摘要:
A semiconductor device includes an active region formed in an upper layer portion of a semiconductor layer of a first conductivity type, and a plurality of electric field relaxation layers disposed from an edge of the active region toward the outside so as to surround the active region. The plurality of electric field relaxation layers include a plurality of first electric field relaxation layers and a plurality of second electric field relaxation layers alternately disposed adjacent to each other, the first electric field relaxation layer and the second electric field relaxation layer adjacent to each other forming a set. Impurities of a second conductivity type are implanted to the first electric field relaxation layers at a first surface density, widths of which becoming smaller as apart from the active region. Impurities of the second conductivity type are implanted to the second electric field relaxation layers at a second surface density lower than the first surface density, widths of which becoming larger as apart from the active region.
摘要:
A liquid processing apparatus is arranged to planarize a film on a substrate by supplying onto the film a process liquid for dissolving the film while rotating the substrate. The apparatus includes a substrate holding member configured to rotatably hold the substrate in a horizontal state, a rotation mechanism configured to rotate the substrate holding member, and a liquid supply mechanism configured to supply the process liquid onto a surface of the substrate. The liquid supply mechanism includes first and second liquid delivery nozzles configured to deliver the same process liquid. The first liquid delivery nozzle has a smaller diameter and provides a smaller delivery flow rate, as compared to the second liquid delivery nozzle. The first liquid delivery nozzle is inclined to deliver the process liquid in a rotational direction of the substrate, and is movable between a center of the substrate and a peripheral edge thereof.
摘要:
The present invention provides a magnetic recording medium which enables improvement of the layer quality of magnetic layer grown on the surface of a soft magnetic underlayer by conducting excellent control of crystal orientation by imparting an optimal half-width of the Rocking curve (Δθ50), as well as obtainment of SNR that suppresses generation of TA and enables realization of high-density recording. The magnetic recording medium includes a soft magnetic underlayer, an orientation control layer, a perpendicular magnetic recording layer, and a protective layer, which are disposed on top of a non-magnetic substrate; wherein the magnetic anisotropy ratio (Hmr/Hmc) of the soft magnetic underlayer is 1 or less, and Δθ50 is 1 to 6 degrees. The soft magnetic underlayer is formed on the primary surface of the non-magnetic substrate where the primary surface has been polished one substrate at a time by a sheet-type texture processing device using polishing tape and a slurry containing colloidal silica abrasive grain.
摘要:
At first, with a chamber being filled with a first gas, a process liquid is supplied onto a surface of a wafer in the chamber so as to process the surface of the wafer. At this time, the process liquid discharged from the chamber is returned to a process-liquid supplying part. Thereafter, with the chamber being filled with a second gas whose humidity is lower than that of the first gas, a fluid for forming a liquid film is supplied onto the surface of the wafer in the chamber to form a liquid film on the surface of the wafer and to dry the surface of the wafer.
摘要:
A semiconductor device includes an active region formed in an upper layer portion of a semiconductor layer of a first conductivity type, and a plurality of electric field relaxation layers disposed from an edge of the active region toward the outside so as to surround the active region. The plurality of electric field relaxation layers include a plurality of first electric field relaxation layers and a plurality of second electric field relaxation layers alternately disposed adjacent to each other, the first electric field relaxation layer and the second electric field relaxation layer adjacent to each other forming a set. Impurities of a second conductivity type are implanted to the first electric field relaxation layers at a first surface density, widths of which becoming smaller as apart from the active region. Impurities of the second conductivity type are implanted to the second electric field relaxation layers at a second surface density lower than the first surface density, widths of which becoming larger as apart from the active region.
摘要:
A production method of a magnetic recording medium of the present invention includes: a step of forming a magnetic layer (2) on a non-magnetic substrate (1); a step of forming a dissoluble layer (3) on the magnetic layer (2); a step of forming a mask layer (4) on the dissoluble layer (3); a step of patterning the dissoluble layer (3) and the mask layer (4) to a shape corresponding to a magnetic recording pattern (2a); a step of performing a partial modification or removal of the magnetic layer (2) by use of the patterned mask layer (4); and a step of dissolving the dissoluble layer (3) with a chemical agent so as to remove the dissoluble layer (3) together with the mask layer (4) formed thereon from the top of the magnetic layer (2), wherein the magnetic recording medium has the magnetically-separated magnetic recording pattern (2a).
摘要:
A recording apparatus is disclosed which records at least either a video or an audio signal of a broadcast program in accordance with reservation information. The recording apparatus includes: an acquisition block configured to acquire program information about the broadcast program; a calculation block configured to calculate a degree of similarity between a program name included in the reservation information and the program name described in the program information acquired by the acquisition block; a changing block configured to change the reservation information using the program information about the broadcast program determined by the degree of similarity, the changing block further changing the reservation information based on the program information about the broadcast program corresponding to program identification information included in the reservation information; and a recording control block configured to record at least either the video or the audio signal of the broadcast program in accordance with the reservation information.
摘要:
A liquid processing apparatus is arranged to planarize a film on a substrate by supplying onto the film a process liquid for dissolving the film while rotating the substrate. The apparatus includes a substrate holding member configured to rotatably hold the substrate in a horizontal state, a rotation mechanism configured to rotate the substrate holding member, and a liquid supply mechanism configured to supply the process liquid onto a surface of the substrate. The liquid supply mechanism includes first and second liquid delivery nozzles configured to deliver the same process liquid. The first liquid delivery nozzle has a smaller diameter and provides a smaller delivery flow rate, as compared to the second liquid delivery nozzle. The first liquid delivery nozzle is inclined to deliver the process liquid in a rotational direction of the substrate, and is movable between a center of the substrate and a peripheral edge thereof.
摘要:
The present invention relates to a lab-on-chip substrate, comprising a resin having a silicon content of 10% or less by weight as its base material and a hydrophilic polymer covalently bound onto the surface thereof by high-energy ray irradiation, and in particular, to a protein-processing chip. The present invention provides a lab-on-chip substrate resistant to washing and usable for an extended period of time without adsorption of proteins on the base material surface, i.e., a protein electrophoretic polymeric chip having a microchannel allowing high-accuracy analysis of trace amounts of proteins because of reduction in the amount of detection noise.
摘要:
A substantially non-aqueous iodine microbicide composition comprising (a) a povidone-iodine in an amount of from 0.0005% to 1.0% by weight based on the total amount of the composition, and (b) a solvent comprising a lower alcohol having from 1 to 3 carbon atoms or a mixture of a lower alcohol having from 1 to 3 carbon atoms and a non-hydrated polyhydric alcohol, and an aerosol-type iodine microbicide composition containing the iodine microbicide composition.