6; 任选含有醚键的Rf 1> 1-10C氟代烷基; 和Z: - (R 1)n 2 -C(= O)R f 1。 还包括以下独立权利要求:(1)制造具有氟代醇结构的含氟降冰片烯衍生物; (2)具有式(V)的含氟酮结构的降冰片烯衍生物; (3)具有氟代醇结构的降冰片烯衍生物; (4)式 - (M1) - (M2) - (N) - 的数均分子量为500-1000000的含氟聚合物; (5)包含聚合物,光酸产生剂和溶剂的化学放大光致抗蚀剂组合物。 [图像] [图像] [图像] Z 3> -C(= O)Rf 3>; 任选含有醚键或式(VI)或(VII)的Rf 3> 1-10C氟代烷基; M1:衍生自降冰片烯衍生物的单元; M2:衍生自2-3C烯属单体的单元; N:可共聚单体。