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公开(公告)号:JP4133911B2
公开(公告)日:2008-08-13
申请号:JP2004114159
申请日:2004-04-08
Applicant: エア・ウォーター株式会社 , スタンレー電気株式会社
IPC: C23C16/40 , C23C16/455
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公开(公告)号:JP4544898B2
公开(公告)日:2010-09-15
申请号:JP2004114160
申请日:2004-04-08
Applicant: エア・ウォーター株式会社 , スタンレー電気株式会社
IPC: C23C16/40 , C23C16/455 , H01L33/28
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公开(公告)号:JP4377296B2
公开(公告)日:2009-12-02
申请号:JP2004222965
申请日:2004-07-30
Applicant: エア・ウォーター株式会社 , スタンレー電気株式会社
IPC: H01L21/365 , C23C16/455
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公开(公告)号:JP3869778B2
公开(公告)日:2007-01-17
申请号:JP2002265452
申请日:2002-09-11
Applicant: エア・ウォーター株式会社
IPC: C23C16/455 , C23C16/44 , H01L21/31
CPC classification number: C23C16/45574
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公开(公告)号:JP3663400B2
公开(公告)日:2005-06-22
申请号:JP2002320128
申请日:2002-11-01
Applicant: エア・ウォーター株式会社
IPC: C23C16/455 , H01L21/31
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公开(公告)号:JP5363204B2
公开(公告)日:2013-12-11
申请号:JP2009140413
申请日:2009-06-11
Applicant: エア・ウォーター株式会社
Abstract: PROBLEM TO BE SOLVED: To provide a method of cleaning slit nozzle which can wash away a coating liquid remaining within a supply tube and a slit nozzle with a small amount of a solvent used and without disassembling the slit nozzle, allow rapid drying after cleaning and enable resuming quickly the coating process using the slit nozzle. SOLUTION: The method is for cleaning the slit nozzle 1 which discharges the coating liquid supplied by the supply pipe (2) from a slit formed between lips 1a and 1b arranged oppositely with a slight clearance and allows discharging and removing the coating liquid remaining within the slit nozzle 1 efficiently by introducing liquefied carbon dioxide into the supply pipe (2) after completion of discharge of the coating liquid and discharging the liquefied carbon dioxide from the slit. COPYRIGHT: (C)2011,JPO&INPIT
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公开(公告)号:JP3597990B2
公开(公告)日:2004-12-08
申请号:JP14133698
申请日:1998-05-22
Applicant: エア・ウォーター株式会社 , 三菱電機株式会社
IPC: H01L21/205 , C23C16/455
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公开(公告)号:JP5065078B2
公开(公告)日:2012-10-31
申请号:JP2008036751
申请日:2008-02-19
Applicant: エア・ウォーター株式会社
IPC: B08B7/00 , H01L21/304
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公开(公告)号:JP4712544B2
公开(公告)日:2011-06-29
申请号:JP2005345017
申请日:2005-11-30
Applicant: エア・ウォーター株式会社
Abstract: PROBLEM TO BE SOLVED: To provide surface preparation equipment that can inhibit a processed object from being wrinkled. SOLUTION: The surface treatment equipment performs discharge plasma treatment on a surface of, e.g., an insulator film of a flexibly laminated body in which at least a metal layer and an insulator film are laminated, wherein it has a plasma treatment chamber for discharge plasma-treating an insulator film's surface, a transfer roll installed upstream of the plasma treatment chamber, and a transfer roll installed downstream of the plasma treatment chamber, the transfer roll installed downstream of the plasma treatment chamber includes a resin-coated roll whose outermost layer is composed of a resinous layer, the resin-coated roll is set such that the surface of the resinous layer is brought into contact with the insulator film of the flexibly laminated body after the discharge plasma-treatment, and the electrostatic capacitance of the resinous layer is 10,000 F (Farad) or less when the surface of the resin-coated roll's resinous layer and the surface of the insulator film are in a contact state. COPYRIGHT: (C)2007,JPO&INPIT
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