Resistance-type random access memory device having three-dimensional bit line and word line patterning
    2.
    发明授权
    Resistance-type random access memory device having three-dimensional bit line and word line patterning 有权
    具有三维位线和字线图案的电阻型随机存取存储器件

    公开(公告)号:US08338224B2

    公开(公告)日:2012-12-25

    申请号:US12621007

    申请日:2009-11-18

    IPC分类号: H01L21/06

    摘要: Provided is a resistance random access memory device and a method of fabricating, the same. The method includes forming a bit-line stack in which a plurality of local bit-lines are vertically stacked on a substrate, forming a word-line including a plurality of local word-lines that extend in a vertical direction toward a side of the bit-line stack and a connection line that extends in a horizontal direction to connect the plurality of local word-lines with one another, and forming a resistance memory thin film between the bit-line stack and the word-line. The present inventive concept can realize a highly dense memory array with 3D cross-point architecture by simplified processes.

    摘要翻译: 提供一种电阻随机存取存储器件及其制造方法。 该方法包括形成位线堆叠,其中多个局部位线垂直堆叠在基板上,形成包括在垂直方向上朝向该位的一侧延伸的多个局部字线的字线 线堆叠和连接线,其在水平方向上延伸以将多个本地字线彼此连接,并且在位线堆叠和字线之间形成电阻存储器薄膜。 本发明的概念可以通过简化的过程实现具有3D交叉点架构的高密度存储器阵列。

    Resistance-Type Random Access Memory Device Having Three-Dimensional Bit Line and Word Line Patterning
    3.
    发明申请
    Resistance-Type Random Access Memory Device Having Three-Dimensional Bit Line and Word Line Patterning 有权
    具有三维位线和字线图形的电阻型随机存取存储器件

    公开(公告)号:US20100178729A1

    公开(公告)日:2010-07-15

    申请号:US12621007

    申请日:2009-11-18

    IPC分类号: H01L21/16

    摘要: Provided is a resistance random access memory device and a method of fabricating, the same. The method includes forming a bit-line stack in which a plurality of local bit-lines are vertically stacked on a substrate, forming a word-line including a plurality of local word-lines that extend in a vertical direction toward a side of the bit-line stack and a connection line that extends in a horizontal direction to connect the plurality of local word-lines with one another, and forming a resistance memory thin film between the bit-line stack and the word-line. The present inventive concept can realize a highly dense memory array with 3D cross-point architecture by simplified processes.

    摘要翻译: 提供一种电阻随机存取存储器件及其制造方法。 该方法包括形成位线堆叠,其中多个局部位线垂直堆叠在基板上,形成包括在垂直方向上朝向该位的一侧延伸的多个局部字线的字线 线堆叠和连接线,其在水平方向上延伸以将多个本地字线彼此连接,并且在位线堆叠和字线之间形成电阻存储器薄膜。 本发明的概念可以通过简化的过程实现具有3D交叉点架构的高密度存储器阵列。

    THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME
    5.
    发明申请
    THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICE AND METHOD OF FABRICATING THE SAME 审中-公开
    三维半导体存储器件及其制造方法

    公开(公告)号:US20160276365A1

    公开(公告)日:2016-09-22

    申请号:US15066619

    申请日:2016-03-10

    IPC分类号: H01L27/115 H01L29/10

    摘要: A semiconductor memory device includes a stack including gate electrodes sequentially stacked on a substrate, a vertical insulating structure penetrating the stack vertically with respect to the gate electrodes, a vertical channel portion disposed on an inner side surface of the vertical insulating structure, and a common source region formed in the substrate and spaced apart from the vertical channel portion. A bottom region of the vertical channel portion has a protruding surface in contact with a bottom region of the vertical insulating structure.

    摘要翻译: 一种半导体存储器件包括:堆叠,其包括依次层叠在基板上的栅极电极,相对于栅电极垂直地贯穿堆叠体的垂直绝缘结构,设置在垂直绝缘结构的内侧面的垂直沟道部, 源极区域形成在衬底中并且与垂直沟道部分间隔开。 垂直通道部分的底部区域具有与垂直绝缘结构的底部区域接触的突出表面。

    NONVOLATILE MEMORY DEVICE
    6.
    发明申请
    NONVOLATILE MEMORY DEVICE 有权
    非易失性存储器件

    公开(公告)号:US20100271862A1

    公开(公告)日:2010-10-28

    申请号:US12765411

    申请日:2010-04-22

    IPC分类号: G11C11/00 G11C8/00

    摘要: A nonvolatile memory device includes resistive memory devices in a three-dimensional structure. A block select circuit generates a block select signal for selecting a memory block. In response to the block select signal, local word line selection units connected to each memory block connect global word lines connected to a word line decoder and local word lines, and local bit line selection units connected to each memory block connect global bit lines connected to a sense amplifier and local bit lines. Each memory block includes local word lines which extend in a first direction and are stacked in a second direction perpendicular to the first direction on a second plane perpendicular to a first plane. Local bit lines extend in the second direction to cross local word lines. Memory cells are formed at cross-points where local word lines and local bit lines cross one another.

    摘要翻译: 非易失性存储器件包括三维结构中的电阻式存储器件。 块选择电路产生用于选择存储块的块选择信号。 响应于块选择信号,连接到每个存储器块的局部字线选择单元连接连接到字线解码器和本地字线的全局字线,并且连接到每个存储器块的局部位线选择单元将连接到 一个读出放大器和本地位线。 每个存储块包括在垂直于第一平面的第二平面上沿第一方向延伸并且沿垂直于第一方向的第二方向堆叠的局部字线。 局部位线在第二个方向上延伸以跨越局部字线。 存储单元在本地字线和局部位线交叉的交点处形成。

    Methods of forming phase-changeable memory devices using growth-enhancing and growth-inhibiting layers for phase-changeable materials
    7.
    发明授权
    Methods of forming phase-changeable memory devices using growth-enhancing and growth-inhibiting layers for phase-changeable materials 失效
    使用用于相变材料的生长增强和生长抑制层形成相变存储器件的方法

    公开(公告)号:US07772067B2

    公开(公告)日:2010-08-10

    申请号:US12039370

    申请日:2008-02-28

    IPC分类号: H01L21/336

    摘要: Methods of forming phase-changeable memory devices include techniques to inhibit void formation in phase-changeable materials in order to increase device reliability. These techniques to inhibit void formation use an electrically insulating growth-inhibiting layer to guide the formation of a phase-changeable material region within a memory cell (e.g., PRAM cell). In particular, methods of forming an integrated circuit memory device include forming an interlayer insulating layer having an opening therein, on a substrate, and then lining sidewalls of the opening with a seed layer (i.e., growth-enhancing layer) that supports growth of a phase-changeable material thereon. An electrically insulating growth-inhibiting layer is then selectively formed on a portion of the interlayer insulating layer surrounding the opening. The formation of the growth-inhibiting layer is followed by a step to selectively grow a phase-changeable material region in the opening, but not on the growth-inhibiting layer.

    摘要翻译: 形成相变存储器件的方法包括抑制相变材料中的空隙形成的技术,以增加器件的可靠性。 抑制空隙形成的这些技术使用电绝缘的生长抑制层来引导存储单元(例如,PRAM单元)内的相变材料区域的形成。 特别地,形成集成电路存储器件的方法包括在衬底上形成其中具有开口的层间绝缘层,然后用支撑生长的种子层(即生长增强层)来衬套开口的侧壁 相变材料。 然后在围绕开口的层间绝缘层的一部分上选择性地形成电绝缘的生长抑制层。 生长抑制层的形成之后是选择性地生长开口中的相变材料区域,而不是在生长抑制层上生长的步骤。

    METHODS OF FORMING PHASE-CHANGEABLE MEMORY DEVICES USING GROWTH-ENHANCING AND GROWTH-INHIBITING LAYERS FOR PHASE-CHANGEABLE MATERIALS
    8.
    发明申请
    METHODS OF FORMING PHASE-CHANGEABLE MEMORY DEVICES USING GROWTH-ENHANCING AND GROWTH-INHIBITING LAYERS FOR PHASE-CHANGEABLE MATERIALS 失效
    使用生长增强和生长抑制层形成可更换材料的相变可变存储器件的方法

    公开(公告)号:US20090130797A1

    公开(公告)日:2009-05-21

    申请号:US12039370

    申请日:2008-02-28

    IPC分类号: H01L45/00

    摘要: Methods of forming phase-changeable memory devices include techniques to inhibit void formation in phase-changeable materials in order to increase device reliability. These techniques to inhibit void formation use an electrically insulating growth-inhibiting layer to guide the formation of a phase-changeable material region within a memory cell (e.g., PRAM cell). In particular, methods of forming an integrated circuit memory device include forming an interlayer insulating layer having an opening therein, on a substrate, and then lining sidewalls of the opening with a seed layer (i.e., growth-enhancing layer) that supports growth of a phase-changeable material thereon. An electrically insulating growth-inhibiting layer is then selectively formed on a portion of the interlayer insulating layer surrounding the opening. The formation of the growth-inhibiting layer is followed by a step to selectively grow a phase-changeable material region in the opening, but not on the growth-inhibiting layer.

    摘要翻译: 形成相变存储器件的方法包括抑制相变材料中的空隙形成的技术,以增加器件的可靠性。 抑制空隙形成的这些技术使用电绝缘的生长抑制层来引导存储单元(例如,PRAM单元)内的相变材料区域的形成。 特别地,形成集成电路存储器件的方法包括在衬底上形成其中具有开口的层间绝缘层,然后用支撑生长的种子层(即生长增强层)来衬套开口的侧壁 相变材料。 然后在围绕开口的层间绝缘层的一部分上选择性地形成电绝缘的生长抑制层。 生长抑制层的形成之后是选择性地生长开口中的相变材料区域,而不是在生长抑制层上生长的步骤。

    Nonvolatile memory device
    9.
    发明授权
    Nonvolatile memory device 有权
    非易失性存储器件

    公开(公告)号:US08331152B2

    公开(公告)日:2012-12-11

    申请号:US12765411

    申请日:2010-04-22

    IPC分类号: G11C11/34

    摘要: A nonvolatile memory device includes resistive memory devices in a three-dimensional structure. A block select circuit generates a block select signal for selecting a memory block. In response to the block select signal, local word line selection units connected to each memory block connect global word lines connected to a word line decoder and local word lines, and local bit line selection units connected to each memory block connect global bit lines connected to a sense amplifier and local bit lines. Each memory block includes local word lines which extend in a first direction and are stacked in a second direction perpendicular to the first direction on a second plane perpendicular to a first plane. Local bit lines extend in the second direction to cross local word lines. Memory cells are formed at cross-points where local word lines and local bit lines cross one another.

    摘要翻译: 非易失性存储器件包括三维结构中的电阻式存储器件。 块选择电路产生用于选择存储块的块选择信号。 响应于块选择信号,连接到每个存储器块的局部字线选择单元连接连接到字线解码器和本地字线的全局字线,并且连接到每个存储器块的局部位线选择单元将连接到 一个读出放大器和本地位线。 每个存储块包括在垂直于第一平面的第二平面上沿第一方向延伸并且沿垂直于第一方向的第二方向堆叠的局部字线。 局部位线在第二个方向上延伸以跨越局部字线。 存储单元在本地字线和局部位线交叉的交点处形成。