公开(公告)号：US08124895B2

公开(公告)日：2012-02-28

申请号：US12359556

申请日：2009-01-26

Applicant: Angelo Merassi ,  Mario Francesco Cortese ,  Viola Fulvio ,  Barbara Simoni ,  Andrea Rusconi Clerici Beltrami

Inventor： Angelo Merassi ,  Mario Francesco Cortese ,  Viola Fulvio ,  Barbara Simoni ,  Andrea Rusconi Clerici Beltrami

IPC: H01H35/14

CPC classification number: B81B3/0051 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01P15/08 ,  G01P15/125 ,  G01P2015/0828

Abstract: A microelectromechanical device has a mobile mass that undergoes a movement, in particular a spurious movement, in a first direction in response to an external event; the device moreover has a stopper structure configured so as to stop said spurious movement. In particular, a stopper element is fixedly coupled to the mobile mass and is configured so as to abut against a stopper mass in response to the spurious movement, thereby stopping it. In detail, the stopper element is arranged on the opposite side of the stopper mass with respect to a direction of the spurious movement, protrudes from the space occupied by the mobile mass and extends in the space occupied by the stopper mass, in the first direction.

Abstract translation: 微机电装置具有响应于外部事件在第一方向上经历移动，特别是杂散运动的移动质量; 该装置还具有阻止结构，以便停止所述杂散运动。 特别地，止动元件固定地联接到移动块上，并被配置为响应于伪运动而抵靠止动块，从而停止它。 详细地说，止动件相对于杂散运动的方向设置在止动块的相对侧上，从移动体所占据的空间突出，并且在第一方向上在止动块所占据的空间中延伸 。

公开(公告)号：US08671756B2

公开(公告)日：2014-03-18

申请号：US13303038

申请日：2011-11-22

Applicant: Claudia Comi ,  Alberto Corigliano ,  Barbara Simoni

Inventor： Claudia Comi ,  Alberto Corigliano ,  Barbara Simoni

IPC: G01P15/10

CPC classification number: G01P15/097 ,  G01P15/0888 ,  G01P15/18 ,  G01P2015/082

Abstract: A microelectromechanical detection structure for a MEMS resonant biaxial accelerometer is provided with: an inertial mass, anchored to a substrate by elastic elements to be suspended above the substrate. The elastic elements enabling inertial movements of the inertial mass along a first axis of detection and a second axis of detection that belong to a plane of main extension of said inertial mass, in response to respective linear external accelerations. At least one first resonant element and one second resonant element have a respective longitudinal extension, respectively along the first axis of detection and the second axis of detection, and are mechanically coupled to the inertial mass through a respective one of the elastic elements to undergo a respective axial stress when the inertial mass moves respectively along the first axis of detection and the second axis of detection.

Abstract translation: 用于MEMS共振双轴加速度计的微机电检测结构具有：惯性质量块，通过弹性元件锚固到基底上以悬浮在基底上方。 所述弹性元件能够响应于相应的线性外部加速度，沿着第一检测轴惯性运动所述惯性质量，以及使第二检测轴属于所述惯性质心的主延伸平面。 至少一个第一谐振元件和一个第二谐振元件分别具有沿着第一检测轴和第二检测轴的相应的纵向延伸，并且通过相应的一个弹性元件机械耦合到惯性块，以经历一个 当惯性质量分别沿第一检测轴和第二检测轴移动时各自的轴向应力。

公开(公告)号：US09234913B2

公开(公告)日：2016-01-12

申请号：US13612585

申请日：2012-09-12

Applicant: Barbara Simoni ,  Carlo Valzasina

Inventor： Barbara Simoni ,  Carlo Valzasina

IPC: G01C19/00 ,  G01P15/18 ,  G01C19/574 ,  G01P15/125

CPC classification number: G01P15/18 ,  G01C19/574 ,  G01P15/125

Abstract: A microelectromechanical device includes: a supporting structure; two sensing masses, movable with respect to the supporting structure according to a first axis and a respective second axis; a driving device for maintaining the sensing masses in oscillation along the first axis in phase opposition; sensing units for supplying sensing signals indicative of displacements respectively of the sensing masses according to the respective second axis; processing components for combining the sensing signals so as to: in a first sensing mode, amplify effects on the sensing signals of concordant displacements and attenuate effects of discordant displacements of the sensing masses; and in a second sensing mode, amplify effects on the sensing signals of discordant displacements and attenuate effects of concordant displacements of the sensing masses.

Abstract translation: 微机电装置包括：支撑结构; 两个感测质量，可根据第一轴线和相应的第二轴线相对于支撑结构移动; 驱动装置，用于沿着第一轴保持相位相反的振动感测质量; 感测单元，用于根据相应的第二轴提供表示感测质量的位移的感测信号; 处理用于组合感测信号的组件，以便：在第一感测模式中，放大对一致位移的感测信号的影响，并减弱感测质量不一致位移的影响; 并且在第二感测模式中，放大对不一致位移的感测信号的影响并减弱感测质量的一致位移的影响。

公开(公告)号：US08661900B2

公开(公告)日：2014-03-04

申请号：US12014563

申请日：2008-01-15

Applicant: Angelo Antonio Merassi ,  Sarah Zerbini ,  Barbara Simoni

Inventor： Angelo Antonio Merassi ,  Sarah Zerbini ,  Barbara Simoni

IPC: G01P15/08

CPC classification number: B81B3/0051 ,  B81B2201/0235 ,  G01P15/0802 ,  G01P2015/0831

Abstract: In a microelectromechanical device, a mobile mass is suspended above a substrate via elastic suspension elements and is rotatable about said elastic suspension elements, a cover structure is set above the mobile mass and has an internal surface facing the mobile mass, and a stopper structure is arranged at the internal surface of the cover structure and extends towards the mobile mass in order to stop a movement of the mobile mass away from the substrate along an axis (z) transverse to the substrate. The stopper structure is arranged with respect to the mobile mass so as to reduce an effect of reciprocal electrostatic interaction, in particular so as to minimize a resultant twisting moment of the mobile mass about the elastic suspension elements.

Abstract translation: 在微机电装置中，移动物质通过弹性悬挂元件悬挂在基底上方并且可围绕所述弹性悬挂元件旋转，盖结构设置在移动质量块的上方并具有面向移动质量块的内表面，并且止动结构 布置在盖结构的内表面并朝着移动块延伸，以便沿横向于基底的轴线（z）停止移动块离开基底的运动。 止动器结构相对于移动物质布置，以便减少相互静电相互作用的影响，特别是使得可移动物体围绕弹性悬挂元件的最终扭转力矩最小化。

公开(公告)号：US20120000287A1

公开(公告)日：2012-01-05

申请号：US13161345

申请日：2011-06-15

Applicant: Attilio Frangi ,  Biagio De Masi ,  Barbara Simoni

Inventor： Attilio Frangi ,  Biagio De Masi ,  Barbara Simoni

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/18

Abstract: A micromechanical structure for a MEMS three-axis capacitive accelerometer is provided with: a substrate; a single inertial mass having a main extension in a plane and arranged suspended above the substrate; and a frame element, elastically coupled to the inertial mass by coupling elastic elements and to anchorages, which are fixed with respect to the substrate by anchorage elastic elements. The coupling elastic elements and the anchorage elastic elements are configured so as to enable a first inertial movement of the inertial mass in response to a first external acceleration acting in a direction lying in the plane and also a second inertial movement of the inertial mass in response to a second external acceleration acting in a direction transverse to the plane.

Abstract translation: 用于MEMS三轴电容式加速度计的微机械结构设有：基板; 一个单一的惯性质量体，它在一个平面上具有一个主要的延伸部分，并悬置在衬底上; 以及框架元件，其通过联接弹性元件和锚固件而弹性地联接到惯性块，锚定件通过锚固弹性元件相对于基底固定。 联接弹性元件和锚固弹性元件构造成使得能够响应于沿着平面中的方向起作用的第一外部加速度以及惯性块的第二惯性运动来响应惯性质量的第一惯性运动 到横向于该平面的方向作用的第二外部加速度。

公开(公告)号：US20080173959A1

公开(公告)日：2008-07-24

申请号：US12014563

申请日：2008-01-15

Applicant: Angelo Antonio Merassi ,  Sarah Zerbini ,  Barbara Simoni

Inventor： Angelo Antonio Merassi ,  Sarah Zerbini ,  Barbara Simoni

IPC: H01L29/84 ,  H01L21/00

CPC classification number: B81B3/0051 ,  B81B2201/0235 ,  G01P15/0802 ,  G01P2015/0831

Abstract: In a microelectromechanical device, a mobile mass is suspended above a substrate via elastic suspension elements and is rotatable about said elastic suspension elements, a cover structure is set above the mobile mass and has an internal surface facing the mobile mass, and a stopper structure is arranged at the internal surface of the cover structure and extends towards the mobile mass in order to stop a movement of the mobile mass away from the substrate along an axis (z) transverse to the substrate. The stopper structure is arranged with respect to the mobile mass so as to reduce an effect of reciprocal electrostatic interaction, in particular so as to minimize a resultant twisting moment of the mobile mass about the elastic suspension elements.

Abstract translation: 在微机电装置中，移动物质通过弹性悬挂元件悬挂在基底上方并且可围绕所述弹性悬挂元件旋转，盖结构设置在移动质量块的上方并具有面向移动质量块的内表面，并且止动结构 布置在盖结构的内表面并朝着移动块延伸，以便沿横向于基底的轴线（z）停止移动块离开基底的运动。 止动器结构相对于移动物质布置，以便减少相互静电相互作用的影响，特别是使得可移动物体围绕弹性悬挂元件的最终扭转力矩最小化。

公开(公告)号：US08516889B2

公开(公告)日：2013-08-27

申请号：US12875000

申请日：2010-09-02

Applicant: Barbara Simoni ,  Claudia Comi ,  Alberto Corigliano

Inventor： Barbara Simoni ,  Claudia Comi ,  Alberto Corigliano

IPC: G01P15/097 ,  G01P15/10

CPC classification number: G01P15/097 ,  G01P15/10

Abstract: A MEMS resonant accelerometer is disclosed, having: a proof mass coupled to a first anchoring region via a first elastic element so as to be free to move along a sensing axis in response to an external acceleration; and a first resonant element mechanically coupled to the proof mass through the first elastic element so as to be subject to a first axial stress when the proof mass moves along the sensing axis and thus to a first variation of a resonant frequency. The MEMS resonant accelerometer is further provided with a second resonant element mechanically coupled to the proof mass through a second elastic element so as to be subject to a second axial stress when the proof mass moves along the sensing axis, substantially opposite to the first axial stress, and thus to a second variation of a resonant frequency, opposite to the first variation.

Abstract translation: 公开了一种MEMS谐振加速度计，其具有：经由第一弹性元件耦合到第一锚定区域的检测质量，以便响应于外部加速度沿感测轴线自由移动; 以及第一谐振元件，其通过所述第一弹性元件机械耦合到所述检验质量块，以便当所述检测质量沿着所述感测轴线移动并且因此达到谐振频率的第一变化时，经受第一轴向应力。 MEMS谐振加速度计进一步设置有第二谐振元件，其通过第二弹性元件机械耦合到校准物质，以便当检测质量沿着感测轴线移动时受到第二轴向应力，基本上与第一轴向应力相反 ，从而达到与第一变化相反的谐振频率的第二变化。

公开(公告)号：US08434364B2

公开(公告)日：2013-05-07

申请号：US12846500

申请日：2010-07-29

Applicant: Gabriele Cazzaniga ,  Luca Coronato ,  Barbara Simoni

Inventor： Gabriele Cazzaniga ,  Luca Coronato ,  Barbara Simoni

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01C19/5712 ,  G01C19/5755 ,  G01C19/5769 ,  G01P15/02 ,  G01P2015/0831

Abstract: A MEMS detection structure is provided with: a substrate having a top surface, on which a first fixed-electrode arrangement is set; a sensing mass, extending in a plane and suspended above the substrate and above the first fixed-electrode arrangement at a separation distance; and connection elastic elements that support the sensing mass so that it is free to rotate out of the plane about an axis of rotation, modifying the separation distance, as a function of a quantity to be detected along an axis orthogonal to the plane. The MEMS detection structure also includes: a coupling mass, suspended above the substrate and connected to the sensing mass via the connection elastic elements; and an anchoring arrangement, which anchors the coupling mass to the substrate with a first point of constraint, set at a distance from the axis of rotation and in a position corresponding to the first fixed-electrode arrangement.

Abstract translation: MEMS检测结构设置有：具有顶表面的基板，其上设置有第一固定电极布置; 感测质量块，在平面内延伸并悬挂在衬底上方，并以分隔距离悬挂在第一固定电极装置上方; 以及连接弹性元件，其支撑感测质量，使得其可以围绕旋转轴线自由地旋转离开平面，根据沿着与该平面垂直的轴线被检测的量来修改分离距离。 MEMS检测结构还包括：耦合质量块，悬挂在衬底上并通过连接弹性元件连接到感测质量块; 以及锚定装置，其将耦合质量块固定到具有第一限制点的衬底上，该第一约束点设置在距旋转轴线一定距离处，并且位于对应于第一固定电极装置的位置。

公开(公告)号：US20110023604A1

公开(公告)日：2011-02-03

申请号：US12846500

申请日：2010-07-29

Applicant: Gabriele Cazzaniga ,  Luca Coronato ,  Barbara Simoni

Inventor： Gabriele Cazzaniga ,  Luca Coronato ,  Barbara Simoni

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01C19/5712 ,  G01C19/5755 ,  G01C19/5769 ,  G01P15/02 ,  G01P2015/0831

Abstract: A MEMS detection structure is provided with: a substrate having a top surface, on which a first fixed-electrode arrangement is set; a sensing mass, extending in a plane and suspended above the substrate and above the first fixed-electrode arrangement at a separation distance; and connection elastic elements that support the sensing mass so that it is free to rotate out of the plane about an axis of rotation, modifying the separation distance, as a function of a quantity to be detected along an axis orthogonal to the plane. The MEMS detection structure also includes: a coupling mass, suspended above the substrate and connected to the sensing mass via the connection elastic elements; and an anchoring arrangement, which anchors the coupling mass to the substrate with a first point of constraint, set at a distance from the axis of rotation and in a position corresponding to the first fixed-electrode arrangement.

Abstract translation: MEMS检测结构设置有：具有顶表面的基板，其上设置有第一固定电极布置; 感测质量块，在平面内延伸并悬挂在衬底上方，并以分隔距离悬挂在第一固定电极装置上方; 以及连接弹性元件，其支撑感测质量，使得其可以围绕旋转轴线自由地旋转离开平面，根据沿着与该平面垂直的轴线被检测的量来修改分离距离。 MEMS检测结构还包括：耦合质量块，悬挂在衬底上并通过连接弹性元件连接到感测质量块; 以及锚定装置，其将耦合质量块固定到具有第一限制点的衬底上，该第一约束点设置在距旋转轴线一定距离处，并且位于对应于第一固定电极装置的位置。

公开(公告)号：US20090194397A1

公开(公告)日：2009-08-06

申请号：US12359556

申请日：2009-01-26

Applicant: Angelo Merassi ,  Mario Francesco Cortese ,  Fultio Viola ,  Barbara Simoni ,  Andrea Rusconi Clerici Beltrami

Inventor： Angelo Merassi ,  Mario Francesco Cortese ,  Fultio Viola ,  Barbara Simoni ,  Andrea Rusconi Clerici Beltrami

IPC: H01H35/14

CPC classification number: B81B3/0051 ,  B81B2201/0235 ,  B81B2201/0242 ,  G01P15/08 ,  G01P15/125 ,  G01P2015/0828

Abstract: A microelectromechanical device has a mobile mass that undergoes a movement, in particular a spurious movement, in a first direction in response to an external event; the device moreover has a stopper structure configured so as to stop said spurious movement. In particular, a stopper element is fixedly coupled to the mobile mass and is configured so as to abut against a stopper mass in response to the spurious movement, thereby stopping it. In detail, the stopper element is arranged on the opposite side of the stopper mass with respect to a direction of the spurious movement, protrudes from the space occupied by the mobile mass and extends in the space occupied by the stopper mass, in the first direction.

Abstract translation: 微机电装置具有响应于外部事件在第一方向上经历移动，特别是杂散运动的移动质量; 该装置还具有阻止结构，以便停止所述杂散运动。 特别地，止动元件固定地联接到移动块上，并被配置为响应于伪运动而抵靠止动块，从而停止它。 详细地说，止动件相对于杂散运动的方向设置在止动块的相对侧上，从移动体所占据的空间突出，并且在第一方向上在止动块所占据的空间中延伸 。