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1.发明授权公开(公告)号：US07611319B2
公开(公告)日：2009-11-03
申请号：US11154932
申请日：2005-06-16
IPC分类号： B65B69/00
CPC分类号： H01L21/67265 , H01L21/67379 , H01L21/67775 , Y10S414/135 , Y10S414/14
摘要： In at least one aspect, a system is provided that includes (1) a substrate carrier having first docking features; and (2) a loadport having second docking features. The second docking features are adapted to block docking of substrate carriers that do not include the first docking features and to allow docking of substrate carriers that include the first docking features. Numerous other aspects are provided.
摘要翻译： 在至少一个方面，提供了一种系统，其包括（1）具有第一对接特征的衬底载体; 和（2）具有第二对接特征的装载端口。 第二对接特征适于阻止不包括第一对接特征的衬底载体的对接并允许对接包括第一对接特征的衬底载体。 提供了许多其他方面。
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公开(公告)号：US07577487B2
公开(公告)日：2009-08-18
申请号：US11521070
申请日：2006-09-13
申请人： Robert B. Lowrance , Eric Andrew Englhardt , Michael R. Rice , Vinay Shah , Sushant S. Koshti , Jeffrey C. Hudgens
发明人： Robert B. Lowrance , Eric Andrew Englhardt , Michael R. Rice , Vinay Shah , Sushant S. Koshti , Jeffrey C. Hudgens
CPC分类号： B65G47/52 , B65G29/00 , B65G47/28 , B65G2203/025 , H01L21/67706 , H01L21/67715 , Y10S414/135 , Y10S414/14
摘要： A band to band transfer module according to the present invention may be used with a substrate carrier transport system, or other systems, to transfer substrate carriers (e.g., small lot substrate carriers) from one conveyor to another conveyor or between two points on the same conveyor. The transfers (e.g., pick and place) of the substrate carriers may be made between conveyors traveling at different speeds. Numerous other aspects and features are disclosed.
摘要翻译： 根据本发明的带带传输模块可以与衬底载体传输系统或其他系统一起使用，以将衬底载体（例如，小批量衬底载体）从一个传送器转移到另一个传送器或在相同的两个点之间 输送带。 可以在以不同速度行进的输送机之间形成基板载体的传送（例如拾取和放置）。 公开了许多其他方面和特征。
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3.发明授权Substrate carrier handler that unloads substrate carriers directly from a moving conveyer 有权基板载体处理器，可直接从移动的输送机卸载基板载体公开(公告)号：US07346431B2
公开(公告)日：2008-03-18
申请号：US11555240
申请日：2006-10-31
申请人： Michael Robert Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric Andrew Englhardt
发明人： Michael Robert Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric Andrew Englhardt
IPC分类号： G06F19/00
CPC分类号： B65G37/02 , B65G47/61 , B65G2201/0297 , H01L21/67769 , H01L21/67775 , H01L21/67778
摘要： In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.
摘要翻译： 在第一方面中，基板装载站由连续输送基板载体的输送机供给。 作为基板装载站的一部分的基板载体处理器在输送机运动的同时与输送机交换基板载体。 载体交换过程可以包括以基本匹配输送机速度的速度移动基底载体处理器的端部执行器。 提供了许多其他方面。
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4.发明授权Methods and apparatus for using substrate carrier movement to actuate substrate carrier door opening/closing 有权使用基板载体运动来驱动基板载体门打开/关闭的方法和装置公开(公告)号：US07258520B2
公开(公告)日：2007-08-21
申请号：US10650312
申请日：2003-08-28
申请人： Martin R. Elliott , Michael Robert Rice , Robert B. Lowrance , Jeffrey C. Hudgens , Eric Andrew Englhardt , Loy Randall Stuart
发明人： Martin R. Elliott , Michael Robert Rice , Robert B. Lowrance , Jeffrey C. Hudgens , Eric Andrew Englhardt , Loy Randall Stuart
CPC分类号： H01L21/67353 , H01L21/67373 , H01L21/67379 , H01L21/67386 , H01L21/67772 , Y10S414/139
摘要： A system for opening a substrate carrier includes a substrate carrier having an openable portion. The substrate carrier also has an opening mechanism coupled to the openable portion. A substrate transfer location has a support adapted to support a substrate carrier. The substrate transfer location also has an actuator mechanism. The actuator mechanism is positioned relative to the support so as to interact with the opening mechanism of the substrate carrier. The actuator mechanism of the substrate transfer location and the opening mechanism of the substrate carrier are adapted to interface with each other at the substrate transfer location so as to employ movement of the substrate carrier to achieve opening and closing of the substrate carrier.
摘要翻译： 用于打开衬底载体的系统包括具有可打开部分的衬底载体。 衬底托架还具有联接到可打开部分的打开机构。 衬底转移位置具有适于支撑衬底载体的支撑件。 基板转印位置也具有致动器机构。 致动器机构相对于支撑件定位，以便与衬底载体的开启机构相互作用。 衬底传送位置的致动器机构和衬底载体的打开机构适于在衬底传送位置处彼此接合，以便采用衬底载体的移动来实现衬底载体的打开和闭合。
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公开(公告)号：US07778721B2
公开(公告)日：2010-08-17
申请号：US11148956
申请日：2005-06-09
申请人： Eric Andrew Englhardt , Vinay Shah
发明人： Eric Andrew Englhardt , Vinay Shah
IPC分类号： G06F19/00
CPC分类号： H01L21/67727 , H01L21/67276 , Y10S414/14
摘要： In a first aspect, a small lot size lithography bay is provided. The small lot size lithography bay includes (1) a plurality of lithography tools; and (2) a small lot size transport system adapted to transport small lot size substrate carriers to the lithography tools. Each small lot size substrate carrier is adapted to hold fewer than 13 substrates. Numerous other aspects are provided.
摘要翻译： 在第一方面，提供了小批量尺寸的光刻托架。 小尺寸光刻托架包括（1）多个光刻工具; 和（2）适用于将小批量尺寸基板载体运送到光刻工具的小批量输送系统。 每个小批量尺寸的衬底载体适于容纳少于13个衬底。 提供了许多其他方面。
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6.发明授权Substrate carrier handler that unloads substrate carriers directly from a moving conveyor 有权基板载体处理器，可直接从移动的输送机卸载基板托架公开(公告)号：US07243003B2
公开(公告)日：2007-07-10
申请号：US10650480
申请日：2003-08-28
申请人： Michael Robert Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric Andrew Englhardt
发明人： Michael Robert Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric Andrew Englhardt
IPC分类号： G06F19/00
CPC分类号： B65G37/02 , B65G47/61 , B65G2201/0297 , H01L21/67769 , H01L21/67775 , H01L21/67778
摘要： In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.
摘要翻译： 在第一方面中，基板装载站由连续输送基板载体的输送机供给。 作为基板装载站的一部分的基板载体处理器在输送机运动的同时与输送机交换基板载体。 载体交换过程可以包括以基本匹配输送机速度的速度移动基底载体处理器的端部执行器。 提供了许多其他方面。
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7.发明授权Substrate carrier handler that unloads substrate carriers directly from a moving conveyor 有权基板载体处理器，可直接从移动的输送机卸载基板托架公开(公告)号：US07792608B2
公开(公告)日：2010-09-07
申请号：US11838155
申请日：2007-08-13
申请人： Michael Robert Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric Andrew Englhardt
发明人： Michael Robert Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric Andrew Englhardt
IPC分类号： G06F19/00
CPC分类号： B65G37/02 , B65G47/61 , B65G2201/0297 , H01L21/67769 , H01L21/67775 , H01L21/67778
摘要： In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.
摘要翻译： 在第一方面中，基板装载站由连续输送基板载体的输送机供给。 作为基板装载站的一部分的基板载体处理器在输送机运动的同时与输送机交换基板载体。 载体交换过程可以包括以基本匹配输送机速度的速度移动基底载体处理器的端部执行器。 提供了许多其他方面。
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8.发明授权Substrate carrier handler that unloads substrate carriers directly from a moving conveyor 有权基板载体处理器，可直接从移动的输送机卸载基板托架公开(公告)号：US07359767B2
公开(公告)日：2008-04-15
申请号：US11488873
申请日：2006-07-18
申请人： Michael Robert Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric Andrew Englhardt
发明人： Michael Robert Rice , Martin R. Elliott , Robert B. Lowrance , Jeffrey C. Hudgens , Eric Andrew Englhardt
IPC分类号： G06F19/00
CPC分类号： B65G37/02 , B65G47/61 , B65G2201/0297 , H01L21/67769 , H01L21/67775 , H01L21/67778
摘要： In a first aspect, a substrate loading station is served by a conveyor which continuously transports substrate carriers. A substrate carrier handler that is part of the substrate loading station operates to exchange substrate carriers with the conveyor while the conveyor is in motion. A carrier exchange procedure may include moving an end effector of the substrate carrier handler at a velocity that substantially matches a velocity of the conveyor. Numerous other aspects are provided.
摘要翻译： 在第一方面中，基板装载站由连续输送基板载体的输送机供给。 作为基板装载站的一部分的基板载体处理器在输送机运动的同时与输送机交换基板载体。 载体交换过程可以包括以基本匹配输送机速度的速度移动基底载体处理器的端部执行器。 提供了许多其他方面。
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