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公开(公告)号：US20170029267A1
公开(公告)日：2017-02-02
申请号：US15290361
申请日：2016-10-11
Inventor： Colin Robert Jenkins , Tsjerk Hans Hoekstra , Euan James Boyd
CPC classification number: H04R19/005 , B81B3/0021 , B81B3/0075 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81C1/00158 , H01L41/09 , H01L41/0926 , H01L2224/16225 , H01L2224/48091 , H01L2924/1461 , H01L2924/16151 , H01L2924/16152 , H04R1/222 , H04R23/006 , H04R2201/003 , Y10T29/49005 , H01L2924/00014
Abstract: A MEMS capacitive transducer with increased robustness and resilience to acoustic shock. The transducer structure includes a flexible membrane supported between a first volume and a second volume, and at least one variable vent structure in communication with at least one of the first and second volumes. The variable vent structure includes at least one moveable portion which is moveable in response to a pressure differential across the moveable portion so as to vary the size of a flow path through the vent structure. The variable vent may be formed through the membrane and the moveable portion may be a part of the membrane, defined by one or more channels, that is deflectable away from the surface of the membrane. The variable vent is preferably closed in the normal range of pressure differentials but opens at high pressure differentials to provide more rapid equalisation of the air volumes above and below the membrane.
Abstract translation: 一种MEMS电容式换能器，具有增强的抗震性能和弹性。 换能器结构包括支撑在第一体积和第二体积之间的柔性膜，以及与第一和第二体积中的至少一个连通的至少一个可变排气口结构。 可变排气结构包括至少一个可移动部分，其可响应于可移动部分上的压差而移动，以便改变通过排气结构的流动路径的尺寸。 可变通气口可以通过膜形成，并且可移动部分可以是由一个或多个通道限定的膜，其可偏离膜的表面偏转。 可变排气口优选在正常的压差范围内封闭，但在高压差下打开以提供膜上方和下方的空气体积的更快速平衡。
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公开(公告)号：US20190306630A1
公开(公告)日：2019-10-03
申请号：US16443088
申请日：2019-06-17
Inventor： Colin Robert Jenkins , Tsjerk Hans Hoekstra , Euan James Boyd
Abstract: A MEMS capacitive transducer with increased robustness and resilience to acoustic shock. The transducer structure includes a flexible membrane supported between a first volume and a second volume, and at least one variable vent structure in communication with at least one of the first and second volumes. The variable vent structure includes at least one moveable portion which is moveable in response to a pressure differential across the moveable portion so as to vary the size of a flow path through the vent structure. The variable vent may be formed through the membrane and the moveable portion may be a part of the membrane, defined by one or more channels, that is deflectable away from the surface of the membrane. The variable vent is preferably closed in the normal range of pressure differentials but opens at high pressure differentials to provide more rapid equalisation of the air volumes above and below the membrane.
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公开(公告)号：US20190047847A1
公开(公告)日：2019-02-14
申请号：US16052006
申请日：2018-08-01
Abstract: A MEMS transducer configured to operate as a microphone, the MEMS transducer comprising a flexible membrane, the flexible membrane having a first surface and a second surface, wherein the first surface of the flexible membrane is fluidically isolated from the second surface of the flexible membrane. Also, a MEMS device comprising a MEMS transducer, an electronic device comprising a MEMS transducer and/or a MEMS device, and a method for forming a MEMS device.
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公开(公告)号：US10085094B2
公开(公告)日：2018-09-25
申请号：US15636121
申请日：2017-06-28
Inventor： Scott Lyall Cargill , Colin Robert Jenkins , Euan James Boyd
CPC classification number: H04R19/04 , B81B3/0072 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81B2203/0315 , B81C1/00666 , H04R7/04 , H04R7/18 , H04R17/02 , H04R19/005 , H04R2201/003
Abstract: A MEMS transducer structure comprises a substrate comprising a cavity. A membrane layer is supported relative to the substrate to provide a flexible membrane. A peripheral edge of the cavity defines at least one perimeter region that is convex with reference to the center of the cavity. The peripheral edge of the cavity may further define at least one perimeter region that is concave with reference to the center of the cavity.
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公开(公告)号：US20170359658A1
公开(公告)日：2017-12-14
申请号：US15665996
申请日：2017-08-01
Inventor： Colin Robert Jenkins , Tsjerk Hans Hoekstra , Euan James Boyd
CPC classification number: H04R19/005 , B81B3/0021 , B81B3/0075 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81C1/00158 , H01L41/09 , H01L41/0926 , H01L2224/16225 , H01L2224/48091 , H01L2924/1461 , H01L2924/16151 , H01L2924/16152 , H04R1/222 , H04R23/006 , H04R2201/003 , Y10T29/49005 , H01L2924/00014
Abstract: A MEMS capacitive transducer with increased robustness and resilience to acoustic shock. The transducer structure includes a flexible membrane supported between a first volume and a second volume, and at least one variable vent structure in communication with at least one of the first and second volumes. The variable vent structure includes at least one moveable portion which is moveable in response to a pressure differential across the moveable portion so as to vary the size of a flow path through the vent structure. The variable vent may be formed through the membrane and the moveable portion may be a part of the membrane, defined by one or more channels, that is deflectable away from the surface of the membrane. The variable vent is preferably closed in the normal range of pressure differentials but opens at high pressure differentials to provide more rapid equalisation of the air volumes above and below the membrane.
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Patent Agency Ranking
公开(公告)号：US10750291B2
公开(公告)日：2020-08-18
申请号：US15987346
申请日：2018-05-23
Inventor： Marek Sebastian Piechocinski , Richard Ian Laming , Tsjerk Hans Hoekstra , Colin Robert Jenkins , Axel Thomsen
Abstract: The application describes MEMS transducers having a patterned membrane electrode which incorporates a plurality of openings or voids. A conductive element is provided on the surface of the underlying membrane within the opening.
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公开(公告)号：US10266393B2
公开(公告)日：2019-04-23
申请号：US15414178
申请日：2017-01-24
Inventor： Colin Wei Hong Chung , Scott Lyall Cargill , Colin Robert Jenkins
Abstract: The application describes MEMS transducers having a vent structure provided in a flexible membrane of the vent structure The vent structure comprises at least one moveable portion and the vent structure is configured such that, in response to a differential pressure across the vent structure, the moveable portion is rotatable about first and second axes of rotation, which axes of rotation extend in the plane of the membrane.
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公开(公告)号：US10343901B2
公开(公告)日：2019-07-09
申请号：US15543492
申请日：2016-01-25
Inventor： Scott Lyall Cargill , Colin Robert Jenkins , Euan James Boyd , Richard Ian Laming
Abstract: The application describes MEMS transducer having a flexible membrane and which seeks to alleviate and/or redistribute stresses within the membrane layer. A membrane having a first/active region and a second/inactive region is described.
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公开(公告)号：US09756429B2
公开(公告)日：2017-09-05
申请号：US15470107
申请日：2017-03-27
Inventor： Colin Robert Jenkins , Tsjerk Hans Hoekstra , Euan James Boyd
CPC classification number: H04R19/005 , B81B3/0021 , B81B3/0075 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81C1/00158 , H01L41/09 , H01L41/0926 , H01L2224/16225 , H01L2224/48091 , H01L2924/1461 , H01L2924/16151 , H01L2924/16152 , H04R1/222 , H04R23/006 , H04R2201/003 , Y10T29/49005 , H01L2924/00014
Abstract: A MEMS capacitive transducer with increased robustness and resilience to acoustic shock. The transducer structure includes a flexible membrane supported between a first volume and a second volume, and at least one variable vent structure in communication with at least one of the first and second volumes. The variable vent structure includes at least one moveable portion which is moveable in response to a pressure differential across the moveable portion so as to vary the size of a flow path through the vent structure. The variable vent may be formed through the membrane and the moveable portion may be a part of the membrane, defined by one or more channels, that is deflectable away from the surface of the membrane. The variable vent is preferably closed in the normal range of pressure differentials but opens at high pressure differentials to provide more rapid equalization of the air volumes above and below the membrane.
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公开(公告)号：US09637374B2
公开(公告)日：2017-05-02
申请号：US15290361
申请日：2016-10-11
Inventor： Colin Robert Jenkins , Tsjerk Hans Hoekstra , Euan James Boyd
CPC classification number: H04R19/005 , B81B3/0021 , B81B3/0075 , B81B2201/0257 , B81B2201/0264 , B81B2203/0127 , B81C1/00158 , H01L41/09 , H01L41/0926 , H01L2224/16225 , H01L2224/48091 , H01L2924/1461 , H01L2924/16151 , H01L2924/16152 , H04R1/222 , H04R23/006 , H04R2201/003 , Y10T29/49005 , H01L2924/00014
Abstract: A MEMS capacitive transducer with increased robustness and resilience to acoustic shock. The transducer structure includes a flexible membrane supported between a first volume and a second volume, and at least one variable vent structure in communication with at least one of the first and second volumes. The variable vent structure includes at least one moveable portion which is moveable in response to a pressure differential across the moveable portion so as to vary the size of a flow path through the vent structure. The variable vent may be formed through the membrane and the moveable portion may be a part of the membrane, defined by one or more channels, that is deflectable away from the surface of the membrane. The variable vent is preferably closed in the normal range of pressure differentials but opens at high pressure differentials to provide more rapid equalization of the air volumes above and below the membrane.
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