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公开(公告)号：TWI621188B
公开(公告)日：2018-04-11
申请号：TW104138285
申请日：2015-11-19
发明人： 渡辺慎也 , WATANABE, SHINYA , 南部俊弘 , NAMBU, TOSHIHIRO
IPC分类号： H01L21/60 , H01L23/535 , H01L23/522 , H01L23/58
CPC分类号： G01R31/2856 , H01L21/76898 , H01L22/32 , H01L23/3128 , H01L23/3135 , H01L23/481 , H01L23/49816 , H01L23/5226 , H01L23/53209 , H01L23/53214 , H01L23/53228 , H01L23/53257 , H01L23/5384 , H01L24/05 , H01L24/06 , H01L24/13 , H01L24/16 , H01L24/17 , H01L24/29 , H01L25/0657 , H01L27/11529 , H01L2224/0401 , H01L2224/05009 , H01L2224/05012 , H01L2224/05017 , H01L2224/05082 , H01L2224/05083 , H01L2224/05093 , H01L2224/05095 , H01L2224/05096 , H01L2224/05155 , H01L2224/05166 , H01L2224/05569 , H01L2224/056 , H01L2224/05611 , H01L2224/05616 , H01L2224/05639 , H01L2224/05644 , H01L2224/05647 , H01L2224/05655 , H01L2224/0601 , H01L2224/06181 , H01L2224/10135 , H01L2224/131 , H01L2224/13111 , H01L2224/13116 , H01L2224/13139 , H01L2224/13144 , H01L2224/13147 , H01L2224/13155 , H01L2224/16113 , H01L2224/16145 , H01L2224/16146 , H01L2224/16227 , H01L2224/1703 , H01L2224/17181 , H01L2224/27334 , H01L2224/2919 , H01L2224/32245 , H01L2224/73204 , H01L2224/73253 , H01L2224/81139 , H01L2224/81444 , H01L2224/81447 , H01L2224/97 , H01L2924/01028 , H01L2924/01029 , H01L2924/01046 , H01L2924/01047 , H01L2924/0105 , H01L2924/01079 , H01L2924/0132 , H01L2924/014 , H01L2924/01404 , H01L2924/1438 , H01L2924/15311 , H01L2924/15747 , H01L2924/3511 , H01L2924/00014 , H01L2224/05147 , H01L2924/00012 , H01L2924/0665 , H01L2224/83
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