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    Bistable latching actuator for optical switching applications
    1.
    发明授权
    Bistable latching actuator for optical switching applications 失效
    用于光开关应用的双稳态闭锁执行器

    公开(公告)号：US06865313B2

    公开(公告)日：2005-03-08

    申请号：US10435511

    申请日：2003-05-09

    Applicant: Minyao Mao ,  Martin Lim ,  Robert Ostrom

    Inventor： Minyao Mao ,  Martin Lim ,  Robert Ostrom

    IPC: G02B6/35

    CPC classification number: G02B6/358 ,  G02B6/3512 ,  G02B6/357

    Abstract: Bistable latching actuator for use in optical fiber switching applications having a generally planar mechanism with an arm that carries a mirror for movement in a direction perpendicular to the plane of the mechanism, and a bistable mechanical latch for retaining the mirror in stable positions on opposite sides of the plane without contacting the arm. Movement between the two stable positions is initiated and damped with an electrostatic comb drive.

    Abstract translation: 用于光纤切换应用的双稳态闭锁致动器具有大致平面的机构，其具有臂，该臂具有在垂直于机构的平面的方向上运动的反射镜，以及用于将反射镜保持在相对侧的稳定位置的双稳态机械闩锁 不接触手臂。 启动两个稳定位置之间的运动并用静电梳驱动阻尼。

    Method and system of releasing a MEMS structure
    2.
    发明申请
    Method and system of releasing a MEMS structure 有权
    释放MEMS结构的方法和系统

    公开(公告)号：US20060228831A1

    公开(公告)日：2006-10-12

    申请号：US11094101

    申请日：2005-03-29

    Applicant: Steven Nasiri ,  Anthony Flannery ,  Martin Lim

    Inventor： Steven Nasiri ,  Anthony Flannery ,  Martin Lim

    IPC: H01L21/00

    CPC classification number: B81C1/00333

    Abstract: A method and system for releasing MEMS cover-structure on a wafer is disclosed. It includes at least one MEMS wafer structure made up of two wafers, one protective cover, and one containing at least one MEMS feature that are bonded together by various standard wafer bonding means. Also, one wafer substrate with patterned aluminum features and input/output pads. The method and system comprise providing for a built in channels between the said first cover wafer, and second said MEMS wafer allowing for a saw blade to cut a channel into the cover wafer, while the MEMS wafer providing for protection against saw slurries to get over the contact pad area on the said substrate wafer. Providing a tab area over the at least one bond pad and the dicing of the tab area to remove at least a portion of tab area above the at least one bond pad. A method and system of using industry dicing techniques to release the MEMS cover-structure from the substrate is disclosed. Dicing is much more benign chemically and is compatible with a much greater range of materials. The cost of dicing and complexity of infrastructure required are much less than that required for DRIE. Also, unlike conventional methods, a dicing release does not require an additional masking step.

    Abstract translation: 公开了一种用于在晶片上释放MEMS覆盖结构的方法和系统。 它包括由两个晶片组成的至少一个MEMS晶片结构，一个保护盖，以及包含通过各种标准晶片接合装置粘接在一起的至少一个MEMS特征的MEMS晶片结构。 而且，具有图案化铝特征的一个晶片衬底和输入/输出焊盘。 该方法和系统包括提供在所述第一覆盖晶片和第二所述MEMS晶片之间的内置通道，所述第二所述MEMS晶片允许锯片将通道切割入所述盖晶片，同时所述MEMS晶片提供保护以防止锯浆料过渡 所述衬底晶片上的接触焊盘区域。 在所述至少一个接合焊盘上提供突片区域，并且对所述突片区域进行切割以去除所述至少一个接合焊盘上方的突片区域的至少一部分。 公开了一种使用工业切割技术从基板释放MEMS覆盖结构的方法和系统。 切割化学性质更加良好，与更广泛的材料相容。 切割成本和所需基础设施的复杂性远低于DRIE要求的。 此外，与传统方法不同，切割释放不需要额外的掩模步骤。

    Micromachined apparatus and technique to align two dimensional fiber array
    4.
    发明授权
    Micromachined apparatus and technique to align two dimensional fiber array 失效
    微机械设备和技术对齐二维光纤阵列

    公开(公告)号：US06633708B1

    公开(公告)日：2003-10-14

    申请号：US09799965

    申请日：2001-03-06

    Applicant: Martin Lim

    Inventor： Martin Lim

    IPC: G02B626

    CPC classification number: G02B6/4226

    Abstract: Optical fibers are aligned in a jig of parallel apertured plates in which the fibers are inserted and positioned by the use of V-shaped or positioning ribbon actuators. The actuators are thermally actuated by a closed loop feedback system to center each individual fiber and its light output on an equivalent juxtaposed photodetector array. When the fiber is centered by this feedback technique it is permanently fixed in that position by potting, for example. The feedback control constitutes either a totally electrical system utilizing a processing unit or can be partially manually controlled by a human operator operating a joystick and viewing a meter or similar device which indicates an approach to a maximum output from a photodetector.

    Abstract translation: 光纤在平行孔板的夹具中排列，其中纤维通过使用V形或定位色带致动器插入和定位。 致动器由闭环反馈系统热启动，以将每个单独的光纤及其光输出集中在等效的并置的光电检测器阵列上。 当纤维由该反馈技术居中时，例如通过灌封将其永久固定在该位置。 反馈控制构成利用处理单元的完全电气系统，或者可以由操作操纵杆的人操作器部分手动控制，并且观察表示从光电检测器的最大输出的方法的仪表或类似装置。

    Micromachined magnetic field sensors
    5.
    发明授权
    Micromachined magnetic field sensors 有权
    微加工磁场传感器

    公开(公告)号：US08395381B2

    公开(公告)日：2013-03-12

    申请号：US12833390

    申请日：2010-07-09

    Applicant: Chiung C. Lo ,  Joseph Seeger ,  Martin Lim

    Inventor： Chiung C. Lo ,  Joseph Seeger ,  Martin Lim

    IPC: G01R33/02 ,  G01R33/09 ,  G01R33/07

    CPC classification number: G01R33/0011 ,  G01R33/07 ,  H01L2224/48091 ,  H01L2224/73265 ,  H01L2924/00014

    Abstract: A micromachined magnetic field sensor integrated with electronics is disclosed. The magnetic field sensors utilize Hall-effect sensing mechanisms to achieve 3-axis sensing. A Z axis sensor can be fabricated either on a device layer or on a conventional IC substrate with the design of conventional horizontal Hall plates. An X and Y axis sensor are constructed on the device layer. In some embodiments, a magnetic flux concentrator is applied to enhance the performance of the magnetic field sensor. In some embodiments, the magnetic field sensors are placed on slope sidewalls to achieve 3-axis magnetic sensing system. In some embodiments, a stress isolation structure is incorporated to lower the sensor offset. The conventional IC substrate and device layer are connected electrically to form a 3-axis magnetic sensing system. The magnetic field sensor can also be integrated with motion sensors that are constructed in the similar technology.

    Abstract translation: 公开了一种与电子器件集成的微加工磁场传感器。 磁场传感器利用霍尔效应感测机构实现3轴感测。 Z轴传感器可以在设备层或常规IC基板上制造，具有常规水平霍尔板的设计。 X和Y轴传感器构造在器件层上。 在一些实施例中，施加磁通集中器以增强磁场传感器的性能。 在一些实施例中，磁场传感器被放置在倾斜侧壁上以实现3轴磁感测系统。 在一些实施例中，结合了应力隔离结构以降低传感器偏移。 常规IC基板和器件层电连接以形成3轴磁感测系统。 磁场传感器也可以与以类似技术构造的运动传感器集成。

    Method and system of releasing a MEMS structure
    7.
    发明授权
    Method and system of releasing a MEMS structure 有权
    释放MEMS结构的方法和系统

    公开(公告)号：US07250353B2

    公开(公告)日：2007-07-31

    申请号：US11094101

    申请日：2005-03-29

    Applicant: Steven S. Nasiri ,  Anthony Francis Flannery, Jr. ,  Martin Lim

    Inventor： Steven S. Nasiri ,  Anthony Francis Flannery, Jr. ,  Martin Lim

    IPC: H01L21/46 ,  H01L21/78 ,  H01L21/326

    CPC classification number: B81C1/00333

    Abstract: A MEMs (microelectromechanical systems) structure is provided. In one implementation, the MEMs structure includes a substrate wafer including a MEMs device formed on a surface of the substrate wafer, and a MEMs cover structure to cover the MEMs device formed on the surface of the substrate wafer. The MEMs cover structure comprises a first wafer bonded to a second wafer, in which only the first wafer of the MEMs cover structure is sawed through and not the second wafer of the MEMs cover structure during dicing of the MEMs structure.

    Abstract translation: 提供了MEM（微机电系统）结构。 在一个实施方式中，MEM结构包括：衬底晶片，其包括形成在衬底晶片的表面上的MEMs器件;以及覆盖形成在衬底晶片表面上的MEM器件的MEM盖结构。 所述MEM覆盖结构包括结合到第二晶片的第一晶片，其中只有所述MEM的覆盖结构的所述第一晶片被锯切穿过，而在所述MEM结构的切割期间，所述MEM的第二晶片不覆盖所述结构。

    Fiber optic switch using MEMS
    8.
    发明授权
    Fiber optic switch using MEMS 失效
    使用MEMS的光纤开关

    公开(公告)号：US06477290B1

    公开(公告)日：2002-11-05

    申请号：US09504632

    申请日：2000-02-15

    Applicant: Lawrence A. Wan ,  Martin Lim

    Inventor： Lawrence A. Wan ,  Martin Lim

    IPC: G02B626

    CPC classification number: G02B6/3582 ,  G02B6/32 ,  G02B6/3512 ,  G02B6/353 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3584

    Abstract: A fiber optic switch using MEMS is scalable by the use of a matrix of cross-points located at the intersection of all possible input and output light paths. Cross-points are formed by a MEMS procedure where a digitally movable mirror intersects a light path to provide a digital switching action with the remaining cross-point mirrors being moved out of position to provide through transmission.

    Abstract translation: 使用MEMS的光纤开关通过使用位于所有可能的输入和输出光路的交叉处的交叉点的矩阵来缩放。 交叉点由MEMS程序形成，其中数字可移动镜与光路相交以提供数字切换动作，其余的交叉点镜被移出位置以提供透射。

    Acoustic printheads with optical alignment
    9.
    发明授权
    Acoustic printheads with optical alignment 失效
    具有光学对准的声学打印头

    公开(公告)号：US5631678A

    公开(公告)日：1997-05-20

    申请号：US349296

    申请日：1994-12-05

    Applicant: Babur B. Hadimioglu ,  Martin Lim

    Inventor： Babur B. Hadimioglu ,  Martin Lim

    IPC: B41J2/045 ,  B41J2/055 ,  B41J2/14 ,  G02B5/20 ,  B41J2/04

    CPC classification number: B41J2/14008

    Abstract: Acoustic printheads having an optically transparent substrate, at least two optical lenses, which may be part of the substrate, and a first structure, which may also be part of the substrate. The optical lenses focus light which irradiates the substrate into optical focal points at known locations relative to the first structure. The first structure may be part of an acoustic droplet ejector which includes an acoustic lens that is fabricated on the optically transparent substrate. The optical focal points can be used to precisely align the first structure with another structure.

    Abstract translation: 具有光学透明基底的声学打印头，可以是基底的一部分的至少两个光学透镜，以及也可以是基底的一部分的第一结构。 光学透镜将照射基板的光聚焦到相对于第一结构的已知位置的光学焦点。 第一结构可以是声液滴喷射器的一部分，其包括制造在光学透明基底上的声透镜。 光学焦点可用于将第一结构与另一结构精确对准。

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