Lactone compound, lactone-containing monomer, polymer, resist material using the same and method for forming pattern
    4.
    发明专利
    Lactone compound, lactone-containing monomer, polymer, resist material using the same and method for forming pattern 有权
    LACTONE化合物,含有LACTONE的单体,聚合物,使用它们的耐性材料和形成图案的方法

    公开(公告)号:JP2006076981A

    公开(公告)日:2006-03-23

    申请号:JP2004266071

    申请日:2004-09-13

    CPC classification number: G03F7/0397 C07D311/00 G03F7/0046 Y10S430/111

    Abstract: PROBLEM TO BE SOLVED: To provide a new lactone compound, to provide a lactone-containing monomer, to provide a polymer using the same, to provide a resist material, and to provide a method for forming a pattern.
    SOLUTION: This lactone-containing monomer represented by general formula (1) (X is CH
    2 , CH
    2 CH
    2 , O, S, NR
    1 ; R
    1 to R
    4 are each H, a halogen atom, or a 1 to 10C straight chain, branched or cyclic alkyl which may partially or wholly be substituted with one or more fluorine atoms and further which may partially contain one or more oxygen atoms, sulfur atoms, nitrogen atoms, carbon-carbon double bonds, carbonyl groups, hydroxy groups, or carboxy groups; R
    5 is a single bond, CH
    2 , or carbonyl).
    COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:提供新的内酯化合物,以提供含内酯的单体,以提供使用该内酯的单体的聚合物,以提供抗蚀剂材料,并提供形成图案的方法。 解决方案:由通式(1)表示的含内酯的单体(X为CH 2 ,CH 2 2 ,O ,S,NR 1 ; R 1 至R 4 分别为H,卤素原子或1至10C直链,支链或 可以部分或全部被一个或多个氟原子取代并且还可以部分含有一个或多个氧原子,硫原子,氮原子,碳 - 碳双键,羰基,羟基或羧基的环状烷基; R 单一键,CH 2 或羰基)。 版权所有(C)2006,JPO&NCIPI

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