公开(公告)号：US08789418B2

公开(公告)日：2014-07-29

申请号：US13591335

申请日：2012-08-22

申请人： Jong Woon Kim ,  Liwei Lin ,  Minyao Mao ,  Won Kyu Jeung

发明人： Jong Woon Kim ,  Liwei Lin ,  Minyao Mao ,  Won Kyu Jeung

IPC分类号： G01C19/56

CPC分类号： G01C19/574

摘要： Disclosed herein is an inertial sensor. The inertial sensor includes: a plurality of driving masses; support bodies connecting a connection bridge so as to support the driving masses; a connection bridge connecting the plurality of driving masses and connecting the plurality of driving masses with the support bodies; and an electrode pattern part including driving electrodes simultaneously driving the driving masses and sensing electrode detecting axial Coriolis force of each of the driving masses.

摘要翻译： 这里公开了惯性传感器。 惯性传感器包括：多个驱动质量块; 支撑体连接连接桥，以支撑驱动块; 连接所述多个驱动块并将所述多个驱动块与所述支撑体连接的连接桥; 以及电极图案部，其包括驱动电极，同时驱动驱动质量，感测电极检测每个驱动质量块的轴向科里奥利力。

公开(公告)号：US08256290B2

公开(公告)日：2012-09-04

申请号：US12405974

申请日：2009-03-17

申请人： Minyao Mao

发明人： Minyao Mao

IPC分类号： G01C19/00 ,  G01P3/44 ,  G01P9/00 ,  G01P15/08

CPC分类号： G01C19/5719

摘要： Angular rate sensor for detecting rotation about first, second and third mutually perpendicular input axes having a plurality of generally planar proof masses coupled together for linear drive-mode oscillation along multi-directional drive axes in a plane formed by the first and second input axes. The masses are mounted on a generally planar sense frame for linear movements relative to the sense frame in drive-mode and for rotation together with the sense frame in sense modes. The sense frame is mounted for rotation with the masses in sense modes about the first, second, and third input axes independent of each other, in response to Coriolis forces produced by rotation of the masses about the first, second, and third input axes respectively. And capacitance sensors responsive to the rotational movements of the masses and the sense frame in sense modes are employed for monitoring rate of rotation.

摘要翻译： 角速率传感器，用于检测围绕第一，第二和第三相互垂直的输入轴的旋转，所述输入轴具有耦合在一起的多个大体上平面的质量块，用于沿着由第一和第二输入轴形成的平面中的多方向驱动轴的线性驱动模式振荡。 质量安装在大致平面的感测框架上，用于在驱动模式下相对于感测框架的线性运动，并且与感测框架在感测模式下一起旋转。 响应于通过质量围绕第一，第二和第三输入轴的旋转而产生的科里奥利力，感测框架被安装成与感测模式围绕第一，第二和第三输入轴彼此独立的感测模块旋转 。 并且采用响应质量的旋转运动的电容传感器和感测模式中的感测框架来监测旋转速率。

公开(公告)号：US07105358B2

公开(公告)日：2006-09-12

申请号：US10076838

申请日：2002-02-13

申请人： Arunaya Majumdar ,  Thomas Michael Perazzo ,  Minyao Mao ,  Ohmyoung Kwon ,  Yang Zhao ,  Guanghua Wu

发明人： Arunaya Majumdar ,  Thomas Michael Perazzo ,  Minyao Mao ,  Ohmyoung Kwon ,  Yang Zhao ,  Guanghua Wu

IPC分类号： G01N33/543

CPC分类号： G01L5/0047 ,  B82Y30/00 ,  G01L1/24 ,  Y10S436/805 ,  Y10S436/806

摘要： An apparatus to measure micro-forces includes a cantilever palette with a set of cantilever array blocks. Each cantilever array block includes a set of cantilevers, with each cantilever including a set of cantilever fingers surrounded by a frame with frame fingers. The cantilever fingers and the frame fingers form a diffraction grating. Each cantilever array block is configured to be responsive to a predetermined micro-force, such that cantilevers of the cantilever array block deflect in the presence of the predetermined micro-force, which causes the diffraction grating to diffract light and thereby provide a visual indication of the presence of the predetermined micro-force.

公开(公告)号：US20120152020A1

公开(公告)日：2012-06-21

申请号：US13165436

申请日：2011-06-21

申请人： Jong Woon Kim ,  Liwei Lin ,  Minyao Mao ,  Heung Woo Park

发明人： Jong Woon Kim ,  Liwei Lin ,  Minyao Mao ,  Heung Woo Park

IPC分类号： G01P15/125 ,  G01P15/09 ,  G01P15/12 ,  G01P15/00

CPC分类号： G01P15/125 ,  G01P15/09 ,  G01P15/123 ,  G01P2015/0842

摘要： Disclosed herein is an inertial sensor. There is provided an inertial sensor 100, including: a plate-like substrate layer 110, a mass body 130, a post 140, a support part 150 extending in the central direction of the mass body 130 from the post 140, and a detection unit 170 detecting the displacement of the displacement part 113. The inertial sensor adopts the support part 150 limiting the downward displacement of the mass body 130 to prevent the support portion of the mass body 130 from being damaged.

摘要翻译： 这里公开了惯性传感器。 设置有惯性传感器100，包括：板状基板层110，质量体130，柱140，从柱140在质量体130的中心方向延伸的支撑部150，以及检测单元 170检测位移部113的位移。惯性传感器采用限制质量体130的向下位移的支撑部150，以防止质量体130的支撑部被损坏。

公开(公告)号：US20100095768A1

公开(公告)日：2010-04-22

申请号：US12254223

申请日：2008-10-20

申请人： Cenk Acar ,  Minyao Mao

发明人： Cenk Acar ,  Minyao Mao

IPC分类号： G01C19/56

CPC分类号： G01C19/56 ,  G01C19/5712

摘要： Micromachined gyroscope having a pair of masses disposed generally in a plane and driven for out-of-plane torsional oscillation about a pair of drive axes in the plane for sensing rotation about an input axis perpendicular to the drive axes. The masses are mounted for in-plane torsional movement about sense axes perpendicular to the drive axes and the input axis in response to Coriolis forces produced by rotation of the masses about the input axis. A link connects the two masses together for movement of equal amplitude and opposite phase both about the drive axes and about the sense axes. The masses are connected to transducers having input electrodes constrained for linear in-plane movement relative to stationary electrodes, with that torsional movement of the masses about the sense axes producing changes in capacitance between the input electrodes and the stationary electrodes.

摘要翻译： 微加工陀螺仪具有通常在平面中设置的一对质量，并被驱动用于围绕平面中的一对驱动轴的面外扭转振动，用于感测围绕垂直于驱动轴的输入轴的旋转。 响应于通过质量围绕输入轴的旋转产生的科里奥利力，质量块被安装用于围绕垂直于驱动轴和输入轴的感测轴的面内扭转运动。 链路将两个质量连接在一起，用于围绕驱动轴线和绕传感轴线的相等振幅和相位相移。 质量体连接到具有被限制用于相对于固定电极的线性平面内运动的输入电极的换能器，其中质量围绕感测轴的扭转运动产生输入电极和固定电极之间的电容变化。

公开(公告)号：US20060272411A1

公开(公告)日：2006-12-07

申请号：US11146310

申请日：2005-06-06

申请人： Cenk Acar ,  Minyao Mao

发明人： Cenk Acar ,  Minyao Mao

IPC分类号： G01C19/00

CPC分类号： G01C19/5712

摘要： Rate sensor comprising two generally planar proof masses, means for driving the masses to oscillate in phase opposition about parallel drive axes in the planes of the masses, an input axis perpendicular to the drive axes, sense axes perpendicular to the drive axes and the input axis, means mounting the masses for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, means constraining the two masses for anti-phase movement about both the drive axes and the sense axes, sensing frames coupled to the masses for movement in response to the torsional movement of the masses about the sense axes, and means responsive to movement of the sensing frames for monitoring rate of rotation about the input axis.

摘要翻译： 速率传感器包括两个基本上平面的质量块，用于驱动质量相对于质量平面中的平行驱动轴相对振荡的装置，垂直于驱动轴的输入轴，垂直于驱动轴的感测轴和输入轴 响应由质量围绕输入轴的旋转而产生的科里奥利力，围绕传感轴安装用于扭转运动的质量块，意味着约束两个质量以围绕驱动轴和感测轴进行反相运动，感测框架 耦合到质量块以响应于质量围绕感测轴线的扭转运动而移动，以及响应于感测框架的运动的装置，用于监测围绕输入轴线的旋转速率。

公开(公告)号：US06865313B2

公开(公告)日：2005-03-08

申请号：US10435511

申请日：2003-05-09

申请人： Minyao Mao ,  Martin Lim ,  Robert Ostrom

发明人： Minyao Mao ,  Martin Lim ,  Robert Ostrom

IPC分类号： G02B6/35

CPC分类号： G02B6/358 ,  G02B6/3512 ,  G02B6/357

摘要： Bistable latching actuator for use in optical fiber switching applications having a generally planar mechanism with an arm that carries a mirror for movement in a direction perpendicular to the plane of the mechanism, and a bistable mechanical latch for retaining the mirror in stable positions on opposite sides of the plane without contacting the arm. Movement between the two stable positions is initiated and damped with an electrostatic comb drive.

摘要翻译： 用于光纤切换应用的双稳态闭锁致动器具有大致平面的机构，其具有臂，该臂具有在垂直于机构的平面的方向上运动的反射镜，以及用于将反射镜保持在相对侧的稳定位置的双稳态机械闩锁 不接触手臂。 启动两个稳定位置之间的运动并用静电梳驱动阻尼。

公开(公告)号：US20130213134A1

公开(公告)日：2013-08-22

申请号：US13850309

申请日：2013-03-26

申请人： Minyao Mao

发明人： Minyao Mao

IPC分类号： G01C19/56

CPC分类号： G01C19/56 ,  G01C19/574

摘要： An angular rate sensor having two generally planar proof masses disposed along a drive axis in the plane of the masses, a sense axis perpendicular to the drive axis, and an input axis perpendicular to the plane of the masses. The masses are suspended from a pair of driving frames, which are mounted and constrained for anti-phase linear movement along the drive axis in drive-mode. Detectors responsive to the anti-phase movement of the masses in directions parallel to the sense axis in response to Coriolis forces produced by rotation of the masses about the input axis for monitoring rate of rotation about the input axis.

摘要翻译： 一种角速率传感器，具有沿质量平面中的驱动轴设置的两个大致平面的质量块，垂直于驱动轴的感测轴和垂直于质量平面的输入轴。 质量悬挂在一对驱动框架中，驱动框架被安装并限制在驱动模式下沿着驱动轴的反相线性运动。 响应于质量围绕输入轴旋转产生的科里奥利力，响应于物体在与感测轴平行的方向上的反相运动的检测器，用于监测围绕输入轴的旋转速率。

公开(公告)号：US20100236327A1

公开(公告)日：2010-09-23

申请号：US12405974

申请日：2009-03-17

申请人： Minyao Mao

发明人： Minyao Mao

IPC分类号： G01C19/56

CPC分类号： G01C19/5719

摘要： Angular rate sensor for detecting rotation about first, second and third mutually perpendicular input axes having a plurality of generally planar proof masses coupled together for linear drive-mode oscillation along multi-directional drive axes in a plane formed by the first and second input axes. The masses are mounted on a generally planar sense frame for linear movements relative to the sense frame in drive-mode and for rotation together with the sense frame in sense modes. The sense frame is mounted for rotation with the masses in sense modes about the first, second, and third input axes independent of each other, in response to Coriolis forces produced by rotation of the masses about the first, second, and third input axes respectively. And capacitance sensors responsive to the rotational movements of the masses and the sense frame in sense modes are employed for monitoring rate of rotation.

摘要翻译： 角速率传感器，用于检测围绕第一，第二和第三相互垂直的输入轴的旋转，所述输入轴具有耦合在一起的多个大体上平面的质量块，用于沿着由第一和第二输入轴形成的平面中的多方向驱动轴的线性驱动模式振荡。 质量安装在大致平面的感测框架上，用于在驱动模式下相对于感测框架的线性运动，并且与感测框架在感测模式下一起旋转。 响应于通过质量围绕第一，第二和第三输入轴的旋转而产生的科里奥利力，感测框架被安装成与感测模式围绕第一，第二和第三输入轴彼此独立的感测模块旋转 。 并且采用响应质量的旋转运动的电容传感器和感测模式中的感测框架来监测旋转速率。

公开(公告)号：US07222533B2

公开(公告)日：2007-05-29

申请号：US11146401

申请日：2005-06-06

申请人： Minyao Mao ,  Cenk Acar ,  Lynn Edward Costlow

发明人： Minyao Mao ,  Cenk Acar ,  Lynn Edward Costlow

IPC分类号： G01P9/04 ,  G01P15/08

CPC分类号： G01C19/5719

摘要： Rate sensor having a plurality of generally planar masses, a drive axis in the planes of the masses, an input axis perpendicular to the drive axis, and sense axes perpendicular to the drive axis and the input axis. The masses are driven to oscillate about the drive axes and are mounted for torsional movement about the sense axes in response to Coriolis forces produced by rotation of the masses about the input axis, with sensors responsive to the torsional movement about the sense axis for monitoring rate of rotation.

摘要翻译： 速率传感器具有多个大致平坦的质量，质量平面中的驱动轴，垂直于驱动轴的输入轴，以及垂直于驱动轴和输入轴的感测轴。 质量被驱动绕驱动轴摆动，并被安装成响应于通过围绕输入轴的质量的旋转而产生的科里奥利力而围绕传感轴的扭转运动，传感器响应于围绕感测轴的扭转运动以用于监测速率 的旋转。