公开(公告)号：US08766184B2

公开(公告)日：2014-07-01

申请号：US13994811

申请日：2011-11-02

申请人： Haruhiko Hatano ,  Hiroyuki Suzuki ,  Yoshihiko Nakayama

发明人： Haruhiko Hatano ,  Hiroyuki Suzuki ,  Yoshihiko Nakayama

IPC分类号： H01J37/21 ,  H01J37/20

CPC分类号： H01J37/21 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/022 ,  H01J2237/20 ,  H01J2237/208 ,  H01J2237/2605

摘要： With a scanning electron microscope (SEM) adopting a commonly available exhaust system such as a turbo-molecular pump, an ion pump, or a rotary pump, and so forth, there is realized an apparatus capable of safely executing observation, or adsorption of a target substance that is high in rarity. Further, there is realized a safe SEM low in the risk of an electrical discharge by providing the apparatus with a probe, a means for replacing an atmosphere in a specimen chamber, with a predetermined gas, and a means for forming an image by detection of an ion current, and detection of an absorption current. Further, there is provided a means for controlling the polarity of a voltage applied to the probe. Still further, there is provided a control means for controlling a value of the voltage applied to the probe according to a degree of vacuum.

摘要翻译： 使用采用诸如涡轮分子泵，离子泵或旋转泵等通常可用的排气系统的扫描电子显微镜（SEM）等，实现了能够安全地执行观察或吸附的装置 目标物质很稀少。 此外，通过为设备提供探针，用于用预定气体替换样品室中的气氛的装置，通过检测到用于形成图像的装置，实现了具有放电风险的安全SEM低 离子电流和吸收电流的检测。 此外，提供了用于控制施加到探针的电压的极性的装置。 此外，提供了一种用于根据真空度来控制施加到探针的电压的值的控制装置。

公开(公告)号：US20130284923A1

公开(公告)日：2013-10-31

申请号：US13994811

申请日：2011-11-02

申请人： Haruhiko Hatano ,  Hiroyuki Suzuki ,  Yoshihiko Nakayama

发明人： Haruhiko Hatano ,  Hiroyuki Suzuki ,  Yoshihiko Nakayama

IPC分类号： H01J37/18

CPC分类号： H01J37/21 ,  H01J37/18 ,  H01J37/185 ,  H01J37/20 ,  H01J37/265 ,  H01J37/28 ,  H01J2237/022 ,  H01J2237/20 ,  H01J2237/208 ,  H01J2237/2605

摘要： With a scanning electron microscope (SEM) adopting a commonly available exhaust system such as a turbo-molecular pump, an ion pump, or a rotary pump, and so forth, there is realized an apparatus capable of safely executing observation, or adsorption of a target substance that is high in rarity. Further, there is realized a safe SEM low in the risk of an electrical discharge by providing the apparatus with a probe, a means for replacing an atmosphere in a specimen chamber, with a predetermined gas, and a means for forming an image by detection of an ion current, and detection of an absorption current. Further, there is provided a means for controlling the polarity of a voltage applied to the probe. Still further, there is provided a control means for controlling a value of the voltage applied to the probe according to a degree of vacuum.

摘要翻译： 使用采用诸如涡轮分子泵，离子泵或旋转泵等通常可用的排气系统的扫描电子显微镜（SEM）等，实现了能够安全地执行观察或吸附的装置 目标物质很稀少。 此外，通过为设备提供探针，用于用预定气体替换样品室中的气氛的装置，通过检测到用于形成图像的装置，实现了具有放电风险的安全SEM低 离子电流和吸收电流的检测。 此外，提供了用于控制施加到探针的电压的极性的装置。 此外，提供了一种用于根据真空度来控制施加到探针的电压的值的控制装置。

公开(公告)号：US08921784B2

公开(公告)日：2014-12-30

申请号：US13505517

申请日：2010-11-12

申请人： Toru Iwaya ,  Sakae Kobori ,  Tomohisa Ohtaki ,  Haruhiko Hatano

发明人： Toru Iwaya ,  Sakae Kobori ,  Tomohisa Ohtaki ,  Haruhiko Hatano

IPC分类号： H01J37/143 ,  H01J37/141 ,  H01J37/28 ,  H01J37/26

CPC分类号： H01J37/143 ,  H01J37/04 ,  H01J37/141 ,  H01J37/26 ,  H01J37/28

摘要： There is provided a scanning electron microscope capable of achieving a size reduction of the device while at the same time suppressing the increase in column temperature as well as maintaining performance, e.g., resolution, etc. With respect to a scanning electron microscope for observing a sample by irradiating the sample with an electron beam emitted from an electron source and focused by condenser lenses, and detecting secondary electrons from the sample, the condenser lenses comprise both an electromagnetic coil-type condenser lens and a permanent magnet-type condenser lens.

摘要翻译： 提供了能够实现装置的尺寸减小同时抑制柱温增加以及维持性能（例如分辨率等）的扫描电子显微镜。关于用于观察样品的扫描电子显微镜 通过从电子源发射并由聚光透镜聚焦的电子束照射样品，并且从样品检测二次电子，聚光透镜包括电磁线圈型聚光透镜和永磁体型聚光透镜。

公开(公告)号：US20120211654A1

公开(公告)日：2012-08-23

申请号：US13505517

申请日：2010-11-12

申请人： Toru Iwaya ,  Sakae Kobori ,  Tomohisa Ohtaki ,  Haruhiko Hatano

发明人： Toru Iwaya ,  Sakae Kobori ,  Tomohisa Ohtaki ,  Haruhiko Hatano

IPC分类号： H01J37/26

CPC分类号： H01J37/143 ,  H01J37/04 ,  H01J37/141 ,  H01J37/26 ,  H01J37/28

摘要： There is provided a scanning electron microscope capable of achieving a size reduction of the device while at the same time suppressing the increase in column temperature as well as maintaining performance, e.g., resolution, etc. With respect to a scanning electron microscope for observing a sample by irradiating the sample with an electron beam emitted from an electron source and focused by condenser lenses, and detecting secondary electrons from the sample, the condenser lenses comprise both an electromagnetic coil-type condenser lens and a permanent magnet-type condenser lens.

摘要翻译： 提供了能够实现装置的尺寸减小同时抑制柱温增加以及维持性能（例如分辨率等）的扫描电子显微镜。关于用于观察样品的扫描电子显微镜 通过从电子源发射并由聚光透镜聚焦的电子束照射样品，并且从样品检测二次电子，聚光透镜包括电磁线圈型聚光透镜和永磁体型聚光透镜。

公开(公告)号：US09159530B2

公开(公告)日：2015-10-13

申请号：US14002056

申请日：2011-10-28

申请人： Kotaro Hosoya ,  Masaomi Ohno ,  Haruhiko Hatano

发明人： Kotaro Hosoya ,  Masaomi Ohno ,  Haruhiko Hatano

IPC分类号： H01J37/20 ,  H01J37/28

CPC分类号： H01J37/20 ,  H01J37/28 ,  H01J2237/2001 ,  H01J2237/2003

摘要： The present invention makes it possible, even when using an ordinary electron beam device (not an environment-controlled electron beam device), to create locally a low vacuum condition in the vicinity of a sample and cool said sample by means of a sample holder alone, without modifying the device or adding equipment such as a gas cylinder. The sample to be observed is placed in a sample holder provided with: a vessel that can contain a substance to serve as a gas source; and a through-hole in the bottom of a sample mount on said vessel. Via the through-hole, gas evaporating or volatilizing from the vessel is supplied to the sample under observation, thereby creating a localized low-vacuum state at or in the vicinity of the sample. Also, the heat of vaporization required for volatilization can be used to cool the sample.

摘要翻译： 本发明使得即使使用普通的电子束装置（不是环境控制的电子束装置）也可以在样品附近局部地产生低真空条件，并且可以通过样品架单独冷却所述样品 ，而不需要修改设备或添加气瓶等设备。 将要观察的样品放置在样品架中，该样品架设有：容纳可用作气体源的物质的容器; 以及在所述容器上的样品架底部的通孔。 通过通孔，从容器蒸发或挥发的气体被供给到观察样品，从而在样品或其附近产生局部低真空状态。 此外，挥发所需的蒸发热可用于冷却样品。

公开(公告)号：US20140014835A1

公开(公告)日：2014-01-16

申请号：US14002056

申请日：2011-10-28

申请人： Kotaro Hosoya ,  Masaomi Ohno ,  Haruhiko Hatano

发明人： Kotaro Hosoya ,  Masaomi Ohno ,  Haruhiko Hatano

IPC分类号： H01J37/20

CPC分类号： H01J37/20 ,  H01J37/28 ,  H01J2237/2001 ,  H01J2237/2003

摘要： The present invention makes it possible, even when using an ordinary electron beam device (not an environment-controlled electron beam device), to create locally a low vacuum condition in the vicinity of a sample and cool said sample by means of a sample holder alone, without modifying the device or adding equipment such as a gas cylinder. The sample to be observed is placed in a sample holder provided with: a vessel that can contain a substance to serve as a gas source; and a through-hole in the bottom of a sample mount on said vessel. Via the through-hole, gas evaporating or volatilizing from the vessel is supplied to the sample under observation, thereby creating a localized low-vacuum state at or in the vicinity of the sample. Also, the heat of vaporization required for volatilization can be used to cool the sample.

摘要翻译： 本发明使得即使使用普通的电子束装置（不是环境控制的电子束装置）也可以在样品附近局部地产生低真空条件，并且可以通过样品架单独冷却所述样品 ，而不需要修改设备或添加气瓶等设备。 将要观察的样品放置在样品架中，该样品架设有：容纳可用作气体源的物质的容器; 以及在所述容器上的样品架底部的通孔。 通过通孔，从容器蒸发或挥发的气体被供给到观察样品，从而在样品或其附近产生局部低真空状态。 此外，挥发所需的蒸发热可用于冷却样品。