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    Optically transduced MEMS gyro device
    2.
    发明授权
    Optically transduced MEMS gyro device 有权
    光导MEMS陀螺仪

    公开(公告)号：US08726730B1

    公开(公告)日：2014-05-20

    申请号：US13325683

    申请日：2011-12-14

    Applicant: Gregory N. Nielson ,  Gregory R. Bogart ,  Eric Langlois ,  Murat Okandan

    Inventor： Gregory N. Nielson ,  Gregory R. Bogart ,  Eric Langlois ,  Murat Okandan

    IPC: G01P3/00 ,  G01C19/00

    CPC classification number: G01C19/5726 ,  G01C19/5733

    Abstract: A bulk micromachined vibratory gyro in which a proof mass has a bulk substrate thickness for a large mass and high inertial sensitivity. In embodiments, optical displacement transduction is with multi-layer sub-wavelength gratings for high sensitivity and low cross-talk with non-optical drive elements. In embodiments, the vibratory gyro includes a plurality of multi-layer sub-wavelength gratings and a plurality of drive electrodes to measure motion of the proof mass induced by drive forces and/or moments and induced by the Coriolis Effect when the gyro experiences a rotation. In embodiments, phase is varied across the plurality gratings and a multi-layer grating having the best performance is selected from the plurality.

    Abstract translation: 一种体积微加工的振动陀螺仪，其中质量块具有大的质量和高惯性灵敏度的体积衬底厚度。 在实施例中，光学位移转换是与用于高灵敏度和与非光学驱动元件的低串扰的多层亚波长光栅。 在实施例中，振动陀螺仪包括多个多层亚波长光栅和多个驱动电极，用于测量当陀螺仪经历旋转时由驱动力和/或力矩引起的和由科里奥利效应引起的检测质量的运动 。 在实施例中，在多个光栅之间改变相位，并且从多个光栅中选择具有最佳性能的多层光栅。

    Optically transduced MEMS magnetometer
    3.
    发明授权
    Optically transduced MEMS magnetometer 有权
    光学传感MEMS磁强计

    公开(公告)号：US08674689B1

    公开(公告)日：2014-03-18

    申请号：US13326139

    申请日：2011-12-14

    Applicant: Gregory N. Nielson ,  Eric Langlois

    Inventor： Gregory N. Nielson ,  Eric Langlois

    IPC: G01R33/02

    CPC classification number: G01R33/0286 ,  G01R33/032

    Abstract: MEMS magnetometers with optically transduced resonator displacement are described herein. Improved sensitivity, crosstalk reduction, and extended dynamic range may be achieved with devices including a deflectable resonator suspended from the support, a first grating extending from the support and disposed over the resonator, a pair of drive electrodes to drive an alternating current through the resonator, and a second grating in the resonator overlapping the first grating to form a multi-layer grating having apertures that vary dimensionally in response to deflection occurring as the resonator mechanically resonates in a plane parallel to the first grating in the presence of a magnetic field as a function of the Lorentz force resulting from the alternating current. A plurality of such multi-layer gratings may be disposed across a length of the resonator to provide greater dynamic range and/or accommodate fabrication tolerances.

    Abstract translation: 这里描述了具有光学转换的谐振器位移的MEMS磁力计。 可以使用包括从支撑件悬挂的可偏转共振器的装置，从支撑件延伸并设置在谐振器上方的第一光栅，用于驱动通过谐振器的交流电流的一对驱动电极来实现灵敏度提高，串扰减小和扩展动态范围 ，并且谐振器中的第二光栅与第一光栅重叠以形成具有孔的多层光栅，其具有响应于在存在磁场的情况下谐振器在与第一光栅平行的平面中机械谐振时发生的偏转而尺寸变化的孔 由交流电产生的洛伦兹力的函数。 多个这样的多层光栅可以跨过谐振器的长度设置，以提供更大的动态范围和/或适应制造公差。

    Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode
    4.
    发明授权
    Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode 有权
    制造完全集成和封装的微制造真空二极管的方法

    公开(公告)号：US08814622B1

    公开(公告)日：2014-08-26

    申请号：US13298448

    申请日：2011-11-17

    Applicant: Paul J. Resnick ,  Eric Langlois

    Inventor： Paul J. Resnick ,  Eric Langlois

    IPC: H01J9/04 ,  H01J3/02 ,  H01J9/02

    CPC classification number: H01J1/308 ,  H01J1/3044 ,  H01J1/36 ,  H01J3/022 ,  H01J9/025 ,  H01J9/14 ,  H01J19/24 ,  H01J19/32 ,  H01J19/46 ,  H01J19/54 ,  H01J21/20

    Abstract: Disclosed is an encapsulated micro-diode and a method for producing same. The method comprises forming a plurality columns in the substrate with a respective tip disposed at a first end of the column, the tip defining a cathode of the diode; disposing a sacrificial oxide layer on the substrate, plurality of columns and respective tips; forming respective trenches in the sacrificial oxide layer around the columns; forming an opening in the sacrificial oxide layer to expose a portion of the tips; depositing a conductive material in of the opening and on a surface of the substrate to form an anode of the diode; and removing the sacrificial oxide layer.

    Abstract translation: 公开了一种封装微型二极管及其制造方法。 该方法包括在衬底中形成多个柱，其中相应的尖端设置在柱的第一端，尖端限定二极管的阴极; 在基板上设置牺牲氧化物层，多个柱和各个尖端; 在柱周围的牺牲氧化物层中形成相应的沟槽; 在所述牺牲氧化物层中形成开口以暴露所述尖端的一部分; 在所述开口和所述衬底的表面上沉积导电材料以形成所述二极管的阳极; 并去除牺牲氧化物层。

    Micromachined force-balance feedback accelerometer with optical displacement detection
    5.
    发明授权
    Micromachined force-balance feedback accelerometer with optical displacement detection 有权
    微机械力平衡反馈加速度计与光学位移检测

    公开(公告)号：US08783106B1

    公开(公告)日：2014-07-22

    申请号：US13324012

    申请日：2011-12-13

    Applicant: Gregory N. Nielson ,  Eric Langlois ,  Michael Baker ,  Murat Okandan ,  Robert Anderson

    Inventor： Gregory N. Nielson ,  Eric Langlois ,  Michael Baker ,  Murat Okandan ,  Robert Anderson

    IPC: G01P15/093

    CPC classification number: G01P15/093

    Abstract: An accelerometer includes a proof mass and a frame that are formed in a handle layer of a silicon-on-an-insulator (SOI). The proof mass is separated from the frame by a back-side trench that defines a boundary of the proof mass. The accelerometer also includes a reflector coupled to a top surface of the proof mass. An optical detector is located above the reflector at the device side. The accelerometer further includes at least one suspension spring. The suspension spring has a handle anchor that extends downwards from the device side to the handle layer to mechanically support upward and downward movement of the proof mass relative to a top surface of the proof mass.

    Abstract translation: 加速度计包括形成在绝缘体上硅（SOI）的手柄层中的校验块和框架。 检测质量通过限定检测质量的边界的背面沟槽与框架分离。 加速度计还包括耦合到证明块顶表面的反射器。 光学检测器位于设备侧的反射器上方。 加速度计还包括至少一个悬架弹簧。 悬架弹簧具有从装置侧向下延伸到把手层的手柄锚，以机械地支撑证明块相对于证明块的顶表面的向上和向下运动。

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