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    CATHODE ASSEMBLY FOR USE IN X-RAY GENERATION
    1.
    发明公开
    CATHODE ASSEMBLY FOR USE IN X-RAY GENERATION 审中-公开

    公开(公告)号：EP3475967A1

    公开(公告)日：2019-05-01

    申请号：EP17737434.5

    申请日：2017-06-27

    申请人： General Electric Company

    发明人： PRICE, John, Scott ,  ZHANG, Xi

    IPC分类号： H01J35/06 ,  H01J1/15

    摘要： A cathode assembly design is provided that includes two flat emitters, a longer emitter filament and a shorter emitter filament. In one implementation the focal spot sizes produced by the long and short emitters overlap over a range. Thus, one emitter filament may be suitable for generating small and concentrated focal spot sizes while the other emitter filament is suitable for generating small and large focal spots sizes.

    Cathode with improved work function and method for making the same
    6.
    发明公开
    Cathode with improved work function and method for making the same 有权
    阴极具有改进的功函数，并产生相同的方法

    公开(公告)号：EP1063669A3

    公开(公告)日：2006-08-16

    申请号：EP00305015.0

    申请日：2000-06-13

    申请人： LUCENT TECHNOLOGIES INC.

    发明人： Sungho, Jin ,  Katsap, Victor ,  Waskiewicz, Warren K. ,  Zhu, Wei

    IPC分类号： H01J1/15 ,  H01J9/04 ,  H01J37/06

    CPC分类号： H01J1/15 ,  H01J9/042 ,  H01J37/06 ,  H01J2237/3175

    摘要： A cathode (110) with an improved work function, for use in a lithographic system, such as the SCALPEL™ system, which includes a buffer (114) between a substrate (112) and an emissive layer (116), where the buffer alters, randomizes, miniaturizes, and/or isolates the grain structure at a surface of the substrate to reduce the grain size, randomize crystal orientation and reduce the rate of crystal growth. The buffer layer may be a solid solution or a multiphase alloy. A method of making the cathode by depositing a buffer between a surface of the substrate and an emissive layer, where the deposited buffer alters, randomizes, miniaturizes, and/or isolates the grain structure at a surface of the substrate to reduce the grain size, randomize crystal orientation and reduce the rate of crystal growth.

    Directly heated cathodes
    8.
    发明公开
    Directly heated cathodes 失效
    直接加热阴道

    公开(公告)号：EP0326273A3

    公开(公告)日：1990-07-11

    申请号：EP89300425.9

    申请日：1989-01-18

    申请人： EEV LIMITED

    发明人： Pickering, Alan Hugh

    IPC分类号： H01J1/15

    CPC分类号： H01J1/15

    摘要： A directly heated cathode for generating an electron beam along an axis (A) comprises two nested, dish-shaped conductors (4,5) on the axis joined electrically and mechanically on the axis by a spot weld (7), and supported by respective co-axial cylinders (1,2). A heater current supplied by the cylinders (1,2) flows between the conductor rims by way of the spot weld (7), and does not interfere with the electron beam generated by the outer conductor (5).

    摘要翻译： 用于沿轴线（A）产生电子束的直接加热的阴极包括两个嵌套的碟形导体（4,5），该导体通过点焊（7）在轴上电和机械连接并由相应的 同轴气缸（1,2）。 由气缸（1,2）提供的加热器电流通过点焊（7）在导体边缘之间流动，并且不干扰由外导体（5）产生的电子束。