公开(公告)号：US20180054183A2

公开(公告)日：2018-02-22

申请号：US15114734

申请日：2015-02-11

Applicant: Agency for Science, Technology and Research

Inventor： Jinghui Xu ,  Nan Wang ,  Yuandong Alex Gu

IPC: H03H9/19 ,  H03H9/56

CPC classification number: H03H9/02409 ,  B81B2201/0271 ,  H01H2001/0078 ,  H03H9/02448 ,  H03H9/19 ,  H03H9/2457 ,  H03H9/2463 ,  H03H9/56 ,  H03H2009/02291 ,  H03H2009/02488

Abstract: According to various embodiments, there is provided a micro-electromechanical resonator, including a substrate with a cavity therein; and a resonating structure suspended over the cavity, the resonating structure having a first end anchored to the substrate, wherein the resonating structure is configured to flex in a flexural mode along a width direction of the resonating structure, wherein the width direction is defined at least substantially perpendicular to a length direction of the resonating structure, wherein the length direction is defined from the first end to a second end of the resonating structure, wherein the second end opposes the first end.

公开(公告)号：US11229927B2

公开(公告)日：2022-01-25

申请号：US15770181

申请日：2016-10-13

Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH

Inventor： Xing Haw Marvin Tan ,  Yuandong Alex Gu ,  Liang Lou

IPC: B06B1/06 ,  B32B43/00 ,  H01L41/09 ,  H04R17/00

Abstract: Embodiments provide an ultrasound transducer. The ultrasound transducer may include a multi-layered membrane having a plurality of slits extending through the membrane, thereby forming a plurality of sections of the membrane at least partially separated by the slits. Each slit extends from a perimeter of the membrane to a respective end position at a predetermined distance away from a center of the membrane. The plurality of sections of the membrane are connected to each other at the center of the membrane.

公开(公告)号：US10211805B2

公开(公告)日：2019-02-19

申请号：US15114734

申请日：2015-02-11

Applicant: Agency for Science, Technology and Research

Inventor： Jinghui Xu ,  Nan Wang ,  Yuandong Alex Gu

IPC: H03H9/15 ,  H03H9/19 ,  H03H9/46 ,  H03H9/52 ,  H03H9/54 ,  H03H9/02 ,  H03H9/56 ,  H03H9/24 ,  H01H1/00

Abstract: According to various embodiments, there is provided a micro-electromechanical resonator, including a substrate with a cavity therein; and a resonating structure suspended over the cavity, the resonating structure having a first end anchored to the substrate, wherein the resonating structure is configured to flex in a flexural mode along a width direction of the resonating structure, wherein the width direction is defined at least substantially perpendicular to a length direction of the resonating structure, wherein the length direction is defined from the first end to a second end of the resonating structure, wherein the second end opposes the first end.

公开(公告)号：US10151638B2

公开(公告)日：2018-12-11

申请号：US15761082

申请日：2016-08-12

Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH

Inventor： Jifang Tao ,  Hong Cai ,  Yuandong Alex Gu ,  Guoqiang Wu

IPC: G01J5/08 ,  G01J5/20

Abstract: Various aspects of this disclosure provide a bolometer including a substrate and a ring resonator structure over the substrate. The bolometer may also include a silicon oxide layer in thermal contact with the ring resonator structure. The bolometer may further include a first waveguide over the substrate and coupled to the ring resonator structure, the first waveguide configured to couple an infrared light to the ring resonator structure so that the infrared light generates a temperature increase in the silicon oxide layer. The bolometer may additionally include a second waveguide over the substrate and coupled to the ring resonator structure, the second waveguide configured to couple a probe light input to the ring resonator structure so that a probe light output is generated from the probe light input, the probe light output having a change in a characteristic from the probe light input based on the temperature increase.