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1.发明授权Computer-implemented methods and systems for determining a configuration for a light scattering inspection system 有权用于确定光散射检查系统的配置的计算机实现的方法和系统公开(公告)号：US07436505B2
公开(公告)日：2008-10-14
申请号：US11278624
申请日：2006-04-04
申请人： Alexander Belyaev , Daniel Kavaldjiev , Amith Murali , Aleksey Petrenko , Mike D. Kirk , David Shortt , Brian L. Haas , Kurt L. Haller
发明人： Alexander Belyaev , Daniel Kavaldjiev , Amith Murali , Aleksey Petrenko , Mike D. Kirk , David Shortt , Brian L. Haas , Kurt L. Haller
IPC分类号： G01N21/00
CPC分类号： G01N21/9501
摘要： Computer-implemented methods and systems for determining a configuration for a light scattering inspection system are provided. One computer-implemented method includes determining a three-dimensional map of signal-to-noise ratio values for data that would be acquired for a specimen and a potential defect on the specimen by the light scattering inspection system across a scattering hemisphere of the inspection system. The method also includes determining one or more portions of the scattering hemisphere in which the signal-to-noise ratio values are higher than in other portions of the scattering hemisphere based on the three-dimensional map. In addition, the method includes determining a configuration for a detection subsystem of the inspection system based on the one or more portions of the scattering hemisphere.
摘要翻译： 提供了用于确定光散射检查系统的配置的计算机实现的方法和系统。 一种计算机实现的方法包括：通过在检查系统的散射半球上的光散射检查系统来确定用于样本获取的数据和样本上的潜在缺陷的信噪比值的三维图 。 该方法还包括基于三维图确定散射半球的一个或多个部分，其中信噪比值高于散射半球的其它部分。 此外，该方法包括基于散射半球的一个或多个部分来确定检查系统的检测子系统的配置。
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2.发明申请Computer-Implemented Methods and Systems for Determining a Configuration for a Light Scattering Inspection System 有权用于确定光散射检查系统的配置的计算机实现的方法和系统公开(公告)号：US20070229809A1
公开(公告)日：2007-10-04
申请号：US11278624
申请日：2006-04-04
申请人： Alexander Belyaev , Daniel Kavaldjiev , Amith Murali , Aleksey Petrenko , Mike Kirk , David Shortt , Brian Haas , Kurt Haller
发明人： Alexander Belyaev , Daniel Kavaldjiev , Amith Murali , Aleksey Petrenko , Mike Kirk , David Shortt , Brian Haas , Kurt Haller
IPC分类号： G01N21/88
CPC分类号： G01N21/9501
摘要： Computer-implemented methods and systems for determining a configuration for a light scattering inspection system are provided. One computer-implemented method includes determining a three-dimensional map of signal-to-noise ratio values for data that would be acquired for a specimen and a potential defect on the specimen by the light scattering inspection system across a scattering hemisphere of the inspection system. The method also includes determining one or more portions of the scattering hemisphere in which the signal-to-noise ratio values are higher than in other portions of the scattering hemisphere based on the three-dimensional map. In addition, the method includes determining a configuration for a detection subsystem of the inspection system based on the one or more portions of the scattering hemisphere.
摘要翻译： 提供了用于确定光散射检查系统的配置的计算机实现的方法和系统。 一种计算机实现的方法包括：通过在检查系统的散射半球上的光散射检查系统来确定用于样本获取的数据和样本上的潜在缺陷的信噪比值的三维图 。 该方法还包括基于三维图确定散射半球的一个或多个部分，其中信噪比值高于散射半球的其它部分。 此外，该方法包括基于散射半球的一个或多个部分来确定检查系统的检测子系统的配置。
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公开(公告)号：US08042254B1
公开(公告)日：2011-10-25
申请号：US11963271
申请日：2007-12-21
CPC分类号： H01L21/68785 , Y10T29/49998 , Y10T279/18
摘要： An edge-handling chuck, a system for holding and rotating a test substrate at a high speed and a method for chucking a rotating substrate are disclosed. The Chuck includes a plate having a central axis, a fluid opening and a top surface with a varied topography characterized by symmetry about the central axis. The topography is such that a volume flow rate of fluid between the fluid opening and a periphery of the top surface sufficient to counteract substrate sagging is significantly less than a volume flow rate needed for a similar but flat-surfaced chuck to similarly counteract such sagging. The system may further include a spindle motor and a gas system that supplies gas through the fluid opening to a gap between the top surface and a back surface of the substrate. A radial velocity of the fluid through the gap is approximately constant.
摘要翻译： 公开了一种边缘处理卡盘，用于高速保持和旋转测试基板的系统以及用于夹持旋转基板的方法。 卡盘包括具有中心轴线的板，流体开口和具有以围绕中心轴线对称为特征的不同形貌的顶部表面。 这种形状使得流体开口和足以抵消底物下垂的顶表面周边之间的流体的体积流速显着小于类似但平坦表面的卡盘相似地抵消这种下垂所需的体积流量。 该系统还可以包括主轴电动机和气体系统，其将气体通过流体开口提供到衬底的顶表面和后表面之间的间隙。 通过间隙的流体的径向速度近似恒定。
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4.发明申请Method and apparatus for producing and Measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection system 有权用于生产和测量旋转晶片检测系统的动态聚焦，转向和成形斜激光照明的方法和装置公开(公告)号：US20110051132A1
公开(公告)日：2011-03-03
申请号：US12584294
申请日：2009-09-02
CPC分类号： G01N21/9501 , G01N21/8806 , G01N2201/06113 , G01N2201/0633 , G02B27/0972
摘要： A method and apparatus for producing high frequency dynamically focused oblique laser illumination for a spinning wafer inspection system. The focus is changed by changing the beam direction incidence angle so as to bring focal spot onto the wafer surface.Disclosed herein is a system and method for automatic beam shaping (i.e., spot size) and steering (i.e., position) for a spinning wafer inspection system, combined into a single module. Also disclosed is a method and system for measuring the beam position/size/shape and angle with sufficient resolution to make corrections using feedback from the monitor.
摘要翻译： 一种用于生产用于旋转晶片检测系统的高频动态聚焦倾斜激光照明的方法和装置。 通过改变光束方向入射角来改变焦点，以便将焦斑引入晶片表面。 本文公开了一种用于旋转晶片检查系统的自动光束成形（即光点尺寸）和转向（即，位置）的系统和方法，其组合成单个模块。 还公开了一种用于以足够的分辨率测量光束位置/尺寸/形状和角度以使用来自监视器的反馈进行校正的方法和系统。
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公开(公告)号：US07605915B2
公开(公告)日：2009-10-20
申请号：US11697296
申请日：2007-04-05
IPC分类号： G01B11/30
CPC分类号： G01D18/00 , H01L23/544 , H01L2223/54453 , H01L2924/0002 , H01L2924/09701 , H01L2924/00
摘要： In one embodiment, a system to create a haze standard on a surface of an object, comprises a radiation targeting assembly that targets a radiation beam onto the surface of the object, a drive assembly to impart relative motion between the radiation targeting assembly and the surface of the object, and a controller to regulate the radiation targeting assembly to deliver radiation at a controlled power level to at least one portion of the surface, thereby forming at least one region having a known haze characteristic.
摘要翻译： 在一个实施例中，在物体表面上产生雾度标准的系统包括将辐射束对准到物体的表面上的辐射瞄准组件，驱动组件，以在辐射靶向组件和表面之间施加相对运动 以及控制器，其调节辐射瞄准组件以将受控功率水平的辐射传送到表面的至少一部分，从而形成具有已知雾度特性的至少一个区域。
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6.发明授权Method and apparatus for producing and measuring dynamically focussed, steered, and shaped oblique laser illumination for spinning wafer inspection system 有权用于旋转晶片检测系统的动态聚焦，转向和成形斜激光照明的生产和测量方法和装置公开(公告)号：US09068952B2
公开(公告)日：2015-06-30
申请号：US12584294
申请日：2009-09-02
CPC分类号： G01N21/9501 , G01N21/8806 , G01N2201/06113 , G01N2201/0633 , G02B27/0972
摘要： A method and apparatus for producing high frequency dynamically focused oblique laser illumination for a spinning wafer inspection system. The focus is changed by changing the beam direction incidence angle so as to bring focal spot onto the wafer surface.Disclosed herein is a system and method for automatic beam shaping (i.e., spot size) and steering (i.e., position) for a spinning wafer inspection system, combined into a single module. Also disclosed is a method and system for measuring the beam position/size/shape and angle with sufficient resolution to make corrections using feedback from the monitor.
摘要翻译： 一种用于生产用于旋转晶片检测系统的高频动态聚焦倾斜激光照明的方法和装置。 通过改变光束方向入射角来改变焦点，以便将焦斑引入晶片表面。 本文公开了一种用于旋转晶片检查系统的自动光束成形（即光点尺寸）和转向（即，位置）的系统和方法，其组合成单个模块。 还公开了一种用于以足够的分辨率测量光束位置/尺寸/形状和角度以使用来自监视器的反馈进行校正的方法和系统。
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公开(公告)号：US20080245958A1
公开(公告)日：2008-10-09
申请号：US11697296
申请日：2007-04-05
IPC分类号： G01D18/00
CPC分类号： G01D18/00 , H01L23/544 , H01L2223/54453 , H01L2924/0002 , H01L2924/09701 , H01L2924/00
摘要： In one embodiment, a system to create a haze standard on a surface of an object, comprises a radiation targeting assembly that targets a radiation beam onto the surface of the object, a drive assembly to impart relative motion between the radiation targeting assembly and the surface of the object, and a controller to regulate the radiation targeting assembly to deliver radiation at a controlled power level to at least one portion of the surface, thereby forming at least one region having a known haze characteristic.
摘要翻译： 在一个实施例中，在物体表面上产生雾度标准的系统包括将辐射束对准到物体的表面上的辐射瞄准组件，驱动组件，以在辐射靶向组件和表面之间施加相对运动 以及控制器，其调节辐射瞄准组件以将受控功率水平的辐射传送到表面的至少一部分，从而形成具有已知雾度特性的至少一个区域。
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