摘要:
An .alpha.-diazoacetoacetic acid ester derived from cholic acid, deoxycholic acid, lithocholic acid or a derivative thereof is effective as a sensitizer in a photosensitive resin composition containing an alkali-soluble resin to form a resist for lithography using KrF excimer laser.
摘要:
There are provided an alkali-soluble siloxane polymer, an alkali-soluble silmethylene polymer, and an alkali-soluble polyorganosilsesquioxane polymer. They are useful as a photoresist for the fabrication of semiconductor devices. They are suitable for dry etching because of their superior resistance to oxygen plasmas.
摘要:
Disclosed herein is a photosensitive resin composition composed mainly of an alkali-soluble organometallic polymer and a photosensitive dissolution inhibitor. The composition is used as a positive type resist which can be developed with an alkali developing solution. The resist has high sensitivity, high resolution, and resistance to oxygen plasma.
摘要:
A process for producing a magnetic head slider with at least one rail having an air bearing surface. The process includes the steps of disposing a non-metallic film on a work surface to be shaped of a magnetic head slider material so as to be in intimate contact with the work surface, patterning the non-metallic film disposed on the work surface into at least one predetermined rail shape, shaping the work surface of the magnetic head slider material utilizing the patterned non-metallic film as a mask, and stripping off the patterned non-metallic film utilized as a mask which remains on the work surface of the slider material so as to provide at least one shaped slider rail of the magnetic head slider.
摘要:
A magnetic head element has one or more rails formed on the surface thereof. Each rail is formed so as to have a tapered angle of 55-85°. To form such a rail, ion milling is conducted; the rail substrate used is allowed to have an inclination angle to 15-60° and is rotated; and there is used, as the ion milling gas, a fluorinated hydrocarbon (e.g., CH2FCF3) gas alone or a mixed gas of said fluorinated hydrocarbon gas and Ar, SF6 or the like. Accordingly, a magnetic head rail shape gives a small variation in flying height between magnetic bead and magnetic disc.
摘要:
An organic thin film consisting essentially of an organic compound is formed on a substrate surface by vacuum vapor deposition by exposing the organic compound as a vapor source to a laser beam having an energy level corresponding to that of the chemical bond of the organic compound, thereby sputtering the organic compound onto a substrate surface in vacuum and forming the organic thin film thereon. When a light or radiation-sensitive organic compound is used as the vapor source, a light or radiation-sensitive resist film is formed. The thin film thus formed retains the original chemical structure of the vapor source, and has a good flatness. Resolvability of resist film is improved owing to the absence of pin holes and particulate matters. A resist film having a higher sensitivity and a better contrast is formed by heating the substrate during the vapor deposition.
摘要:
Aliphatic aldehyde polymer containing at least one Si atom in its molecular chain is a positive type resist having a very high sensitivity to radiation such as electron beams, X-rays, ion beams, etc.
摘要:
A magnetic head slider assembly for a magnetic disk type recording/reproducing apparatus includes a slider body, a sliding pad provided on the slider body and projecting beyond a disk facing surface thereof, a thin film layer disposed at one end of the slider body, a magnetic head constituted by the thin film layer as an integral part thereof, and a core pad projection incorporating therein a core of the magnetic head and projecting beyond an adjacent disk facing surface of the slider body. The sliding pad is provided at a region of the slider body ahead of the core pad projection and prevents generation of a floating force by making use of a relative movement between the slider body and the magnetic disk. The core pad projection is not formed as a continuation of the slider body and is separated from the sliding pad a predetermined distance longitudinally of the slider body by a recess interposed therebetween whereby the core pad projection is positioned closer to the magnetic disk than a back end of the sliding pad.
摘要:
A magnetic head slider assembly for a magnetic disk type recording/reproducing apparatus includes a slider body, a floating pad provided on the slider body and projecting beyond a disk facing surface thereof, a thin film layer disposed at one end of the slider body, a magnetic head constituted by the thin film layer as an integral part thereof, and a core pad projection incorporating therein a core of the magnetic head and projecting beyond an adjacent disk facing surface of the slider body. The core pad projection is not formed as a continuation of the slider body and is separated from the floating pad a predetermined distance longitudinally of the slider body by a recess interposed therebetween whereby the core pad projection is positioned closer to the magnetic disk than a back end of the floating pad whereby influence of a process offset between the slider body and the magnetic head during fabrication process can be eliminated.
摘要:
A radiation sensitive polymer material having (a) one or more repeating units of the formula: ##STR1## wherein R is an alkyl group, a halogen atom, a hydrogen atom or a dimethylamino group, and (b) an addition polymerizable repeating unit derived from a compound having a CH.sub.2 .dbd.C
摘要翻译:一种辐射敏感性聚合物材料,其具有(a)一个或多个下式的重复单元:其中R是烷基,卤素原子,氢原子或二甲基氨基,和(b)可加聚的重复单元衍生 从分子中具有CH 2 = C <基团的化合物可以得到具有优异的抗干蚀刻性和对辐射高度敏感的正型抗蚀剂。