公开(公告)号：US07515049B2

公开(公告)日：2009-04-07

申请号：US11449084

申请日：2006-06-08

申请人： Arun Sharma ,  Daniel Fritschen ,  Daniel Liu ,  Norma Riley

发明人： Arun Sharma ,  Daniel Fritschen ,  Daniel Liu ,  Norma Riley

IPC分类号： G08B13/14

CPC分类号： G06K7/0008 ,  G06K7/10178

摘要： The present invention generally comprises an apparatus that allows an RFID antenna to obtain information from an RFID tag mounted on a container. The apparatus reproduces the RF field generated by the antenna to a location proximate to the RFID tag. In one embodiment, the apparatus comprises a pickup device and a reproduction device electrically coupled with the pickup device. In another embodiment, the apparatus comprises at least one magnetic rod, which creates a magnetic path for the RF field to travel between the antenna and the RFID tag. In another embodiment, the apparatus comprises a pickup antenna and a reproduction antenna for transmitting the RF signal from the antenna proximate to the RFID tag.

摘要翻译： 本发明通常包括允许RFID天线从安装在容器上的RFID标签获取信息的装置。 该装置将由天线产生的RF场再现到靠近RFID标签的位置。 在一个实施例中，该装置包括拾取装置和与拾取装置电耦合的再现装置。 在另一个实施例中，该装置包括至少一个磁棒，其产生用于RF场在天线和RFID标签之间行进的磁路。 在另一个实施例中，该装置包括拾取天线和用于从靠近RFID标签的天线发送RF信号的再现天线。

公开(公告)号：US07410340B2

公开(公告)日：2008-08-12

申请号：US11064880

申请日：2005-02-24

申请人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

发明人： Anthony C. Bonora ,  Michael Krolak ,  Roger G. Hine

IPC分类号： B65G1/133

CPC分类号： H01L21/67775 ,  H01L21/67736 ,  Y10S414/14

摘要： The present invention comprises a container transport and loading system. The system generally comprises a load port for presenting articles to a tool and a container transport system. In one embodiment, the load port includes a vertically movable FOUP advance plate assembly that is adapted to load and unload a FOUP from a conveyor that passes by the load port and move the FOUP horizontally. In another embodiment, the load port includes a vertically movable support structure that is adapted to load and unload a container from a shuttle that passes by the load port. The various embodiments of the load port and container transport system are improvements over conventional container transport systems. The present invention also includes a shuttle for simultaneously transporting multiple containers that a load port may load or unload a container from.

摘要翻译： 本发明包括容器运输和装载系统。 该系统通常包括用于将物品呈现给工具的装载端口和容器运输系统。 在一个实施例中，负载端口包括可垂直移动的FOUP提前板组件，其适于从通过负载端口的传送器加载和卸载FOUP并水平移动FOUP。 在另一个实施例中，负载端口包括可垂直移动的支撑结构，其适于从穿过负载端口的梭子加载和卸载容器。 负载端口和集装箱运输系统的各种实施例是相对于常规集装箱运输系统的改进。 本发明还包括用于同时运送多个容器的梭子，负载口可装载或卸载容器。

公开(公告)号：US6164664A

公开(公告)日：2000-12-26

申请号：US49330

申请日：1998-03-27

申请人： William J. Fosnight ,  Joshua W. Shenk ,  Perry Peterson

发明人： William J. Fosnight ,  Joshua W. Shenk ,  Perry Peterson

IPC分类号： F16J15/02 ,  F16J15/48

CPC分类号： F16J15/025

摘要： An interface seal between a gas flow line within a support surface for a pod and a flow valve mounted within the pod. The kinematic coupling between a pod and support surface aligns a pair of inlet and outlet valves on a bottom surface of the pod with a corresponding pair of inlet and outlet holes in the support surface, through which gas may be injected into and removed from the pod, respectively. The interface according to the various embodiments of the invention provides a durable seal substantially preventing leakage between the pod and support surface while at the same time being compatible with kinematic couplings. In embodiments of the invention, the seal is thin and flexible, and expands into engagement with the pod to establish the seal. This type of interface seal will not interfere with the proper seating of the pod on the kinematic pins. Moreover, in a relaxed state, embodiments of the interface seal extend only a small distance above the support surface, and have no edges that are capable of catching on the pod as the pod is loaded or removed at low angles.

摘要翻译： 在用于荚的支撑表面内的气体流动线和安装在荚内的流动阀之间的界面密封。 荚和支撑表面之间的运动学耦合使一对入口和出口阀在荚的底部表面上与支撑表面中的相应的一对入口孔和出口孔对准，气体可通过该入口和出口孔被注入并从容器中移出 ， 分别。 根据本发明的各种实施例的界面提供了一种耐用的密封件，其基本上防止了荚和支撑表面之间的泄漏，同时与运动耦合兼容。 在本发明的实施例中，密封件是薄且柔性的并且膨胀成与荚接合以建立密封。 这种类型的接口密封不会妨碍运动销上荚的正确安装。 此外，在松弛状态下，接口密封件的实施例在支撑表面上方仅延伸一小段距离，并且当荚状物以低角度被装载或移除时，没有能够在荚上捕获的边缘。

公开(公告)号：US5166884A

公开(公告)日：1992-11-24

申请号：US797714

申请日：1991-11-25

申请人： George A. Maney ,  Anthony C. Bonora ,  Mihir Parikh ,  Michael D. Brain

发明人： George A. Maney ,  Anthony C. Bonora ,  Mihir Parikh ,  Michael D. Brain

IPC分类号： G03F7/20 ,  H01L21/673

CPC分类号： H01L21/67294 ,  G03F7/70541 ,  G03F7/7075 ,  G03F7/70991

摘要： A system mounted with a transportable container for carrying articles such as semiconductor wafers which comprises a non-volatile memory used to store the identity, status and history of the articles in the container. Further, the system includes means for transmitting data from the memory to an information processor associated with a processing station which processes the articles in a carrier. In a preferred embodiment, the system includes data processing capability and both receives data from and transmits data to the processing station.

摘要翻译： 一种安装有用于携带诸如半导体晶片的物品的可移动容器的系统，其包括用于存储容器中物品的身份，状态和历史的非易失性存储器。 此外，该系统包括用于将数据从存储器传送到与处理载体中的物品的处理站相关联的信息处理器的装置。 在优选实施例中，该系统包括数据处理能力，并且都从数据处理站接收数据并传输数据。

公开(公告)号：US20100314224A1

公开(公告)日：2010-12-16

申请号：US12420053

申请日：2009-04-07

申请人： Roumen Deyanov ,  Joseph John Fatula, JR.

发明人： Roumen Deyanov ,  Joseph John Fatula, JR.

IPC分类号： B65G17/32

CPC分类号： B65G35/06 ,  B65G21/00 ,  B65G2201/0297 ,  B65G2207/30 ,  Y10T29/53261 ,  Y10T29/53265

摘要： A conveyor system is provided. The conveyor system includes a threshold assembly. The threshold assembly has a base plate that is secured to a floor, and the threshold assembly has a channel that is formed between two support beams that are secured to a base plate. A plurality of threshold center plates are provided, which span and enclose the channel formed by the support beams, such that each threshold assembly includes a modular printed circuit board that fits within the channel and is enclosed within the channel by threshold center plates. And, multiple conveyor segments are mountable to the threshold assembly. Other systems components and methods for making and operating the same are provided.

摘要翻译： 提供输送系统。 传送系统包括阈值组件。 阈值组件具有固定到地板上的基板，并且阈值组件具有形成在固定到基板的两个支撑梁之间的通道。 提供了多个阈值中心板，其跨越和包围由支撑梁形成的通道，使得每个阈值组件包括装配在通道内并且通过阈值中心板封装在通道内的模块化印刷电路板。 并且，多个输送机段可安装到阈值组件。 提供了用于制造和操作其的系统组件和方法。

公开(公告)号：US20100080672A1

公开(公告)日：2010-04-01

申请号：US12456645

申请日：2009-06-19

申请人： Anthony C. Bonora ,  Joseph Fatula ,  Roumen Iliev Deyanov ,  Hiroshi Ito ,  Roger G. Hine

发明人： Anthony C. Bonora ,  Joseph Fatula ,  Roumen Iliev Deyanov ,  Hiroshi Ito ,  Roger G. Hine

IPC分类号： H01L21/677 ,  B65G15/20 ,  B65G15/22

CPC分类号： H01L21/67706 ,  H01L21/6773 ,  H01L21/67736 ,  H01L21/67775

摘要： A direct load system and conveyor is disclosed. The direct load system includes a load port for moving containers in a vertical orientation between a lower position near the conveyor and up to an upper position proximate to a load port door. The load port includes a single arm that moves a support in a vertical configuration, such that moving the single arm allows for the support to be lowered to the conveyor in a nested location between beams of the conveyor. The conveyor includes a single slot in a beam that allows the single arm to pass, and allows the support to be placed in the nested location, which is below a conveyor path defined by the belts of the conveyor. If a container is to be lifted off of the belts, the single arm raises up from the nested location, to then raise the container up and off of the conveyor and to the load port door. The single arm and interface with the conveyor slot can be used by other tools, such as stockers or tools that need to directly access a conveyor used to transport containers (e.g., wafers, etc.) to locations/tools of a fabrication facility. In alternate embodiments, it is possible to replace the belt with conveying wheels.

摘要翻译： 公开了一种直接负载系统和输送机。 直接负载系统包括用于在垂直方向移动容器的装载端口，其位于靠近输送机的下部位置和靠近装载端口门的上部位置之间。 负载端口包括单个臂，其以垂直构造移动支撑件，使得移动单臂允许支撑件在输送机的梁之间的嵌套位置中降低到输送机。 输送机包括梁中的单个槽，其允许单臂通过，并且允许支撑件被放置在嵌套位置，该嵌套位置位于由输送机的带定义的传送路径的下方。 如果一个集装箱要从皮带上提起，那么单臂从嵌套的位置上升，然后将容器从输送机上升起并离开装载口门。 单个臂和输送机槽的接口可以被其他工具使用，例如储存器或工具，其需要直接访问用于将容器（例如，晶片等）运送到制造设施的位置/工具的输送机。 在替代实施例中，可以用输送轮代替带。

公开(公告)号：US07403984B2

公开(公告)日：2008-07-22

申请号：US09899833

申请日：2001-07-05

申请人： Raymond Walter Ellis ,  Mark Theodore Pendleton ,  Charles Merritt Baylis

发明人： Raymond Walter Ellis ,  Mark Theodore Pendleton ,  Charles Merritt Baylis

IPC分类号： G06F15/16

CPC分类号： G05B19/41865 ,  G05B19/4185 ,  G05B2219/31174 ,  G05B2219/31175 ,  G05B2219/31186 ,  G05B2219/31196 ,  G05B2219/31422 ,  G05B2219/32126 ,  G05B2219/34038 ,  G05B2219/45031 ,  Y02P90/18 ,  Y02P90/20 ,  Y02P90/205

摘要： A system, computer program product and method for automated tool management in a multi-protocol environment. A user may issue a message in accordance with an object-oriented interapplication communication protocol to a corresponding application interface unit. The message may be a request to perform a particular action on a selected tool. The content of the message may be extracted by the corresponding application interface unit which may comprise data required by the requested action and a pointer to the object representing the tool. The application interface unit may invoke a method of the object pointed to by the pointers in the message. A value may then be procured by an equipment model where the value may be associated with particular information requested in the message about a tool or a notification informing the user that an event occurred. The equipment model may transfer the value to the appropriate user.

摘要翻译： 一种用于多协议环境中自动化工具管理的系统，计算机程序产品和方法。 用户可以根据面向对象的应用间通信协议向对应的应用接口单元发出消息。 该消息可以是对所选择的工具执行特定动作的请求。 消息的内容可以由对应的应用接口单元提取，该应用接口单元可以包括所请求的动作所需的数据和指向表示该工具的对象的指针。 应用程序接口单元可以调用消息中指针指向的对象的方法。 然后可以由设备模型获得值，其中该值可以与消息中关于工具或通知用户通知用户事件发生的特定信息相关联。 设备型号可以将值传送给适当的用户。

公开(公告)号：US07217076B2

公开(公告)日：2007-05-15

申请号：US10087092

申请日：2002-03-01

申请人： Anthony C. Bonora ,  Richard H. Gould ,  Roger G. Hine ,  Michael Krolak ,  Jerry A. Speasl

发明人： Anthony C. Bonora ,  Richard H. Gould ,  Roger G. Hine ,  Michael Krolak ,  Jerry A. Speasl

IPC分类号： B65G49/07

CPC分类号： H01L21/67775 ,  H01L21/67766 ,  H01L21/67778 ,  H01L21/68707 ,  Y10S414/139

摘要： The semiconductor material handling system is an EFEM that may either mount to the front end of a processing tool or be integrated into the processing tool. The EFEM is built from a unified frame that the EFEM components, such as a wafer engine and a SMIF pod advance plate, may mount to. The frame serves as a common mounting structure that the EFEM components may use as a reference for alignment purposes. Since the EFEM components do not have to align with respect to the position of each other, the calibration, if any is required, is greatly simplified. The EFEM also has a reduced footprint, allowing the EFEM to mount to the front end of a processing tool and not extend to the fab floor. Thus, space is freed up between the EFEM and the fab floor. By way of example only, this space may be used as a maintenance access area to the processing tool without having to first remove the EFEM.

摘要翻译： 半导体材料处理系统是可以安装到处理工具的前端或被集成到处理工具中的EFEM。 EFEM由统一的框架构成，EFEM组件（如晶片引擎和SMIF盒前进板）可以安装到。 该框架用作通用安装结构，EFEM组件可用作对准目的的参考。 由于EFEM组件不必相对于彼此的位置对准，所以校准（如果需要）被大大简化。 EFEM还具有减少的占地面积，允许EFEM安装到加工工具的前端，而不是延伸到fab楼层。 因此，在EFEM和fab楼之间释放空间。 仅作为示例，该空间可以用作处理工具的维护访问区域，而不必首先去除EFEM。

公开(公告)号：US06848876B2

公开(公告)日：2005-02-01

申请号：US09760147

申请日：2001-01-12

申请人： Daniel J. Babbs ,  William J. Fosnight ,  Tim Cosentino ,  Mark Sammut ,  Pascal Pinna ,  Russell Zemen

发明人： Daniel J. Babbs ,  William J. Fosnight ,  Tim Cosentino ,  Mark Sammut ,  Pascal Pinna ,  Russell Zemen

IPC分类号： B65G1/04 ,  B65G1/16 ,  B65G49/07 ,  G03F7/20

CPC分类号： H01L21/67769 ,  B65G1/045 ,  B65G1/16 ,  G03F7/70741 ,  Y10S414/138

摘要： A reticle management system is disclosed including a sorter coupled to one or more stockers that allow a customized configuration of the overall reticle management system. The stockers may be bare reticle stockers, closed container reticle stockers, or both. In embodiments of the present invention, the reticle management system includes between one and six individual bare reticle stockers and/or closed container stockers for storing reticles affixed to a reticle sorter. The sorter includes a reticle inspection station for inspecting the reticles, a plurality of input/output (I/O) load ports and a reticle handling robot for transferring the reticles between the stockers, the inspection station and the I/O load ports. The management system further includes a control unit for housing control electronics for the system.

摘要翻译： 公开了一种掩模版管理系统，其包括耦合到一个或多个存储器的分类器，其允许整个标线管理系统的定制配置。 储料器可以是裸露的光罩储存器，封闭的容器标线贮存器或两者。 在本发明的实施例中，掩模版管理系统包括一个和六个单独裸光掩模存储器和/或封闭的容器存放器，用于存放附着在掩模版分选机上的光罩。 分拣机包括用于检查掩模版的掩模版检查站，多个输入/输出（I / O）装载端口和用于在储料器，检查站和I / O装载端口之间传送掩模版的掩模版处理机器人。 管理系统还包括用于容纳系统的控制电子装置的控制单元。

公开(公告)号：US20040111339A1

公开(公告)日：2004-06-10

申请号：US10719069

申请日：2003-11-21

申请人： Asyst Technologies, Inc.

发明人： Brian Wehrung ,  Clifford Holden

IPC分类号： G06F007/00

CPC分类号： G06Q10/02 ,  G06Q40/12

摘要： An automated transport system for use in a material handling system. The automated transport system employs a distributed control system including a top level controller (transport controller), a plurality of second-level controllers (control logic computers) and a plurality of third-level controllers (intelligent drivers). The transport controller (TC) receives material commands from a conventional material control system (MCS). The TC breaks the command into sub-commands directing selected control logic computers (CLCs) to acquire, move to a destination or otherwise interact with a particular container designated by the MCS command. The transport controller selects the CLCs based on the transport system topology, the content of the MCS command and knowledge of which regions of the transport system are controlled by respective CLCs. Each CLC implements the sub-commands by issuing to the intelligent drivers low level control commands to accelerate, elevate, rotate, load or unload the container. Each intelligent driver directly controls one of the electromechanical devices that compose the transport system hardware in accordance with these low level commands. The electromechanical devices can include rail sections (zones), directors, elevators, load port transfer devices and tag readers.

摘要翻译： 一种用于材料处理系统的自动化运输系统。 自动化运输系统采用包括顶层控制器（运输控制器），多个二级控制器（控制逻辑计算机）和多个第三级控制器（智能驱动器）的分布式控制系统。 运输控制器（TC）从常规材料控制系统（MCS）接收材料命令。 TC将命令分解为指示所选控制逻辑计算机（CLC）的子命令，以获取，移动到目的地或以其他方式与由MCS命令指定的特定容器进行交互。 传输控制器基于传输系统拓扑，MCS命令的内容和传输系统的哪些区域的知识由相应的CLC控制来选择CLC。 每个CLC通过向智能驱动器发出低级控制命令来实现子命令，以加速，提升，旋转，加载或卸载集装箱。 每个智能驱动器根据这些低级命令直接控制构成传输系统硬件的机电设备之一。 机电设备可以包括轨道部分（区域），导向器，电梯，负载端口传送装置和标签读取器。