Computer readable medium for controlling a method of cleaning a process chamber
    1.
    发明授权
    Computer readable medium for controlling a method of cleaning a process chamber 有权
    用于控制清洁处理室的方法的计算机可读介质

    公开(公告)号:US06482746B2

    公开(公告)日:2002-11-19

    申请号:US09874882

    申请日:2001-06-05

    IPC分类号: H01L21302

    摘要: A method for the in situ cleaning of a semiconductor deposition chamber utilized for the deposition of a semiconductor material such as titanium or titanium nitride comprising, between wafers, introducing chlorine gas into the chamber at elevated temperature, purging the chamber with an inert gas and evacuating it before introduction of the next wafer. A two-stage between wafer cleaning process is carried out by introducing chlorine into the chamber at elevated temperature, thereafter initiating a plasma without removing the chlorine, purging the chamber with an inert gas and evacuating it before introduction of the next wafer. In a preferred embodiment, a thin protective film of titanium is deposited on the inner sur aces of the chamber prior to utilizing the chamber for he deposition of such material. The protective layer is replenished following each two-stage cleaning.

    摘要翻译: 一种半导体沉积室的原位清洗方法,用于沉积诸如钛或氮化钛的半导体材料,包括在晶片之间,在升高的温度下将氯气引入室中,用惰性气体吹扫室,并排空 在引入下一个晶圆之前。 晶片清洗过程之间的两阶段是通过在升高的温度下将氯引入室中,之后启动等离子体而不去除氯,用惰性气体吹扫室并在引入下一个晶片之前对其进行排空。 在一个优选实施例中,在使用该室以沉积这种材料之前,将薄的钛保护膜沉积在室的内侧。 在每次两级清洁之后补充保护层。

    Method for cleaning a process chamber
    2.
    发明授权
    Method for cleaning a process chamber 有权
    清洁处理室的方法

    公开(公告)号:US06242347B1

    公开(公告)日:2001-06-05

    申请号:US09163711

    申请日:1998-09-30

    IPC分类号: H01L2144

    摘要: A method for the in situ cleaning of a semiconductor deposition chamber utilized for the deposition of a semiconductor material such as titanium or titanium nitride comprising, between wafers, introducing chlorine gas into the chamber at elevated temperature, purging the chamber with an inert gas and evacuating it before introduction of the next wafer. A two-stage between wafer cleaning process is carried out by introducing chlorine into the chamber at elevated temperature, thereafter initiating a plasma without removing the chlorine, purging the chamber with an inert gas and evacuating it before introduction of the next wafer. In a preferred embodiment, a thin protective film of titanium is deposited on the inner surfaces of the chamber prior to utilizing the chamber for the deposition of such material. The protective layer is replenished following each two-stage cleaning.

    摘要翻译: 一种半导体沉积室的原位清洗方法,用于沉积诸如钛或氮化钛的半导体材料,包括在晶片之间,在升高的温度下将氯气引入室中,用惰性气体吹扫室,并排空 在引入下一个晶圆之前。 晶片清洗过程之间的两阶段是通过在升高的温度下将氯引入室中,之后启动等离子体而不去除氯,用惰性气体吹扫室并在引入下一个晶片之前对其进行排空。 在一个优选实施例中,在利用该腔室以沉积这种材料之前,在室的内表面上沉积薄的钛保护膜。 在每次两级清洁之后补充保护层。

    Electric actuator unit for a vehicle brake assembly
    3.
    发明授权
    Electric actuator unit for a vehicle brake assembly 有权
    用于车辆制动组件的电动执行器单元

    公开(公告)号:US08011482B2

    公开(公告)日:2011-09-06

    申请号:US12084277

    申请日:2006-10-26

    IPC分类号: F16D65/14

    摘要: An improved structure for an electric actuator unit for use in a brake assembly. According to an embodiment, a drum brake assembly comprises a mounting flange having an abutment; a backing plate secured to the mounting flange, the backing plate having a pair of brake shoes supported thereon; and an electric actuator unit for actuating the drum brake assembly to selectively move the brake shoes between a braking and a non-braking position, the electric actuator unit including a motor, a gear-set operatively coupled to be driven by the motor, a spindle nut operatively coupled to be rotationally driven by the gear-set, a pull rod operatively coupled to be translatorily driven by the spindle nut, and a brake shoe actuation link assembly operatively coupled to be actuated by the pull rod to thereby move the brake shoes between the braking and non-braking positions, the pull rod being operatively coupled to the brake shoe actuation link assembly by a link, the link having a first end pivotally connected to the pull rod and a second end pivotally connected to a second member of the brake shoe actuation link assembly.

    摘要翻译: 一种用于制动组件中的电致动器单元的改进结构。 根据实施例,鼓式制动组件包括具有基台的安装凸缘; 固定在所述安装凸缘上的背板,所述背板具有支撑在其上的一对制动靴; 以及电致动器单元,用于致动所述鼓式制动器组件以在制动和非制动位置之间选择性地移动所述制​​动蹄,所述电致动器单元包括电动机,可操作地联接以由所述电动机驱动的齿轮组, 螺母,其可操作地联接以由所述齿轮组旋转地驱动;拉杆,其可操作地联接以由所述主轴螺母转换驱动;以及制动蹄致动连杆组件,其操作地联接以由所述拉杆致动,从而使所述制动蹄在 制动和非制动位置,所述拉杆通过连杆可操作地联接到所述制动蹄致动连杆组件,所述连杆具有枢转地连接到所述拉杆的第一端和枢转地连接到所述制动器的第二构件的第二端 鞋致动链接组件。

    Drum-in-hat disc brake assembly
    4.
    发明授权
    Drum-in-hat disc brake assembly 有权
    鼓式盘式制动器总成

    公开(公告)号:US08356701B2

    公开(公告)日:2013-01-22

    申请号:US12144701

    申请日:2008-06-24

    IPC分类号: F16D65/22

    摘要: A drum-in-hat (DIH) disc brake assembly has a disc service brake, a DIH parking and emergency brake, and a parking brake anchor. A backing plate, an axle flange, and a caliper bracket each have at least two mounting apertures formed therethrough. The parking brake anchor includes a bracket portion having a pair of studs extending axially outwardly therefrom. The studs are structured and configured to extend through the respective mounting apertures of the backing plate, the axle flange, and the caliper bracket for securing the caliper bracket, parking brake anchor, and the backing plate to the axle flange.

    摘要翻译: 鼓式(DIH)盘式制动器组件具有盘式制动器,DIH停车和紧急制动器以及驻车制动器。 背板,轴凸缘和卡钳支架各自具有穿过其中形成的至少两个安装孔。 驻车制动器锚固件包括具有从其轴向向外延伸的一对螺柱的托架部分。 螺栓被构造和构造成延伸通过背板,轴凸缘和卡钳支架的相应安装孔,用于将卡钳支架,驻车制动器锚固件和背板固定到轴凸缘。

    DRUM-IN-HAT DISC BRAKE ASSEMBLY
    5.
    发明申请
    DRUM-IN-HAT DISC BRAKE ASSEMBLY 有权
    卷筒式制动器总成

    公开(公告)号:US20090314593A1

    公开(公告)日:2009-12-24

    申请号:US12144701

    申请日:2008-06-24

    IPC分类号: F16D63/00

    摘要: A drum-in-hat (DIH) disc brake assembly has a disc service brake, a DIH parking and emergency brake, and a parking brake anchor. A backing plate, an axle flange, and a caliper bracket each have at least two mounting apertures formed therethrough. The parking brake anchor includes a bracket portion having a pair of studs extending axially outwardly therefrom. The studs are structured and configured to extend through the respective mounting apertures of the backing plate, the axle flange, and the caliper bracket for securing the caliper bracket, parking brake anchor, and the backing plate to the axle flange.

    摘要翻译: 鼓式(DIH)盘式制动器组件具有盘式制动器,DIH停车和紧急制动器以及驻车制动器。 背板,轴凸缘和卡钳支架各自具有穿过其中形成的至少两个安装孔。 驻车制动器锚固件包括具有从其轴向向外延伸的一对螺柱的托架部分。 螺栓被构造和构造成延伸通过背板,轴凸缘和卡钳支架的相应安装孔,用于将卡钳支架,驻车制动器锚固件和背板固定到轴凸缘。

    Electric Actuator Unit for a Vehicle Brake Assembly
    7.
    发明申请
    Electric Actuator Unit for a Vehicle Brake Assembly 有权
    汽车制动总成电动执行机构

    公开(公告)号:US20090260929A1

    公开(公告)日:2009-10-22

    申请号:US12084277

    申请日:2006-10-26

    IPC分类号: B60T1/02 F16D51/00

    摘要: An improved structure for an electric actuator unit for use in a brake assembly. According to an embodiment, a drum brake assembly comprises a mounting flange having an abutment; a backing plate secured to the mounting flange, the backing plate having a pair of brake shoes supported thereon; and an electric actuator unit for actuating the drum brake assembly to selectively move the brake shoes between a braking and a non-braking position, the electric actuator unit including a motor, a gear-set operatively coupled to be driven by the motor, a spindle nut operatively coupled to be rotationally driven by the gear-set, a pull rod operatively coupled to be translatorily driven by the spindle nut, and a brake shoe actuation link assembly operatively coupled to be actuated by the pull rod to thereby move the brake shoes between the braking and non-braking positions, the pull rod being operatively coupled to the brake shoe actuation link assembly by a link, the link having a first end pivotally connected to the pull rod and a second end pivotally connected to a second member of the brake shoe actuation link assembly.

    摘要翻译: 一种用于制动组件中的电致动器单元的改进结构。 根据实施例,鼓式制动组件包括具有基台的安装凸缘; 固定在所述安装凸缘上的背板,所述背板具有支撑在其上的一对制动靴; 以及电致动器单元,用于致动所述鼓式制动器组件以在制动和非制动位置之间选择性地移动所述制​​动蹄,所述电致动器单元包括电动机,可操作地联接以由所述电动机驱动的齿轮组, 螺母,其可操作地联接以由所述齿轮组旋转地驱动;拉杆,其可操作地联接以由所述主轴螺母转动地驱动;以及制动蹄致动连杆组件,其操作地联接以由所述拉杆致动,从而使所述制动蹄在 制动和非制动位置,拉杆通过连杆可操作地联接到制动蹄致动连杆组件,所述连杆具有枢转地连接到拉杆的第一端和枢转地连接到制动器的第二构件的第二端 鞋致动链接组件。

    Park brake cable end assembly for a drum-in-hat disc brake assembly
    9.
    发明授权
    Park brake cable end assembly for a drum-in-hat disc brake assembly 失效
    盘式制动器总成的驻车制动电缆端部组件

    公开(公告)号:US07093695B1

    公开(公告)日:2006-08-22

    申请号:US10812844

    申请日:2004-03-30

    申请人: Brian Boyle

    发明人: Brian Boyle

    IPC分类号: F16D65/14

    摘要: This invention relates to an improved park brake cable end assembly for a drum-in-hat disc brake assembly having a disc service brake and a drum-in-hat parking and emergency brake. The drum-in-hat disc brake assembly includes a backing plate adapted to support a drum brake shoe assembly of the drum-in-hat parking and emergency brake; a caliper bracket adapted support a disc brake caliper assembly of the disc service brake; and a drum-in-hat adapter adapted support a disc brake caliper assembly of the disc service brake. According to a feature of the present invention, the drum-in-hat parking and emergency brake includes a park brake cable end assembly including a lever pivotally supported on a link having an end having a configuration which is adapted to accommodate either a parking brake cable having a S-shaped cable end or a clevis shaped cable end.

    摘要翻译: 本发明涉及一种用于圆盘式盘式制动器组件的改进的驻车制动电缆端组件,该组件具有盘式制动器和一个鼓帽式停车和紧急制动器。 滚筒式盘式制动器组件包括:背板,其适于支撑鼓式制动器驻车和紧急制动器的鼓式制动蹄组件; 卡钳支架适用于支撑盘式制动器的盘式制动钳组件; 以及适于支撑盘式制动器的盘式制动钳组件的转鼓式适配器。 根据本发明的特征,滚筒式停车和紧急制动器包括驻车制动器电缆端组件,其包括枢转地支撑在连杆上的杆,所述杆具有一端的结构,该构造适于容纳驻车制动缆索 具有S形电缆端或U形夹形电缆端。