公开(公告)号：US09708508B2

公开(公告)日：2017-07-18

申请号：US14733235

申请日：2015-06-08

Applicant: GLOBALFOUNDRIES INC.

Inventor： Graham M. Bates ,  Michael T. Brigham ,  Joseph K. Comeau ,  Jason P. Ritter ,  Matthew T. Tiersch ,  Eva A. Shah ,  Eric J. White

IPC: H01L21/461 ,  C09G1/04 ,  H01L21/321 ,  C09G1/02 ,  C09K3/14 ,  H01L21/768 ,  C11D11/00

CPC classification number: C09G1/04 ,  C09G1/02 ,  C09K3/1463 ,  C09K3/1472 ,  C11D11/0047 ,  H01L21/3212 ,  H01L21/7684

Abstract: A composition and a method for chemical mechanical polishing. The composition includes a surfactant anion an alkyl alcohol and a diluent. The composition further includes abrasive particles and an oxidizer. The method includes providing the composition on a surface to be polished and polishing the surface by contacting the surface with a polishing pad.

公开(公告)号：US09221241B2

公开(公告)日：2015-12-29

申请号：US14191759

申请日：2014-02-27

Applicant: GLOBALFOUNDRIES INC.

Inventor： John J. Bandy ,  Graham M. Bates ,  Jeffery A. Brigante

IPC: B32B38/10 ,  B32B43/00 ,  B29C63/00 ,  B24B37/20 ,  B24B37/34

CPC classification number: B32B43/006 ,  B24B37/20 ,  B24B37/34 ,  B29C63/0013 ,  B32B38/10 ,  Y10T156/1168 ,  Y10T156/1174 ,  Y10T156/19 ,  Y10T156/195 ,  Y10T156/1978

Abstract: A method and apparatus for removing a pad adhesively secured to a platen. The apparatus includes a barrel assembly having a clamp assembly fixedly attached to a perimeter of the barrel assembly; a rotatable handle assembly nested within the barrel assembly; and a ratchet assembly nested between the handle assemble and the barrel assembly the ratchet assembly configured to engage the rotatable handle assembly.

Abstract translation: 一种用于去除粘附固定到压板上的衬垫的方法和装置。 该装置包括一个筒组件，其具有固定地连接到筒组件的周边的夹具组件; 嵌套在所述筒组件内的可旋转手柄组件; 以及棘爪组件，其嵌套在所述把手组合和所述筒组件之间，所述棘轮组件被构造成接合所述可旋转手柄组件。