Semiconductor device and manufacturing method thereof
    1.
    发明申请
    Semiconductor device and manufacturing method thereof 有权
    半导体装置及其制造方法

    公开(公告)号:US20060076583A1

    公开(公告)日:2006-04-13

    申请号:US11219320

    申请日:2005-09-02

    IPC分类号: H01L29/80

    摘要: A semiconductor device has a MOS gate side surface structure, including a gate electrode filling a trench formed in a semiconductor substrate with an insulator film between the trench and the gate electrode, a gate insulator film covering the surface of the gate electrode, a buffer region of one conductivity type in contact with the semiconductor substrate, a base region of the other conductivity type adjacent to the buffer region on the gate insulator film, and an emitter region of the one conductivity type adjacent to the base region on the side opposite to the buffer region. The semiconductor device and the method of manufacturing thereof can further improve the tradeoff between the on-voltage and the turn-off loss by increasing the amount of electrons injected from a cathode on the surface to increase an amount of carriers on the cathode side in a stable turned-on state of the device.

    摘要翻译: 半导体器件具有MOS栅极侧表面结构,其包括填充形成在半导体衬底中的沟槽的栅电极,其中沟槽和栅电极之间具有绝缘膜,覆盖栅电极表面的栅极绝缘膜,缓冲区 与半导体衬底接触的一种导电类型,与栅极绝缘体膜上的缓冲区相邻的另一导电类型的基极区域和与该半导体衬底的相反侧的基极区域相邻的一种导电类型的发射极区域 缓冲区。 半导体器件及其制造方法可以通过增加从表面上的阴极注入的电子量来进一步提高导通电压和关断损耗之间的权衡,以增加阴极侧的载流子的量 稳定的开机状态。

    Thin-film solar cell and method of manufacturing same
    2.
    发明授权
    Thin-film solar cell and method of manufacturing same 失效
    薄膜太阳能电池及其制造方法

    公开(公告)号:US5507881A

    公开(公告)日:1996-04-16

    申请号:US213717

    申请日:1994-03-16

    摘要: Solar cells are formed of (a) a transparent substrate; (b) a transparent electrode; (c) a first doped layer comprising amorphous silicon oxide, optionally including nitrogen, said first doped layer containing a dopant whereby the first doped layer is of a first conductivity type and has an optical gap of from 2.0 to 2.3 eV and a ratio of light conductivity to dark conductivity of 5 or less at 25.degree. C.; (d) a layer of intrinsic amorphous silicon; (e) a second doped layer comprising amorphous silicon, said second doped layer containing a dopant whereby the second doped layer is of a second conductivity type different from the first conductivity type; and (f) a second electrode. The first doped layer may be of either n-type or p-type conductivity. The first doped layer can be formed over the transparent electrode by decomposing a gas mixture comprising SiH.sub.4, an oxygen source gas selected from N.sub.2 O or CO.sub.2, and a dopant, in a hydrogen carrier at a substrate temperature of 150.degree. to 250.degree. C., the amount of hydrogen being from 10 to 50 times the amount of SiH.sub.4, said first doped layer being of a first conductivity type. An interfacial layer of intermediate gap may also be included when the first doped layer is a p-type layer. Also described is a method for the formation of an amorphous silicon-oxide film to be utilized in making the thin-film solar cell.

    摘要翻译: 太阳能电池由(a)透明基板形成; (b)透明电极; (c)包括非晶氧化硅的第一掺杂层,任选地包括氮,所述第一掺杂层含有掺杂剂,由此所述第一掺杂层是第一导电类型并且具有2.0至2.3eV的光学间隙和光的比率 电导率至25℃的5或更小的暗电导率。 (d)本征非晶硅层; (e)包含非晶硅的第二掺杂层,所述第二掺杂层含有掺杂剂,由此所述第二掺杂层是不同于所述第一导电类型的第二导电类型; 和(f)第二电极。 第一掺杂层可以是n型或p型导电性。 可以在150〜250℃的基板温度下,在氢载体中分解包含SiH 4,选自N 2 O或CO 2的氧源气体和掺杂剂的气体混合物,在透明电极上形成第一掺杂层, 氢的量为SiH4的10至50倍,所述第一掺杂层为第一导电型。 当第一掺杂层是p型层时,也可以包括中间间隙的界面层。 还描述了用于形成用于制造薄膜太阳能电池的非晶氧化硅膜的方法。

    Semiconductor device and manufacturing method thereof
    3.
    发明授权
    Semiconductor device and manufacturing method thereof 有权
    半导体装置及其制造方法

    公开(公告)号:US07790519B2

    公开(公告)日:2010-09-07

    申请号:US11754751

    申请日:2007-05-29

    IPC分类号: H01L21/332

    摘要: A semiconductor device has a MOS gate side surface structure, including a gate electrode filling a trench formed in a semiconductor substrate with an insulator film between the trench and the gate electrode, a gate insulator film covering the surface of the gate electrode, a buffer region of one conductivity type in contact with the semiconductor substrate, a base region of the other conductivity type adjacent to the buffer region on the gate insulator film, and an emitter region of the one conductivity type adjacent to the base region on the side opposite to the buffer region. The semiconductor device and the method of manufacturing thereof can further improve the tradeoff between the on-voltage and the turn-off loss by increasing the amount of electrons injected from a cathode on the surface to increase an amount of carriers on the cathode side in a stable turned-on state of the device.

    摘要翻译: 半导体器件具有MOS栅极侧表面结构,其包括填充形成在半导体衬底中的沟槽的栅电极,其中沟槽和栅电极之间具有绝缘膜,覆盖栅电极表面的栅极绝缘膜,缓冲区 与半导体衬底接触的一种导电类型,与栅极绝缘体膜上的缓冲区相邻的另一导电类型的基极区域和与该半导体衬底的相反侧的基极区域相邻的一种导电类型的发射极区域 缓冲区。 半导体器件及其制造方法可以通过增加从表面上的阴极注入的电子量来进一步提高导通电压和关断损耗之间的权衡,以增加阴极侧的载流子的量 稳定的开机状态。

    SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

    公开(公告)号:US20070262362A1

    公开(公告)日:2007-11-15

    申请号:US11780624

    申请日:2007-07-20

    IPC分类号: H01L29/80

    摘要: A semiconductor device has a MOS gate side surface structure, including a gate electrode filling a trench formed in a semiconductor substrate with an insulator film between the trench and the gate electrode, a gate insulator film covering the surface of the gate electrode, a buffer region of one conductivity type in contact with the semiconductor substrate, a base region of the other conductivity type adjacent to the buffer region on the gate insulator film, and an emitter region of the one conductivity type adjacent to the base region on the side opposite to the buffer region. The semiconductor device and the method of manufacturing thereof can further improve the tradeoff between the on-voltage and the turn-off loss by increasing the amount of electrons injected from a cathode on the surface to increase an amount of carriers on the cathode side in a stable turned-on state of the device.

    SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
    5.
    发明申请
    SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF 有权
    半导体器件及其制造方法

    公开(公告)号:US20070224769A1

    公开(公告)日:2007-09-27

    申请号:US11754751

    申请日:2007-05-29

    IPC分类号: H01L21/331

    摘要: A semiconductor device has a MOS gate side surface structure, including a gate electrode filling a trench formed in a semiconductor substrate with an insulator film between the trench and the gate electrode, a gate insulator film covering the surface of the gate electrode, a buffer region of one conductivity type in contact with the semiconductor substrate, a base region of the other conductivity type adjacent to the buffer region on the gate insulator film, and an emitter region of the one conductivity type adjacent to the base region on the side opposite to the buffer region. The semiconductor device and the method of manufacturing thereof can further improve the tradeoff between the on-voltage and the turn-off loss by increasing the amount of electrons injected from a cathode on the surface to increase an amount of carriers on the cathode side in a stable turned-on state of the device.

    摘要翻译: 半导体器件具有MOS栅极侧表面结构,其包括填充形成在半导体衬底中的沟槽的栅电极,其中沟槽和栅电极之间具有绝缘膜,覆盖栅电极表面的栅极绝缘膜,缓冲区 与半导体衬底接触的一种导电类型,与栅极绝缘体膜上的缓冲区相邻的另一导电类型的基极区域和与该半导体衬底的相反侧的基极区域相邻的一种导电类型的发射极区域 缓冲区。 半导体器件及其制造方法可以通过增加从表面上的阴极注入的电子量来进一步提高导通电压和关断损耗之间的权衡,以增加阴极侧的载流子的量 稳定的开机状态。

    Photovoltaic module
    6.
    发明授权
    Photovoltaic module 失效
    光伏组件

    公开(公告)号:US08664512B2

    公开(公告)日:2014-03-04

    申请号:US13316157

    申请日:2011-12-09

    摘要: The present invention provides a photovoltaic module with bypass diodes that has a high electricity generating capacity per unit area and high productivity. This photovoltaic module includes a photovoltaic cell assembly in which a plurality of photovoltaic cells are electrically connected in series, and a diode assembly in which a plurality of diodes are formed on a substrate in the arrangement that is consistent with the arrangement of the photovoltaic cells to which the diodes are to be attached. The diode assembly is disposed on a non-light receiving side of the photovoltaic cells, and the diodes are electrically connected to the photovoltaic cells. The photovoltaic cell assembly and the diode assembly are sealed and united by a sealant.

    摘要翻译: 本发明提供一种具有旁路二极管的光伏模块,其具有高的单位面积发电量和高生产率。 该光伏模块包括其中多个光伏电池串联电连接的光伏电池组件和二极管组件,其中在基板上形成多个二极管,其结构与光伏电池的布置一致 二极管将被连接。 二极管组件设置在光伏电池的非光接收侧,并且二极管电连接到光伏电池。 光伏电池组件和二极管组件通过密封剂密封并结合。

    THIN FILM SOLAR CELL AND METHOD FOR MANUFACTURING SAME
    7.
    发明申请
    THIN FILM SOLAR CELL AND METHOD FOR MANUFACTURING SAME 审中-公开
    薄膜太阳能电池及其制造方法

    公开(公告)号:US20120152339A1

    公开(公告)日:2012-06-21

    申请号:US13368466

    申请日:2012-02-08

    申请人: Shinji FUJIKAKE

    发明人: Shinji FUJIKAKE

    IPC分类号: H01L31/076 H01L31/18

    摘要: A method is disclosed for manufacturing a thin film substrate solar cell that has a metal electrode, a photoelectric conversion layer, and a transparent electrode stacked in this order on a substrate, the photoelectric conversion layer combining, in a thickness direction, two or more n, i, p junctions with non-single crystal silicon as main materials thereof. A top cell which is the photoelectric conversion layer on the side of the transparent electrode and another cell of one or more layers on the side of the metal electrode relative to the top cell are provided. The method includes a step of simultaneously removing at least the two or more photoelectric conversion layers and the transparent electrode using a laser with a wavelength having selective sensitivity with respect to the top cell, from the side of the transparent electrode, followed by blowing-away.

    摘要翻译: 公开了一种用于制造薄膜基板太阳能电池的方法,所述薄膜基板太阳能电池具有在基板上依次堆叠的金属电极,光电转换层和透明电极,所述光电转换层在厚度方向上组合两个或更多个n ,i,以非单晶硅为主要材料的p结。 提供作为透明电极侧的光电转换层的顶部单元和相对于顶部单元的金属电极侧的一个或多个层的另一个单元。 该方法包括从透明电极侧同时去除至少两个或更多个光电转换层和透明电极的步骤,该透明电极使用具有相对于顶部单元的选择灵敏度的波长的激光,随后吹走 。

    Semiconductor device and manufacturing method thereof
    8.
    发明授权
    Semiconductor device and manufacturing method thereof 有权
    半导体装置及其制造方法

    公开(公告)号:US07262100B2

    公开(公告)日:2007-08-28

    申请号:US11219320

    申请日:2005-09-02

    IPC分类号: H01L21/336

    摘要: A semiconductor device has a MOS gate side surface structure, including a gate electrode filling a trench formed in a semiconductor substrate with an insulator film between the trench and the gate electrode, a gate insulator film covering the surface of the gate electrode, a buffer region of one conductivity type in contact with the semiconductor substrate, a base region of the other conductivity type adjacent to the buffer region on the gate insulator film, and an emitter region of the one conductivity type adjacent to the base region on the side opposite to the buffer region. The semiconductor device and the method of manufacturing thereof can further improve the tradeoff between the on-voltage and the turn-off loss by increasing the amount of electrons injected from a cathode on the surface to increase an amount of carriers on the cathode side in a stable turned-on state of the device.

    摘要翻译: 半导体器件具有MOS栅极侧表面结构,其包括填充形成在半导体衬底中的沟槽的栅电极,其中沟槽和栅电极之间具有绝缘膜,覆盖栅电极表面的栅极绝缘膜,缓冲区 与半导体衬底接触的一种导电类型,与栅极绝缘体膜上的缓冲区相邻的另一导电类型的基极区域和与该半导体衬底的相反侧的基极区域相邻的一种导电类型的发射极区域 缓冲区。 半导体器件及其制造方法可以通过增加从表面上的阴极注入的电子量来进一步提高导通电压和关断损耗之间的权衡,以增加阴极侧的载流子的量 稳定的开机状态。

    PHOTOVOLTAIC MODULE
    9.
    发明申请
    PHOTOVOLTAIC MODULE 失效
    光伏模块

    公开(公告)号:US20120234367A1

    公开(公告)日:2012-09-20

    申请号:US13316157

    申请日:2011-12-09

    IPC分类号: H01L31/042

    摘要: The present invention provides a photovoltaic module with bypass diodes that has a high electricity generating capacity per unit area and high productivity. This photovoltaic module includes a photovoltaic cell assembly in which a plurality of photovoltaic cells are electrically connected in series, and a diode assembly in which a plurality of diodes are formed on a substrate in the arrangement that is consistent with the arrangement of the photovoltaic cells to which the diodes are to be attached. The diode assembly is disposed on a non-light receiving side of the photovoltaic cells, and the diodes are electrically connected to the photovoltaic cells. The photovoltaic cell assembly and the diode assembly are sealed and united by a sealant.

    摘要翻译: 本发明提供一种具有旁路二极管的光伏模块,其具有高的单位面积发电量和高生产率。 该光伏模块包括其中多个光伏电池串联电连接的光伏电池组件和二极管组件,其中在基板上形成多个二极管,其结构与光伏电池的布置一致 二极管将被连接。 二极管组件设置在光伏电池的非光接收侧,并且二极管电连接到光伏电池。 光伏电池组件和二极管组件通过密封剂密封并结合。

    Method of evaluating film thickness, method of detecting polishing terminal, and device-manufacturing apparatus
    10.
    发明授权
    Method of evaluating film thickness, method of detecting polishing terminal, and device-manufacturing apparatus 有权
    评估膜厚度的方法,检测抛光终端的方法以及装置制造装置

    公开(公告)号:US07446889B2

    公开(公告)日:2008-11-04

    申请号:US11055619

    申请日:2005-02-11

    申请人: Shinji Fujikake

    发明人: Shinji Fujikake

    IPC分类号: G01B11/28

    摘要: A method of evaluating a thickness of a film during a polishing process includes the steps of irradiating light onto a surface of the film during the polishing process; obtaining a differential signal of reflection spectra at a polishing time t and a polishing time t−Δt with a time difference Δt from the polishing time t; and analyzing the differential signal to obtain a thickness d of the film at the polishing time t.

    摘要翻译: 在研磨过程中评估膜的厚度的方法包括在抛光过程中将光照射到膜的表面上的步骤; 在抛光时间t和抛光时间t的时间差Δttat处获得反射光谱的差分信号和抛光时间t-Deltat; 并且分析差分信号以获得在抛光时间t的膜的厚度d。