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公开(公告)号：JP3859573B2
公开(公告)日：2006-12-20
申请号：JP2002306041
申请日：2002-10-21
Applicant: 富士通メディアデバイス株式会社 , 富士通株式会社
CPC classification number: H03H9/1071 , H03H9/02984 , H03H9/6483
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公开(公告)号：JP3725360B2
公开(公告)日：2005-12-07
申请号：JP7384499
申请日：1999-03-18
Applicant: 富士通メディアデバイス株式会社 , 富士通株式会社
IPC: H01L21/302 , H01L21/3065 , H03H3/08 , H03H9/25 , H01L21/306
CPC classification number: H03H3/08
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公开(公告)号：JP3939939B2
公开(公告)日：2007-07-04
申请号：JP2001217177
申请日：2001-07-17
Applicant: 富士通メディアデバイス株式会社 , 富士通株式会社
CPC classification number: H03H9/173 , H03H3/02 , H03H2003/021 , Y10T29/42
Abstract: A film bulk acoustic resonator is fabricated in the following manner. First, a base layer is formed on an insulating substrate. Then, a resonator assembly is formed on the base layer. The resonator assembly includes a first electrode held in contact with the base layer, a second electrode, and a piezoelectric layer held between the first and the second electrodes. Then, a resist layer is formed to cover the resonator assembly and the base layer. Then, a through-hole is formed in the resist layer so that the base layer is exposed via the through-hole. Then, etchant is supplied via the through-hole to make a space in the base layer under the resonator assembly. Finally, the resist layer is removed.
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公开(公告)号：JPWO2005015595A1
公开(公告)日：2006-10-05
申请号：JP2005507583
申请日：2003-08-07
Applicant: 富士通株式会社 , 富士通メディアデバイス株式会社
CPC classification number: H01H59/0009
Abstract: 本発明に係るマイクロスイッチング素子(X1)は、フレーム(11)と、櫛歯電極部(12)と、相互に離隔する一対の固定コンタクト電極(13)と、可動部(20)と、可動部(20)およびフレーム(11)を連結するための一組の支持梁(30A)および一組の支持梁(30B)と、を備える。可動部(20)は、櫛歯電極部(12)と協働して静電気力を発生させるための櫛歯電極部(23)、および、固定コンタクト電極(13)に対向する可動コンタクト電極(21)を有し、固定コンタクト電極(13)および可動コンタクト電極(21)が当接する位置と離隔する位置との間で変位することが可能である。一組の支持梁(30A)および一組の支持梁(30B)は、可動部(20)の変位の方向に離隔している。
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公开(公告)号：JP3929415B2
公开(公告)日：2007-06-13
申请号：JP2003118090
申请日：2003-04-23
Applicant: 富士通メディアデバイス株式会社 , 富士通株式会社
CPC classification number: H03H9/6436 , H03H9/14538 , H03H9/25 , H03H9/6433 , H03H9/6489
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Patent Agency Ranking
公开(公告)号：JP3712123B2
公开(公告)日：2005-11-02
申请号：JP2002258559
申请日：2002-09-04
Applicant: 富士通メディアデバイス株式会社 , 富士通株式会社
IPC: H01G5/00 , H01G5/013 , H01G5/16 , H01L41/08 , H01L41/09 , H01L41/18 , H01L41/187 , H01L41/22 , H01L41/311
CPC classification number: H01G5/16
Abstract: A tunable capacitor includes a substrate, a stationary electrode and a movable electrode supported by the substrate, piezoelectric actuators that are supported by the substrate and drive the movable electrode, and a dielectric layer interposed between the stationary electrode and the movable electrode.
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公开(公告)号：JP3375936B2
公开(公告)日：2003-02-10
申请号：JP2000137191
申请日：2000-05-10
Applicant: 富士通メディアデバイス株式会社 , 富士通株式会社
IPC: H03H9/64 , H03H9/72 , H04B1/3822 , H04B1/40
CPC classification number: H03H9/725 , H03H9/0576 , H03H9/1071 , H03H9/6483 , H03H9/72
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公开(公告)号：JP4147784B2
公开(公告)日：2008-09-10
申请号：JP2002039128
申请日：2002-02-15
Applicant: 富士通メディアデバイス株式会社 , 富士通株式会社
CPC classification number: G01C19/5607
Abstract: An angular velocity sensor (101) is provided that includes a frame (20), an oscillator (10) and torsion bars (30) that connect the oscillator to the frame. The frame, the oscillator and the torsion bar are formed integral with each other by etching a material substrate in the thickness direction of the substrate. The oscillator, configured in the form of an H, includes a support (11), two first arms (12a, 12b) and two second arms (13a, 13b). These arms extend from the support in an arm-extending direction perpendicular to the thickness direction of the substrate. The oscillator includes a mounting surface that is provided with a piezoelectric driver (40) for generating in-plane oscillation of the oscillator, and with a piezoelectric detector (50, 60) for detecting out-of-plane oscillation of the oscillator.
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公开(公告)号：JP3710445B2
公开(公告)日：2005-10-26
申请号：JP2002330917
申请日：2002-11-14
Applicant: 富士通メディアデバイス株式会社 , 富士通株式会社
CPC classification number: H01L24/73 , H01L2223/6677 , H01L2224/32225 , H01L2224/48227 , H01L2224/73265 , H01L2924/30107 , H01L2924/3011 , H01L2924/00012 , H01L2924/00
Abstract: PROBLEM TO BE SOLVED: To miniaturize an antenna branching filter when housing two branching filters in a single package. SOLUTION: The antenna branching filter has at least two pairs of branching filters, each of which consists of a surface acoustic wave filter for transmission and reception having different center frequencies and has an antenna pad, a transmission pad and a reception pad, a first and a second antenna terminals respectively connected to the first and the second antenna pads of the two pairs of filters, a first and a second transmission terminals respectively connected to the first and the second transmission pads of the two pairs of filters, a first and a second reception terminals respectively connected to the first and the second reception pads of the two pairs of filters, and a package for housing the two pairs of filters and having a rear surface consisting of a first to a fourth sides. The first and the second transmission terminals are formed on a first side and on a second side which do not face the first side respectively, the first and the second reception terminals are formed on the second side and a third side adjacent to the second side respectively, and the first and the second antenna terminals are formed on the fourth side. COPYRIGHT: (C)2003,JPO
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