Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode
    3.
    发明授权
    Method of manufacturing a fully integrated and encapsulated micro-fabricated vacuum diode 有权
    制造完全集成和封装的微制造真空二极管的方法

    公开(公告)号:US08814622B1

    公开(公告)日:2014-08-26

    申请号:US13298448

    申请日:2011-11-17

    IPC分类号: H01J9/04 H01J3/02 H01J9/02

    摘要: Disclosed is an encapsulated micro-diode and a method for producing same. The method comprises forming a plurality columns in the substrate with a respective tip disposed at a first end of the column, the tip defining a cathode of the diode; disposing a sacrificial oxide layer on the substrate, plurality of columns and respective tips; forming respective trenches in the sacrificial oxide layer around the columns; forming an opening in the sacrificial oxide layer to expose a portion of the tips; depositing a conductive material in of the opening and on a surface of the substrate to form an anode of the diode; and removing the sacrificial oxide layer.

    摘要翻译: 公开了一种封装微型二极管及其制造方法。 该方法包括在衬底中形成多个柱,其中相应的尖端设置在柱的第一端,尖端限定二极管的阴极; 在基板上设置牺牲氧化物层,多个柱和各个尖端; 在柱周围的牺牲氧化物层中形成相应的沟槽; 在所述牺牲氧化物层中形成开口以暴露所述尖端的一部分; 在所述开口和所述衬底的表面上沉积导电材料以形成所述二极管的阳极; 并去除牺牲氧化物层。

    Photovoltaic solar concentrator
    4.
    发明授权
    Photovoltaic solar concentrator 有权
    光伏太阳能集中器

    公开(公告)号:US08329503B1

    公开(公告)日:2012-12-11

    申请号:US12957082

    申请日:2010-11-30

    IPC分类号: H01L21/00

    摘要: A photovoltaic solar concentrator is disclosed with one or more transverse-junction solar cells (also termed point contact solar cells) and a lens located above each solar cell to concentrate sunlight onto the solar cell to generate electricity. Piezoelectric actuators tilt or translate each lens to track the sun using a feedback-control circuit which senses the electricity generated by one or more of the solar cells. The piezoelectric actuators can be coupled through a displacement-multiplier linkage to provide an increased range of movement of each lens. Each lens in the solar concentrator can be supported on a frame (also termed a tilt plate) having three legs, with the movement of the legs being controlled by the piezoelectric actuators.

    摘要翻译: 公开了具有一个或多个横向结太阳能电池(也称为点接触太阳能电池)的光伏太阳能集中器和位于每个太阳能电池上方的透镜,以将太阳光集中到太阳能电池上以发电。 压电执行器使用反馈控制电路倾斜或平移每个透镜来跟踪太阳,所述反馈控制电路感测由一个或多个太阳能电池产生的电力。 压电致动器可以通过位移 - 倍增器联动来耦合,以提供每个透镜的增加的运动范围。 太阳能集中器中的每个透镜可以被支撑在具有三个腿的框架(也称为倾斜板)上,腿的移动由压电致动器控制。

    Integrated field emission array for ion desorption
    6.
    发明授权
    Integrated field emission array for ion desorption 有权
    用于离子解吸的集成场发射阵列

    公开(公告)号:US08536564B1

    公开(公告)日:2013-09-17

    申请号:US13246985

    申请日:2011-09-28

    IPC分类号: H01L29/06

    摘要: An integrated field emission array for ion desorption includes an electrically conductive substrate; a dielectric layer lying over the electrically conductive substrate comprising a plurality of laterally separated cavities extending through the dielectric layer; a like plurality of conically-shaped emitter tips on posts, each emitter tip/post disposed concentrically within a laterally separated cavity and electrically contacting the substrate; and a gate electrode structure lying over the dielectric layer, including a like plurality of circular gate apertures, each gate aperture disposed concentrically above an emitter tip/post to provide a like plurality of annular gate electrodes and wherein the lower edge of each annular gate electrode proximate the like emitter tip/post is rounded. Also disclosed herein are methods for fabricating an integrated field emission array.

    摘要翻译: 用于离子解吸的集成场致发射阵列包括导电基片; 位于所述导电衬底上方的介电层包括延伸穿过所述电介质层的多个横向隔开的空腔; 在柱上具有相似的多个锥形发射器尖端,每个发射极尖端/柱同心地设置在横向分离的空腔内并与衬底电接触; 以及位于电介质层上方的栅极电极结构,包括相似的多个圆形栅极孔,每个栅极孔同心地设置在发射极尖端/柱上方,以提供相似的多个环形栅电极,并且其中每个环形栅电极的下边缘 靠近相似的发射器尖端/柱是圆形的。 本文还公开了用于制造集成场致发射阵列的方法。