公开(公告)号：US11839903B2

公开(公告)日：2023-12-12

申请号：US16608046

申请日：2018-04-04

Applicant: Edwards Limited

Inventor： Christopher Mark Bailey ,  Michael Roger Czerniak

IPC: F04D13/00 ,  B08B15/02 ,  G03F7/00 ,  B01D53/64 ,  H01L21/67 ,  B01F23/10 ,  B01F35/71 ,  B01F35/21 ,  B01F35/221 ,  F04D13/12

CPC classification number: B08B15/02 ,  B01D53/64 ,  B01F23/191 ,  B01F35/2111 ,  B01F35/2132 ,  B01F35/2211 ,  B01F35/718 ,  F04D13/12 ,  G03F7/70916 ,  G03F7/70933 ,  H01L21/67017 ,  F04D13/00

Abstract: A vacuum pumping system which comprises a plurality of vacuum pumping arrangements for evacuating a flammable gas stream and exhausting the gas stream through an exhaust outlet. A housing houses the vacuum pumping arrangements and forms an air flow duct for an air flow for mixing with the exhaust gas stream output from the exhaust outlet in a mixing region in the housing. An airflow generator generates an air flow through the air flow duct to cause mixing of air with the flammable gas stream to a percentage of the flammable gas in the air flow lower than the lower flammability limit of the flammable gas. An airflow sensor senses the flow of air for determining if the air flow is sufficient to dilute the flammable gas to lower than said percentage.

公开(公告)号：US20200047225A1

公开(公告)日：2020-02-13

申请号：US16608046

申请日：2018-04-04

Applicant: Edwards Limited

Inventor： Christopher Mark Bailey ,  Michael Roger Czerniak

IPC: B08B15/02 ,  B01F3/02 ,  B01F15/00 ,  B01F15/02 ,  B01D53/64 ,  G03F7/20 ,  H01L21/67

Abstract: A vacuum pumping system which comprises a plurality of vacuum pumping arrangements for evacuating a flammable gas stream and exhausting the gas stream through an exhaust outlet. A housing houses the vacuum pumping arrangements and forms an air flow duct for an air flow for mixing with the exhaust gas stream output from the exhaust outlet in a mixing region in the housing. An airflow generator generates an air flow through the air flow duct to cause mixing of air with the flammable gas stream to a percentage of the flammable gas in the air flow lower than the lower flammability limit of the flammable gas. An airflow sensor senses the flow of air for determining if the air flow is sufficient to dilute the flammable gas to lower than said percentage.

公开(公告)号：US20180207581A1

公开(公告)日：2018-07-26

申请号：US15746266

申请日：2016-06-15

Applicant: Edwards Limited

Inventor： Christopher Mark Bailey ,  Clive Marcus Lloyd Tunna ,  Jack Raymond Tattersall ,  Ingo Stephen Graham ,  Michael Roger Czerniak ,  Gary Peter Knight ,  Darren Mennie ,  Duncan Michael Price ,  Derek Martin Baker ,  Andrew James Seeley

IPC: B01D53/75 ,  B01D53/68 ,  B01D53/78 ,  C23C16/44 ,  C23C16/24 ,  H01J37/32 ,  F04C19/00 ,  F04C29/00 ,  F04C23/00 ,  A62C4/00 ,  F23G7/06

CPC classification number: B01D53/75 ,  A62C4/00 ,  B01D53/68 ,  B01D53/78 ,  B01D2252/103 ,  B01D2257/204 ,  B01D2257/206 ,  B01D2258/0216 ,  C23C16/24 ,  C23C16/4405 ,  C23C16/4408 ,  C23C16/4412 ,  F04C19/001 ,  F04C19/005 ,  F04C23/006 ,  F04C29/0092 ,  F23G7/06 ,  H01J37/32807 ,  H01J37/32862 ,  H01J2237/335 ,  Y02C20/30

Abstract: Dry pumps are used to pump a variety of gas mixtures from the semiconductor industry. The present invention provides a liquid ring pump located between the dry pump and an abatement device to remove soluble corrosive materials prior to the exhaust gases entry to the abatement device, the work fluid exhausted from the liquid ring pump being separated from the gas prior to entry to the abatement device.