Fully integrated and encapsulated micro-fabricated vacuum diode and method of manufacturing same
    3.
    发明授权
    Fully integrated and encapsulated micro-fabricated vacuum diode and method of manufacturing same 有权
    完全集成和封装的微制造真空二极管及其制造方法

    公开(公告)号:US09202657B1

    公开(公告)日:2015-12-01

    申请号:US14340012

    申请日:2014-07-24

    摘要: Disclosed is an encapsulated micro-diode and a method for producing same. The method comprises forming a plurality columns in the substrate with a respective tip disposed at a first end of the column, the tip defining a cathode of the diode; disposing a sacrificial oxide layer on the substrate, plurality of columns and respective tips; forming respective trenches in the sacrificial oxide layer around the columns; forming an opening in the sacrificial oxide layer to expose a portion of the tips; depositing a conductive material in of the opening and on a surface of the substrate to form an anode of the diode; and removing the sacrificial oxide layer.

    摘要翻译: 公开了一种封装微型二极管及其制造方法。 该方法包括在衬底中形成多个柱,其中相应的顶端设置在柱的第一端,尖端限定二极管的阴极; 在基板上设置牺牲氧化物层,多个柱和各个尖端; 在柱周围的牺牲氧化物层中形成相应的沟槽; 在所述牺牲氧化物层中形成开口以暴露所述尖端的一部分; 在所述开口和所述衬底的表面上沉积导电材料以形成所述二极管的阳极; 并去除牺牲氧化物层。

    Radio-frequency amplifier
    4.
    发明授权
    Radio-frequency amplifier 失效
    射频放大器

    公开(公告)号:US4559476A

    公开(公告)日:1985-12-17

    申请号:US536086

    申请日:1983-09-27

    申请人: Merle V. Hoover

    发明人: Merle V. Hoover

    CPC分类号: H03F3/60 H01J21/20 H01J25/10

    摘要: A radio-frequency amplifier includes at least two double-ended electron discharge devices in coaxial-type, radio-frequency cavity-resonator circuits. Each discharge device has a discharge region so that the amplifier comprises a plurality of longitudinally spaced-apart, electrically connected discharge regions. Each of the discharge regions has a cathode with an anode circumscribing the cathode. At least one grid electrode is disposed between the cathode and the anode. A coaxial input transmission line is loop-coupled to an input cavity-resonator circuit and a coaxial output transmission line is loop-coupled to an output cavity-resonator circuit.

    摘要翻译: 射频放大器包括同轴型射频谐振腔电路中的至少两个双端电子放电装置。 每个放电装置具有放电区域,使得放大器包括多个纵向间隔开的电连接的放电区域。 每个放电区域具有阴极,阳极限定阴极。 至少一个栅电极设置在阴极和阳极之间。 同轴输入传输线环路耦合到输入腔谐振器电路,并且同轴输出传输线环路耦合到输出腔谐振器电路。