반도체 칩 본딩 장치
    3.
    发明公开
    반도체 칩 본딩 장치 失效
    用于在基板上粘合半导体芯片的装置

    公开(公告)号:KR1020090009641A

    公开(公告)日:2009-01-23

    申请号:KR1020070073095

    申请日:2007-07-20

    Abstract: A semiconductor chip bonding device is provided to perform a control operation so that a horizontal state of a semiconductor chip can be maintained on a lead frame, thereby minimizing damage of the semiconductor chip and omitting special horizontality control time when replacing a collet. A semiconductor chip bonding device comprises a chip holding unit(100), a bond head unit(200) and a balance control unit(300). The chip holding unit holds a semiconductor chip(C) to be bonded in a lead frame. The bond head unit is connected with the chip holding unit by the medium of the balance control unit. The bond head unit adds bonding load. The bonding load is delivered through the balance control unit to the chip holding unit. The balance control unit rotates the chip holding unit so that the chip holding unit can be horizontal to the lead frame while delivering the bonding load of the bond head unit. The balance control unit more includes a load transmission member(320) and a connecting member(340). The load transmission member delivers bonding load of a bond head shaft(220) to the chip holding unit. The connecting member connects the load transmission member and the chip holding unit so as to achieve a relative rotation movement of the chip holding unit on the load transmission member when transmitting the bonding load.

    Abstract translation: 提供半导体芯片接合装置以执行控制操作,使得可以在引线框架上保持半导体芯片的水平状态,从而最小化半导体芯片的损坏,并且在更换夹头时省略特殊的水平度控制时间。 半导体芯片接合装置包括芯片保持单元(100),结合头单元(200)和平衡控制单元(300)。 芯片保持单元保持要接合在引线框架中的半导体芯片(C)。 接合头单元通过平衡控制单元的介质与芯片保持单元连接。 粘结头单元增加了粘结载荷。 接合负载通过平衡控制单元输送到芯片保持单元。 平衡控制单元旋转芯片保持单元,使得芯片保持单元可以在输送接合头单元的粘合负载的同时与引线框架水平。 平衡控制单元还包括负载传递部件(320)和连接部件(340)。 负载传递部件将接合头轴(220)的接合负载输送到芯片保持单元。 连接构件连接负载传递构件和芯片保持单元,以便当发送接合负载时实现芯片保持单元在负载传递构件上的相对旋转运动。

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