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公开(公告)号：US11467339B2
公开(公告)日：2022-10-11
申请号：US17190474
申请日：2021-03-03
Applicant: ASML NETHERLANDS B.V.
Inventor： Hendrik Sabert , Patrick Sebastian Uebel
IPC: G02B6/02 , G01K11/3206
Abstract: A system and method for providing a radiation source. In one arrangement, the radiation source includes an optical fiber that is hollow, and has an axial direction, a gas that fills the hollow of the optical fiber, and a plurality of temperature setting devices disposed at respective positions along the axial direction of the optical fiber, wherein the temperature setting devices are configured to control the temperature of the gas to locally control the density of the gas.
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公开(公告)号：US11385402B2
公开(公告)日：2022-07-12
申请号：US16903530
申请日：2020-06-17
Applicant: ASML NETHERLANDS B.V.
Abstract: A mounted hollow-core fiber arrangement includes a hollow-core fiber having a microstructure, and a mount arrangement including a plurality of mounting contacts configured to apply a force to an outer layer of the hollow-core fiber. A portion of the hollow-core fiber is located in a receiving region of the mount arrangement. The plurality of mounting contacts are positioned around the receiving region. The mounting contacts are distributed around the receiving region, the distribution of the mounting contacts corresponding to a distribution of features of the microstructure of the hollow-core fiber. The mounted hollow core fiber can be used in a radiation source apparatus for providing broadband radiation.
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公开(公告)号：US20220128912A1
公开(公告)日：2022-04-28
申请号：US17572864
申请日：2022-01-11
Applicant: ASML Netherlands B.V.
Abstract: An apparatus for receiving input radiation and broadening a frequency range of the input radiation to provide broadband output radiation. The apparatus includes a chamber, a fiber, a gas generating apparatus, and a radical generating apparatus. The fiber includes a hollow core configured to guide radiation propagating through the fiber, the hollow core in fluid communication with the chamber. The gas generating apparatus is configured to provide a gas within the chamber. The radical generating apparatus is configured to provide free radicals within the chamber to reduce contaminants in the gas. The apparatus may be included in a radiation source.
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4.发明授权公开(公告)号：US11971663B2
公开(公告)日：2024-04-30
申请号：US17626852
申请日：2020-07-07
Applicant: ASML Netherlands B.V.
Inventor： Marinus Petrus Reijnders , Hendrik Sabert , Patrick Sebastian Uebel
CPC classification number: G03F7/70616
Abstract: Provided are light sources and methods of controlling them, and devices and methods for use in measurement applications, particularly in metrology, for example in a lithographic apparatus. The methods and devices provide mechanisms for detection and/or correction of variations in the light source, in particular stochastic variations. Feedback or feedforward approaches can be used for the correction of the source and/or the metrology outputs. An exemplary method of controlling the spectral output of a light source which emits a time-varying spectrum of light includes the steps of: determining at least one characteristic of the spectrum of light emitted from the light source; and using said determined characteristic to control the spectral output.
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5.发明授权公开(公告)号：US11774671B2
公开(公告)日：2023-10-03
申请号：US17077756
申请日：2020-10-22
Applicant: ASML NETHERLANDS B.V.
Inventor： Patrick Sebastian Uebel , Peter Maximilian Götz , Sebastian Thomas Bauerschmidt , Coen Hubertus Matheus Baltis , Janneke Ravensbergen
CPC classification number: G02B6/02328 , C03B37/15 , G02B6/0096 , G02B6/02347 , G03F7/7085 , G03F9/7034 , G03F9/7065 , C03B2203/16 , C03B2203/42
Abstract: Optical components and methods of manufacture thereof. A first optical component has a hollow-core photonic crystal fiber includes internal capillaries for guiding radiation and an outer capillary sheathing the internal capillaries; and at least an output end section having a larger inner cross-sectional dimension over at least a portion of the output end section than an inner cross-sectional dimension of the outer capillary along a central portion of the hollow-core photonic crystal fiber prior to the output end section. A second optical component includes a hollow-core photonic crystal fiber and a sleeve arrangement.
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Patent Agency Ranking
公开(公告)号：US11733617B2
公开(公告)日：2023-08-22
申请号：US17572864
申请日：2022-01-11
Applicant: ASML Netherlands B.V.
CPC classification number: G03F9/7065 , G02B6/02328 , G02F1/365 , G03F7/7015 , G03F7/70133 , G03F7/70316 , G03F7/70325 , G03F7/70575 , G03F7/70616
Abstract: An apparatus for receiving input radiation and broadening a frequency range of the input radiation to provide broadband output radiation. The apparatus includes a chamber, a fiber, a gas generating apparatus, and a radical generating apparatus. The fiber includes a hollow core configured to guide radiation propagating through the fiber, the hollow core in fluid communication with the chamber. The gas generating apparatus is configured to provide a gas within the chamber. The radical generating apparatus is configured to provide free radicals within the chamber to reduce contaminants in the gas. The apparatus may be included in a radiation source.
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公开(公告)号：US20220269183A1
公开(公告)日：2022-08-25
申请号：US17741545
申请日：2022-05-11
Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N.V.
Inventor： Sebastian Thomas Bauerschmidt , Peter Maximilian Götz , Patrick Sebastian Uebel , Ronald Franciscus Herman Hugers , Jan Adrianus Boer , Edwin Johannes Cornelis Bos , Andreas Johannes Antonius Brouns , Vitaliy Prosyentsov , Paul William Scholtes - Van Eijk , Paulus Antonius Andreas Teunissen , Mahesh Upendra Ajgaonkar
Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.
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公开(公告)号：US11360396B2
公开(公告)日：2022-06-14
申请号：US17004140
申请日：2020-08-27
Applicant: ASML NETHERLANDS B.V. , ASML HOLDING N.V.
Inventor： Sebastian Thomas Bauerschmidt , Peter Maximilian Götz , Patrick Sebastian Uebel , Ronald Franciscus Herman Hugers , Jan Adrianus Boer , Edwin Johannes Cornelis Bos , Andreas Johannes Antonius Brouns , Vitaliy Prosyentsov , Paul William Scholtes-Van Eijk , Paulus Antonius Andreas Teunissen , Mahesh Upendra Ajgaonkar
Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.
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公开(公告)号：US11262665B2
公开(公告)日：2022-03-01
申请号：US16827843
申请日：2020-03-24
Applicant: ASML Netherlands B.V.
Abstract: An apparatus (100) for receiving input radiation (108) and broadening a frequency range of the input radiation so as to provide broadband output radiation (110). The apparatus comprises a fiber (102), wherein the fiber (102) may comprise a hollow core (104) for guiding radiation propagating through the fiber (102). The apparatus (100) further comprises an apparatus for providing a gas mixture (106) within the hollow core (104). The gas mixture (106) comprises a hydrogen component, and a working component, wherein the working component is for broadening a frequency range of a received input radiation (108) so as to provide the broadband output radiation (110). The apparatus may be included in a radiation source.
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公开(公告)号：US12204229B2
公开(公告)日：2025-01-21
申请号：US18373421
申请日：2023-09-27
Applicant: ASML NETHERLANDS B.V.
Abstract: A supercontinuum radiation source including a modulator being operable to modulate pump laser radiation including a train of radiation pulses to provide modulated pump laser radiation, the modulation being such to selectively provide a burst of the pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.
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