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    System and method for product yield prediction
    3.
    发明申请
    System and method for product yield prediction 有权
    产品产量预测的系统和方法

    公开(公告)号：US20070118242A1

    公开(公告)日：2007-05-24

    申请号：US11503433

    申请日：2006-08-10

    申请人： Brian Stine ,  Christopher Hess ,  John Kibarian ,  Kimon Michaels ,  Joseph Davis ,  Purnendu Mozumder ,  Sherry Lee ,  Larg Weiland ,  Dennis Ciplickas ,  David Stashower

    发明人： Brian Stine ,  Christopher Hess ,  John Kibarian ,  Kimon Michaels ,  Joseph Davis ,  Purnendu Mozumder ,  Sherry Lee ,  Larg Weiland ,  Dennis Ciplickas ,  David Stashower

    IPC分类号： G06F19/00

    CPC分类号： G06F17/5081 ,  G05B15/02 ,  H01L22/20 ,  H01L22/34 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A system and method for predicting yield of integrated circuits includes at least one type of characterization vehicle which incorporates at least one feature which is representative of at least one type of feature to be incorporated in the final integrated circuit product. The characterization vehicle is subjected to at least one of the process operations making up the fabrication cycle to be used in fabricating the integrated circuit product in order to produce a yield model. The yield model embodies a layout as defined by the characterization vehicle and preferably includes features which facilitate the gathering of electrical test data and testing of prototype sections at operating speeds. An extraction engine extracts predetermined layout attributes from a proposed product layout. Operating on the yield model, the extraction engine produces yield predictions as a function of layout attributes and broken down by layers or steps in the fabrication process. These yield predictions are then used to determine which areas in the fabrication process require the most improvement.

    摘要翻译： 用于预测集成电路的产量的系统和方法包括至少一种表征车辆，其包括至少一个特征，其代表要并入到最终集成电路产品中的至少一种类型的特征。 表征车辆经受构成制造周期的工艺操作中的至少一个，以用于制造集成电路产品以产生屈服模型。 产量模型体现了由表征车辆定义的布局，并且优选地包括便于在运行速度下收集电测试数据和测试原型部分的特征。 提取引擎从提出的产品布局中提取预定的布局属性。 在产量模型上运行，提取引擎作为布局属性的函数产生产量预测，并在制造过程中按层或步骤细分。 然后使用这些产量预测来确定制造过程中哪些领域需要最大的改进。

    System and method for product yield prediction
    4.
    发明申请
    System and method for product yield prediction 失效
    产品产量预测的系统和方法

    公开(公告)号：US20050158888A1

    公开(公告)日：2005-07-21

    申请号：US11078630

    申请日：2005-03-10

    申请人： Brian Stine ,  Christopher Hess ,  John Kibarian ,  Kimon Michaels ,  Joseph Davis ,  Purnendu Mozumder ,  Sherry Lee ,  Larg Weiland ,  Dennis Ciplickas ,  David Stashower

    发明人： Brian Stine ,  Christopher Hess ,  John Kibarian ,  Kimon Michaels ,  Joseph Davis ,  Purnendu Mozumder ,  Sherry Lee ,  Larg Weiland ,  Dennis Ciplickas ,  David Stashower

    IPC分类号： H01L21/00 ,  G01R31/26 ,  G05B15/02 ,  H01L21/02 ,  H01L21/66 ,  H01L23/544

    CPC分类号： G06F17/5081 ,  G05B15/02 ,  H01L22/20 ,  H01L22/34 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A system and method for predicting yield of integrated circuits includes at least one type of characterization vehicle which incorporates at least one feature which is representative of at least one type of feature to be incorporated in the final integrated circuit product. The characterization vehicle is subjected to at least one of the process operations making up the fabrication cycle to be used in fabricating the integrated circuit product in order to produce a yield model. The yield model embodies a layout as defined by the characterization vehicle and preferably includes features which facilitate the gathering of electrical test data and testing of prototype sections at operating speeds. An extraction engine extracts predetermined layout attributes from a proposed product layout. Operating on the yield model, the extraction engine produces yield predictions as a function of layout attributes and broken down by layers or steps in the fabrication process. These yield predictions are then used to determine which areas in the fabrication process require the most improvement.

    摘要翻译： 用于预测集成电路的产量的系统和方法包括至少一种表征车辆，其包括至少一个特征，其代表要并入到最终集成电路产品中的至少一种类型的特征。 表征车辆经受构成制造周期的工艺操作中的至少一个，以用于制造集成电路产品以产生屈服模型。 产量模型体现了由表征车辆定义的布局，并且优选地包括便于在运行速度下收集电测试数据和测试原型部分的特征。 提取引擎从提出的产品布局中提取预定的布局属性。 在产量模型上运行，提取引擎作为布局属性的函数产生产量预测，并在制造过程中按层或步骤细分。 然后使用这些产量预测来确定制造过程中哪些领域需要最大的改进。

    Test Cells for semiconductor yield improvement
    6.
    发明申请
    Test Cells for semiconductor yield improvement 有权
    测试电池用于半导体产量提高

    公开(公告)号：US20080169466A1

    公开(公告)日：2008-07-17

    申请号：US12002094

    申请日：2007-12-14

    申请人： Brian Stine ,  Victor Kitch ,  Mark Zwald ,  Stefano Tonello

    发明人： Brian Stine ,  Victor Kitch ,  Mark Zwald ,  Stefano Tonello

    IPC分类号： H01L21/66 ,  H01L23/58 ,  H01L21/50

    CPC分类号： G11C29/025 ,  G01R31/2884 ,  G11C17/14 ,  G11C29/006 ,  G11C29/24 ,  G11C2029/0403 ,  H01L22/34 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A test cell for localizing defects includes a first active region, a second active region formed substantially parallel to the first active region, a third active region formed substantially parallel to the first and second active regions, a fourth active region formed between the first and second active regions, and a fifth active region formed between the second and third active regions. The fourth and fifth active regions are formed adjacent to opposite end portions of the second active region. The fourth and fifth active regions are also formed substantially perpendicular to the second active region.

    摘要翻译： 用于定位缺陷的测试单元包括第一有源区，基本上平行于第一有源区形成的第二有源区，基本上平行于第一和第二有源区形成的第三有源区，形成在第一和第二有源区之间的第四有源区 有源区和形成在第二和第三有源区之间的第五有源区。 第四和第五有源区域邻近第二有源区域的相对端部分形成。 第四和第五有源区也基本上垂直于第二有源区形成。

    Test cells for semiconductor yield improvement
    7.
    发明授权
    Test cells for semiconductor yield improvement 有权
    测试电池用于半导体产量提高

    公开(公告)号：US07807480B2

    公开(公告)日：2010-10-05

    申请号：US12002094

    申请日：2007-12-14

    申请人： Brian Stine ,  Victor Kitch ,  Mark Zwald ,  Stefano Tonello

    发明人： Brian Stine ,  Victor Kitch ,  Mark Zwald ,  Stefano Tonello

    IPC分类号： H01L21/66

    CPC分类号： G11C29/025 ,  G01R31/2884 ,  G11C17/14 ,  G11C29/006 ,  G11C29/24 ,  G11C2029/0403 ,  H01L22/34 ,  H01L2924/0002 ,  H01L2924/00

    摘要： A test cell for localizing defects includes a first active region, a second active region formed substantially parallel to the first active region, a third active region formed substantially parallel to the first and second active regions, a fourth active region formed between the first and second active regions, and a fifth active region formed between the second and third active regions. The fourth and fifth active regions are formed adjacent to opposite end portions of the second active region. The fourth and fifth active regions are also formed substantially perpendicular to the second active region.

    摘要翻译： 用于定位缺陷的测试单元包括第一有源区，基本上平行于第一有源区形成的第二有源区，基本上平行于第一和第二有源区形成的第三有源区，形成在第一和第二有源区之间的第四有源区 有源区和形成在第二和第三有源区之间的第五有源区。 第四和第五有源区域邻近第二有源区域的相对端部分形成。 第四和第五有源区也基本上垂直于第二有源区形成。

    Test structures and models for estimating the yield impact of dishing and/or voids
    8.
    发明申请
    Test structures and models for estimating the yield impact of dishing and/or voids 有权
    用于估计凹陷和/或空隙的屈服影响的测试结构和模型

    公开(公告)号：US20050074908A1

    公开(公告)日：2005-04-07

    申请号：US10492513

    申请日：2004-10-08

    申请人： Dennis Ciplickas ,  Brian Stine ,  Yanwen Fei

    发明人： Dennis Ciplickas ,  Brian Stine ,  Yanwen Fei

    IPC分类号： H01L23/544 ,  H01L21/66 ,  H01L21/44 ,  H01L23/58 ,  H01L29/10

    CPC分类号： H01L22/34

    摘要： A test structure comprising a test pattern is formed on a substrate. The test pattern includes a first comb structure having a plurality of tines, and a second structure. The second structure may be a snake structure having a plurality of side walls or a second comb structure having a plurality of side walls. The tines of the first comb structure are positioned within side walls of the snake structure or second comb structure. The tines of the first comb structure are offset from a center of the side walls. Test data collected from the test structure are analyzed, to estimate product yield. The test structure may have a lower layer pattern, such that topographical variations of the lower layer pattern propagate to an upper layer pattern of the test structure.

    Zoom in pin nest structure, test vehicle having the structure, and method of fabricating the structure
    9.
    发明申请
    Zoom in pin nest structure, test vehicle having the structure, and method of fabricating the structure 失效
    放大针巢结构，具有结构的测试车辆，以及制造结构的方法

    公开(公告)号：US20050122123A1

    公开(公告)日：2005-06-09

    申请号：US10508506

    申请日：2003-03-26

    申请人： Brian Stine ,  Christopher Hess ,  Larg Weiland ,  Deniis Ciplickas

    发明人： Brian Stine ,  Christopher Hess ,  Larg Weiland ,  Deniis Ciplickas

    IPC分类号： H01L23/544 ,  G01R31/26

    CPC分类号： H01L22/34

    摘要： A test vehicle (100) comprises a substrate (99), a plurality of nested serpentine lines (202) on the substrate, and a plurality of test pads (204) on the substrate. Each serpentine line has a plurality of turn sections that comprise two parallel line segments connected by a perpendicular line segment. Each of the plurality of test pads is connected to a respective turn section of a respective one of the nested serpentine lines. Each pair of test pads connected to one of the subset of the nested serpentine lines has at least a respectively different turn section portion connected therebetween.

    摘要翻译： 测试车辆（100）包括衬底（99），在衬底上的多个嵌套蛇形线（202）和在衬底上的多个测试焊盘（204）。 每个蛇形线具有多个转弯部分，其包括通过垂直线段连接的两条平行线段。 多个测试垫中的每一个连接到相应的一个嵌套蛇形线的相应转向部分。 连接到嵌套蛇形线的子集中的一个的每对测试焊盘至少具有连接在它们之间的分别不同的转向部分。