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18 条记录 (耗时 0.028 秒)

    Liquid processing apparatus and liquid processing method
    1.
    发明授权
    Liquid processing apparatus and liquid processing method 有权
    液体处理装置和液体处理方法

    公开(公告)号：US08043467B2

    公开(公告)日：2011-10-25

    申请号：US11727656

    申请日：2007-03-27

    申请人： Hiromitsu Nanba ,  Masahiro Yoshida ,  Yuji Murakami ,  Hiroshi Nagayasu

    发明人： Hiromitsu Nanba ,  Masahiro Yoshida ,  Yuji Murakami ,  Hiroshi Nagayasu

    IPC分类号： H01L21/027 ,  G03F7/30

    CPC分类号： H01L21/31055 ,  H01L21/31111 ,  H01L21/67051 ,  H01L21/67075 ,  H01L21/6708

    摘要： A liquid processing apparatus is arranged to planarize a film on a substrate by supplying onto the film a process liquid for dissolving the film while rotating the substrate. The apparatus includes a substrate holding member configured to rotatably hold the substrate in a horizontal state, a rotation mechanism configured to rotate the substrate holding member, and a liquid supply mechanism configured to supply the process liquid onto a surface of the substrate. The liquid supply mechanism includes first and second liquid delivery nozzles configured to deliver the same process liquid. The first liquid delivery nozzle has a smaller diameter and provides a smaller delivery flow rate, as compared to the second liquid delivery nozzle. The first liquid delivery nozzle is inclined to deliver the process liquid in a rotational direction of the substrate, and is movable between a center of the substrate and a peripheral edge thereof.

    摘要翻译： 液体处理装置被布置成通过在旋转基板的同时向膜上提供用于溶解膜的处理液体来平坦化基板上的膜。 该装置包括：基板保持部件，被配置为将基板可旋转地保持在水平状态;旋转机构，其构造成旋转基板保持部件;以及液体供给机构，其构造成将处理液体供给到基板的表面。 液体供给机构包括配置成输送相同的处理液体的第一和第二液体输送喷嘴。 与第二液体输送喷嘴相比，第一液体输送喷嘴具有较小的直径并且提供较小的输送流量。 第一液体输送喷嘴倾斜以沿基板的旋转方向输送处理液体，并且可在基板的中心与其周边边缘之间移动。

    Liquid processing apparatus and liquid processing method
    2.
    发明申请
    Liquid processing apparatus and liquid processing method 有权
    液体处理装置和液体处理方法

    公开(公告)号：US20070231483A1

    公开(公告)日：2007-10-04

    申请号：US11727656

    申请日：2007-03-27

    申请人： Hiromitsu Nanba ,  Masahiro Yoshida ,  Yuji Murakami ,  Hiroshi Nagayasu

    发明人： Hiromitsu Nanba ,  Masahiro Yoshida ,  Yuji Murakami ,  Hiroshi Nagayasu

    IPC分类号： B05D3/12 ,  B05C11/02 ,  B05B3/00

    CPC分类号： H01L21/31055 ,  H01L21/31111 ,  H01L21/67051 ,  H01L21/67075 ,  H01L21/6708

    摘要： A liquid processing apparatus is arranged to planarize a film on a substrate by supplying onto the film a process liquid for dissolving the film while rotating the substrate. The apparatus includes a substrate holding member configured to rotatably hold the substrate in a horizontal state, a rotation mechanism configured to rotate the substrate holding member, and a liquid supply mechanism configured to supply the process liquid onto a surface of the substrate. The liquid supply mechanism includes first and second liquid delivery nozzles configured to deliver the same process liquid. The first liquid delivery nozzle has a smaller diameter and provides a smaller delivery flow rate, as compared to the second liquid delivery nozzle. The first liquid delivery nozzle is inclined to deliver the process liquid in a rotational direction of the substrate, and is movable between a center of the substrate and a peripheral edge thereof.

    摘要翻译： 液体处理装置被布置成通过在旋转基板的同时向膜上提供用于溶解膜的处理液体来平坦化基板上的膜。 该装置包括：基板保持部件，被配置为将基板可旋转地保持在水平状态;旋转机构，其构造成旋转基板保持部件;以及液体供给机构，其构造成将处理液体供给到基板的表面。 液体供给机构包括配置成输送相同的处理液体的第一和第二液体输送喷嘴。 与第二液体输送喷嘴相比，第一液体输送喷嘴具有较小的直径并且提供较小的输送流量。 第一液体输送喷嘴倾斜以沿基板的旋转方向输送处理液体，并且可在基板的中心与其周边边缘之间移动。

    SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME
    3.
    发明申请
    SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING SAME 有权
    半导体器件及其制造方法

    公开(公告)号：US20140353678A1

    公开(公告)日：2014-12-04

    申请号：US14363914

    申请日：2012-08-02

    申请人： Tsuyoshi Kawakami ,  Kenji Hamada ,  Kohei Ebihara ,  Akihiko Furukawa ,  Yuji Murakami

    发明人： Tsuyoshi Kawakami ,  Kenji Hamada ,  Kohei Ebihara ,  Akihiko Furukawa ,  Yuji Murakami

    IPC分类号： H01L29/06 ,  H01L29/66 ,  H01L29/861 ,  H01L29/78 ,  H01L21/266 ,  H01L29/872

    CPC分类号： H01L29/063 ,  H01L21/266 ,  H01L29/0615 ,  H01L29/0619 ,  H01L29/0638 ,  H01L29/0692 ,  H01L29/0847 ,  H01L29/1608 ,  H01L29/42368 ,  H01L29/66136 ,  H01L29/66143 ,  H01L29/66659 ,  H01L29/7835 ,  H01L29/8611 ,  H01L29/872

    摘要： A semiconductor device includes an active region formed in an upper layer portion of a semiconductor layer of a first conductivity type, and a plurality of electric field relaxation layers disposed from an edge of the active region toward the outside so as to surround the active region. The plurality of electric field relaxation layers include a plurality of first electric field relaxation layers and a plurality of second electric field relaxation layers alternately disposed adjacent to each other, the first electric field relaxation layer and the second electric field relaxation layer adjacent to each other forming a set. Impurities of a second conductivity type are implanted to the first electric field relaxation layers at a first surface density, widths of which becoming smaller as apart from the active region. Impurities of the second conductivity type are implanted to the second electric field relaxation layers at a second surface density lower than the first surface density, widths of which becoming larger as apart from the active region.

    摘要翻译： 半导体器件包括形成在第一导电类型的半导体层的上层部分中的有源区和从有源区的边缘朝向外部设置以围绕有源区的多个电场弛豫层。 多个电场弛豫层包括彼此相邻交替设置的多个第一电场弛豫层和多个第二电场弛豫层，第一电场弛豫层和彼此相邻的第二电场弛豫层形成 一套。 第二导电类型的杂质以第一表面密度注入第一电场弛豫层，其宽度随着活性区域的变小而变小。 第二导电类型的杂质以比第一表面密度低的第二表面密度注入第二电场弛豫层，其宽度随着活性区域的变大而变大。

    Method for producing magnetic recording medium and magnetic recording replaying device
    4.
    发明授权
    Method for producing magnetic recording medium and magnetic recording replaying device 有权
    磁记录介质和磁记录重放装置的制造方法

    公开(公告)号：US08859033B2

    公开(公告)日：2014-10-14

    申请号：US13502970

    申请日：2010-10-20

    申请人： Manabu Ueda ,  Yuji Murakami ,  Akira Sakawaki ,  Zhipeng Wang

    发明人： Manabu Ueda ,  Yuji Murakami ,  Akira Sakawaki ,  Zhipeng Wang

    IPC分类号： G11B5/855 ,  B05D1/32

    CPC分类号： G11B5/855 ,  B05D1/32

    摘要： A production method of a magnetic recording medium of the present invention includes: a step of forming a magnetic layer (2) on a non-magnetic substrate (1); a step of forming a dissoluble layer (3) on the magnetic layer (2); a step of forming a mask layer (4) on the dissoluble layer (3); a step of patterning the dissoluble layer (3) and the mask layer (4) to a shape corresponding to a magnetic recording pattern (2a); a step of performing a partial modification or removal of the magnetic layer (2) by use of the patterned mask layer (4); and a step of dissolving the dissoluble layer (3) with a chemical agent so as to remove the dissoluble layer (3) together with the mask layer (4) formed thereon from the top of the magnetic layer (2), wherein the magnetic recording medium has the magnetically-separated magnetic recording pattern (2a).

    摘要翻译： 本发明的磁记录介质的制造方法包括：在非磁性基板（1）上形成磁性层（2）的工序; 在所述磁性层（2）上形成可溶性层（3）的步骤; 在所述溶解层（3）上形成掩模层（4）的步骤; 将可溶性层（3）和掩模层（4）图案化成与磁记录图案（2a）相对应的形状的步骤; 通过使用图案化掩模层（4）进行部分修改或去除磁性层（2）的步骤; 以及通过化学试剂溶解所述溶解层（3）以从所述磁性层（2）的顶部与形成在其上的掩模层（4）一起除去所述溶解层（3）的步骤，其中所述磁记录 介质具有磁分离的磁记录图案（2a）。

    Recording apparatus, recording method, and program
    5.
    发明授权
    Recording apparatus, recording method, and program 失效
    记录装置，记录方法和程序

    公开(公告)号：US08320745B2

    公开(公告)日：2012-11-27

    申请号：US11517616

    申请日：2006-09-07

    申请人： Kensuke Ohnuma ,  Hideki Asazu ,  Takehisa Souraku ,  Yuji Murakami

    发明人： Kensuke Ohnuma ,  Hideki Asazu ,  Takehisa Souraku ,  Yuji Murakami

    IPC分类号： H04N5/76 ,  H04N9/80 ,  H04N5/445 ,  G06F3/00 ,  G06F13/00

    CPC分类号： H04N5/782 ,  H04N21/462 ,  H04N21/47214 ,  H04N21/84

    摘要： A recording apparatus is disclosed which records at least either a video or an audio signal of a broadcast program in accordance with reservation information. The recording apparatus includes: an acquisition block configured to acquire program information about the broadcast program; a calculation block configured to calculate a degree of similarity between a program name included in the reservation information and the program name described in the program information acquired by the acquisition block; a changing block configured to change the reservation information using the program information about the broadcast program determined by the degree of similarity, the changing block further changing the reservation information based on the program information about the broadcast program corresponding to program identification information included in the reservation information; and a recording control block configured to record at least either the video or the audio signal of the broadcast program in accordance with the reservation information.

    摘要翻译： 公开了根据预约信息记录广播节目的视频或音频信号的至少一个的记录装置。 记录装置包括：获取块，被配置为获取关于广播节目​​的节目信息; 计算块，被配置为计算包括在预约信息中的节目名称与由获取块获取的节目信息中描述的节目名称之间的相似度; 改变块，被配置为使用由相似度确定的关于广播节目​​的节目信息来改变预约信息，改变块基于与包括在预约中的节目标识信息相对应的关于广播节目​​的节目信息进一步改变预约信息 信息; 以及记录控制块，被配置为根据预约信息来记录广播节目的视频或音频信号中的至少一个。

    Substrate for labo-on-a-chip
    6.
    发明申请
    Substrate for labo-on-a-chip 审中-公开
    基板实验室芯片

    公开(公告)号：US20070178240A1

    公开(公告)日：2007-08-02

    申请号：US11587024

    申请日：2005-04-21

    申请人： Yoshiaki Yamazaki ,  Naoki Kawazoe ,  Masashi Higasa ,  Giman Jung ,  Hitoshi Nobumasa ,  Yuji Murakami

    发明人： Yoshiaki Yamazaki ,  Naoki Kawazoe ,  Masashi Higasa ,  Giman Jung ,  Hitoshi Nobumasa ,  Yuji Murakami

    IPC分类号： B05D3/02

    CPC分类号： G01N27/44747

    摘要： The present invention relates to a lab-on-chip substrate, comprising a resin having a silicon content of 10% or less by weight as its base material and a hydrophilic polymer covalently bound onto the surface thereof by high-energy ray irradiation, and in particular, to a protein-processing chip. The present invention provides a lab-on-chip substrate resistant to washing and usable for an extended period of time without adsorption of proteins on the base material surface, i.e., a protein electrophoretic polymeric chip having a microchannel allowing high-accuracy analysis of trace amounts of proteins because of reduction in the amount of detection noise.

    摘要翻译： 本发明涉及一种芯片上芯片基板，其包括硅含量为10重量％以下的树脂作为其基材，以及通过高能射线照射共价结合到其表面上的亲水性聚合物， 特别是蛋白质加工芯片。 本发明提供一种耐洗涤实验室的片上基片，并且可延长使用时间，而不会在基材表面上吸附蛋白质，即具有微通道的蛋白质电泳聚合物芯片，允许微量的高精度分析 的蛋白质，因为检测噪声量的减少。